"Sen Yao,Shunji Goto,Ryo Tanabe,Tadahiko Shinshi,Minoru Uehara,Hitoshi Yamamoto","Positioning Control of a Cantilever Type Micro Actuator Using High-performance NdFeB/Ta Thin Film Magnets and Built-in Displacement Sensor","the 2009 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment","Proceedings of the 2009 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment",,,,"pp. 407-408",2009,June "田辺 亮,後藤駿治,SEN YAO,進士忠彦,上原稔,山本日登志","高性能薄膜ネオジム永久磁石を用いた2自由度駆動型マイクロアクチュエータ","第21回「電磁力関連のダイナミクス」シンポジウム","第21回「電磁力関連のダイナミクス」シンポジウム講演論文集",,,,"pp. 93-96",2009,May "Sen Yao,Shunji Goto,Junpei Sakurai,TADAHIKO SHINSHI,Minoru Uehara,Hitoshi Yamamoto","SiN-based Micro Cantilever Actuators Using NdFeB/Ta Permanent Magnetic Thin Film","Proceedings of IEEE-NEMS","The 4th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems",,,,"pp. 411-414",2009,Jan. "上原稔,後藤駿治,Sen Yao,進士忠彦,櫻井淳平,上原稔,山本日登志","薄膜ネオジム磁石を用いたマイクロアクチュエータの試作と位置決め制御","第17回MAGDAコンファレンスin日立","電磁現象および電磁力に関するコンファレンス講演論文集","日本AEM学会",,,"pp. 75-78",2008,Nov. "Sen Yao,Shunji Goto,Junpei Sakurai,Tadahiko Shinshi,Minoru Uehara","Micro Cantilever Type Magnetic Actuators Using NdFeB Thin Film",,"2008年度精密工学会秋季大会学術講演会講演論文集",,,,"pp. 549-550",2008,Sept. "Tadahiko SHINSHI,Shunji GOTO,Xiaoyou ZHANG,Akira SHIMOKOHBE,Setsuo TAKATANI","A Mini-Centrifugal Blood Pump Using 2-DOF Controlled Magnetic Bearing",,"Proceedings of 11th International Symposium on Magnetic Bearings (ISMB11)",,,,"pp. 274-279",2008,Aug. "後藤駿治,進士忠彦,PAI CHI NAN,土方亘,下河邉明,高谷節雄","磁気軸受を用いた小型遠心血液ポンプ",,"第50回自動制御連合講演会講演論文集",,,,"pp. 548-553",2007,Nov.