"Kosuke Takenaka,Hibiki Komatsu,Taichi Sagano,Keisuke Ide,Susumu Toko,Takayoshi Katase,Toshio Kamiya,Yuichi Setsuhara","Hydrogen-included Plasma-assisted Reactive Sputtering for Conductivity Control of Ultra-Wide Bandgap Amorphous Gallium Oxide",,"Jpn. J. Appl. Phys.",,"Vol. 63",,"pp. 04SP65",2024,Aug.
"�µ‰ã–쑾ˆê,ˆäŽèŒ[‰î,•Ð�£‹M‹`,•½�¼�G“T,�×–ì�G—Y,�_’J—˜•v","ƒXƒpƒbƒ^ƒŠƒ“ƒO–@‚É‚æ‚éƒAƒ‚ƒ‹ƒtƒ@ƒXŽ_‰»ƒKƒŠƒEƒ€”––Œ‚Ì�ì�»‚ƃ_ƒCƒI�[ ƒh“Á�«‚Ì•]‰¿","”––Œ�Þ—¿ƒfƒoƒCƒXŒ¤‹†‰ï ‘æ19‰ñŒ¤‹†�W‰ï�u�V”¼“±‘Ì�Þ—¿�EƒfƒoƒCƒX�FSDGsŽÀŒ»‚ÖŒü‚¯‚Ä�v",,,,,,2022,Nov.