"Koichi Igarashi,Kenji Kawashima,Toshiharu Kagawa","Development of simultaneous measurement system for instantaneous",,"Sensors & Actuators A.",,"Vol. 140","No. Issue 1","pp. 1-7",2007,Oct. "五十嵐康一","微細加工技術を用いた気体用センサの開発",,,,,,,2007,Mar.