"T. Muto,Q. Zhu,J. Yamada,N. Kishi,M. Watanabe,E. Hotta","Estimation of Electron Temperature and Density of the Decay Plasma in a Laser-assisted Discharge Plasma Extreme Ultraviolet Source by using a Modified Stark Broadening Method","25th International Microprocesses and Nanotechnology Conference (MNC 2012)",,,,,,2012,Oct. "Qiushi Zhu,Takahiro Muto,Junzaburo Yamada,Nozomu Kishi,Masato Watanabe,Akitoshi Okino,Kazuhiko Horioka,Eiki Hotta","Estimation of electron temperature and density of the decay plasma in a laser-assisted discharge plasma extreme ultraviolet source by using a modified Stark broadening method",,"J. Appl. Phys.","American Insitute of Phyics","Vol. 110",,,2011,Dec. "Zhu Qiushi,Takahiro Muto,Junzaburo Yamada,Nozomu Kishi,Masato watanabe,Akitoshi Okino,Kazuhiko Horioka,Eiki Hotta","Estimation of electron temperature and density of the decay plasma in a LADPP EUV source","Joint Technical Meeting on Plasma Science and Technology and Pulsed Power Technology","The Papers of Joint Technical Meeting on Plasma Science and Technology and Pulsed Power Technology","IEE Japan",,,"pp. 15-20",2011,Dec. "Qiushi Zhu,Junzaburo Yamada,Nozomu Kishi,Tomonao Hosokai,Masato watanabe,Akitoshi Okino,Kazuhiko Horioka,Eiki Hotta","Pinch dynamics of the 13.5 nm EUV-emitting plasma in a LA-DPP source","2011 International Academic Symposium on Optoeletcronics and Microelectronics Technology (IASOMT 2011)","2011 International Academic Symposium on Optoeletcronics and Microelectronics Technology (IASOMT 2011)","IEEE",,,"pp. 175-178",2011,Nov. "Q Zhu,J Yamada,N Kishi,M Watanabe,A Okino,K Horioka,E Hotta","Investigation of the dynamics of the Z-pinch imploding plasma for a laser-assisted discharge-produced Sn plasma EUV source",,"J. Phys. D: Appl. Phys.","Institute of Physics","Vol. 44"," 145203","pp. 1-11",2011,Mar. "Qiushi Zhu,Junzaburo Yamada,Nozomu Kishi,Masato Watanabe,Akitoshi Okino,Kazuhiko Horioka,Eiki Hotta","Effects of plasma dynamics on the EUV emission from laser assisted discharge produced Sn plasma EUV source","2010 International Symposium on Extreme Ultraviolet Lithography","Web",,,,,2010,Nov. "Qiushi Zhu,Junzaburo Yamada,Nozomu Kishi,Tomonao Hosokai,Masato Watanabe,Akitoshi Okino,Kazuhiko Horioka,Eiki Hotta","Structure and Expansion Characteristics of Laser Ablation Tin Plasma into a Vacuum",,"Jpn. J. Appl. Phys.","The Japan Society of Applied Physics","Vol. 49"," 056201","pp. 1-6",2010,May "Qiushi Zhu,Junzaburo Yamada,Nozomu Kishi,Tomonao Hosokai,Masato Watanabe,Akitoshi Okino,Kazuhiko Horioka,Eiki Hotta","Structure and Expansion Characteristics of Laser Ablation Tin Plasma into a Vacuum","62nd Gaseous Electronics Conference",,,,,,2009,Aug. "Qiushi Zhu,Junzaburo Yamada,Nozomu Kishi,Tomonao Hosokai,MASATO WATANABE,AKITOSHI OKINO,EIKI HOTTA","Plasma Behavior of Laser Assisted Sn Discharge EUV Source","•½¬21”N“d‹CŠw‰ο‘S‘‘ε‰ο","•½¬21”N“d‹CŠw‰ο‘S‘‘ε‰ο","“d‹CŠw‰ο",," 1-185",,2009,Mar. "Junzaburo Yamada,Zhu Qiushi,Nozomu Kishi,Masato Watanabe,Akitoshi Okino,Tohru Kawamura,Kazuhiko Horioka,Eiki Hotta","Development of laser triggered tin discharge EUV light source","Pulsed Power Technology and Its Application to Plasma Science","Pulsed Power Technology and Its Application to Plasma Science","Šj—Z‡‰ΘŠwŒ€‹†Š"," NIFS-PROC-79",,"pp. 1-5",2009,Mar. "Eiki Hotta,Nozomu Kishi,Junzaburo Yamada,Qiushi Zhu,Tomonao Hosokai,Masato Watanabe,Akitoshi Okino","Plasma Dynamics in Laser Triggered Vacuum Arc Sn DPP EUV Source","2008 International Symposium on Extreme Ultraviolet Lithography",,,,," 26",2008,Oct. "Qiushi Zhu,Junzaburo Yamada,Nozomu Kishi,Tomonao Hosokai,Masato Watanabe,Akitoshi Okino,Eiki Hotta","Study on Sn-Fueled Discharge Produced Plasma (DPP) Extreme Ultraviolet (EUV) Source","The 2nd Japanese-German Student Workshop on Plasma Science and Technology",,,,,,2008,July "Masato Watanabe,Nozomu Kishi,Junzaburo Yamada,Osamu Sakuchi,Jiang Fei,Zhu Qiushi,Akitoshi Okino,Kazuhiko Horioka,Eiki Hotta","Experimental Study on Xenon and Tin Discharge Produced Plasma EUV Light Source","The 35th IEEE International Conference on Plasma Science","IEEE Conference Record Abstracts The 35th IEEE International Conference on Plasma Science","IEEE",," 1P67","p. 170",2008,June "Qiushi Zhu,Junzaburo Yamada,Nozomu Kishi,Masato Watanabe,Akitoshi Okino,Eiki Hotta","EUV Radiation from Laser Triggered Tin Target Discharge Produced Plasma","2008 International Workshop on EUV Lithography",,"SPIE",,,,2008,June "ŽR“c ~ŽO˜Y,½ή ·­Ό,Šέ –],“nη² ³l,MASNAVI MAJID,‰«–μ Wr,‰Ν‘Ί “O,–x‰ͺ ˆκ•F,–x“c ‰hŠμ","ƒŒ[ƒUƒgƒŠƒKŒ^Sn EUV•ϊ“dŒυŒΉ‚ΜŠJ”­","ƒpƒ‹ƒXƒpƒ[E•ϊ“d‡“―Œ€‹†‰ο","“d‹CŠw‰οƒpƒ‹ƒXƒpƒ[E•ϊ“d‡“―Œ€‹†‰οŽ‘—Ώ","“d‹CŠw‰ο",," PPT-08-22/ED-08-51","pp. 37-42",2008,May "”Ρ’Λ’Ό–η,Šέ–],›I”ς,“n粐³l,‰«–μWr,–x‰ͺˆκ•F,–x“c‰hŠμ","‹Ι’[Ž‡ŠOŒυi‚d‚t‚uj‚̐β‘ΞŒv‘ͺ",,"•½¬18”N“x‹€“―Œ€‹†•ρ‘","‘εγ‘εŠwƒŒ[ƒU[ƒGƒlƒ‹ƒM[ŠwŒ€‹†ƒZƒ“ƒ^[",,"No. 8-2","pp. 199-200",2008,Mar. "“n粐³l,Šέ–],ŽR“c~ŽO˜Y,–x“c‰hŠμ","ƒŒ[ƒUƒgƒŠƒKŒ^EUV•ϊ“dŒυŒΉ‚ΜŠJ”­","•½¬‚Q‚O”N“d‹CŠw‰ο‘S‘‘ε‰ο","•½¬‚Q‚O”N“d‹CŠw‰ο‘S‘‘ε‰οu‰‰˜_•ΆW","“d‹CŠw‰ο","Vol. 1",,"p. 60",2008,Mar. "Eiki Hotta,Yusuke Sakai,Nozomu Kishi,Masato Watanabe,Akitoshi Okino,Tohru Kawamura,Majid Masnavi,Kazuhiko Horioka","Discharge Produced Plasma EUV Light Source for Microlithography and Capillary Discharge SXR Laser","2008 Academic Symposium on Optoelectronics & Microelectronics Technology","ASOMT 2008","Harbin Chapter of EDS, IEEE",,,"p. 21",2008,Jan. "ŽR“c~ŽO˜Y,Šέ–],“n粐³l,‰«–μWr,‰Ν‘Ί“O,–x‰ͺˆκ•F,–x“c‰hŠμ","ƒŒ[ƒU[ƒAƒVƒXƒg‚π—p‚’‚½EUVŒυŒΉ‚ΜŠJ”­","ƒpƒ‹ƒXƒpƒ[Œ€‹†‰ο","“d‹CŠw‰οŒ€‹†‰οŽ‘—Ώ","“d‹CŠw‰ο","Vol. PPT-07-38?47",,"pp. 29-33",2007,Nov. "MASATO WATANABE,Nozomu Kishi,Naoya Iizuka,Shinya Orishimo,Fei Jiang,AKITOSHI OKINO,EIKI HOTTA","Optical Observation of Gas Jet Z-Pinch Discharge Produced Extreme Ultraviolet Light Source","16th IEEE International Pulsed Power Conference",,"IEEE",,,"pp. 1679-1682",2007,Nov. "Masato Watanabe,Nozomu Kishi,Jiang Fei,Akitoshi Okino,Bong-Seong Kim,Kwang-Cheol Ko,Kazuhiko Horioka,Eiki Hotta","Development of Xe and Sn Discharge Produced Plasma Light Source for EUV Lithography","2007 International EUVL Symposium",,"SEMATECH",,,"pp. SO-P01",2007,Oct. "Šέ–],”Ρ’Λ’ΌΖ,β–{•q˜Y,‘vmα©,¬—Ρ–υ“T,S.R. Mohanty,“n•Σ³l,‰«–μWr,–x“c‰hŠμ","“―Ž²“ρdƒmƒYƒ‹Œ^“d‹Ι‚π—p‚’‚½EUVŒυŒΉ‚̏o—Ν“Α«","•½¬‚P‚W”N“d‹CŠw‰οŠξ‘bEή—ΏE‹€’Κ•”–ε‘ε‰ο","•½¬‚P‚W”N“d‹CŠw‰οŠξ‘bEή—ΏE‹€’Κ•”–ε‘ε‰οiCD-ROM)",,,,"pp. 259",2006,Aug. "S.R.Mohanty,T.Sakamoto,Y.Kobayashi,Naoya Iizuka,Nozomu Kishi,MASATO WATANABE,Tohru Kawamura,AKITOSHI OKINO,KAZUHIKO HORIOKA,E.Hotta","Influence of electrode separation and gas curtain on extreme ultraviolet emission of a gas jet z-pinch source",,"Applied Physics Letters",,"Vol. 89","No. 4","pp. 041502-1?3",2006,July