"Tomimasa Go,M. Kitamura,T. Gotow,Y. Miyamoto","PMA Evaluation of TiN ALD in InGaAs Nanosheet MOSFETs","International Microprocesses and Nanotechnology Conference",,,,,,2021,Oct. "M.Kitamura,T.Kanazawa,Y.Miyamoto","Evaluation of fabricationmethod of InGaAs nanosheet","13rd th Topical Workshop onHeterostructure Microelectronics, (TWHM 2019)",,,,," 6-6",2019,Aug. "’£ •Ά—Ο,‹ΰΰV “O,–k‘Ί –«,‹{–{ ‹±K","UV-O3•\–ΚŽ_‰»‚Ι‚ζ‚ιHfS2 MOSFET‚̐«”\‰ό‘P","‘ζ66‰ρ‰ž—p•¨—Šw‰οt‹GŠwpu‰‰‰ο",,,,," 11p-W521-4",2019,Mar. "–k‘Ί –«,‹ΰΰV “O,‹{–{ ‹±K","HSQ‚π—p‚’‚½InGaAsƒiƒmƒV[ƒg\‘’μ»–@•]‰Ώ","‘ζ66‰ρ‰ž—p•¨—Šw‰οt‹GŠwpu‰‰‰ο",,,,," 11a-M121-11",2019,Mar.