"Syunkai Watanabe,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Dependence of Structural Design on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers ?",,"Micro and Nano Engineering",,"Vol. 29",,"p. 100249",2024,Mar.
"Ryosuke Miyai,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Clarification of Geometric Effects on Long-Term Structural Stability of Ti/Au Multi- Layered Micro-Cantilevers",,"Micro and Nano Engineering",,"Vol. 23",,"p. 100244",2024,Mar.
"Taro Omura,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki ;  Ito,Yoshihiro Miyake,Masato Sone","Warpage Study of the Electrodeposited-Au Micro-Components Having the Ti/Au Multi-layered Structures toward MEMS Applications",,"Journal of The Electrochemical Society",,"Vol. 171",,"p. 032501",2024,Feb.
"Kisuke Miyado,Devi Srujana  Tenneti,Akira Onishi,Katsuyuki Machida,Tomoyuki Kurioka,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Serpentine Spring Design Technique for High Sensitivity MEMS Capacitive Accelerometer Fabricated by Gold Multi-layer Metal Technology",,"Japanese Journal of Applied Physics",,"Vol. 63","No. 4","p. 04SP23",2024,Feb.
"御宿 希祐,大西 哲 Tenneti Devi Srujana 町田克之,TENNETI DEVI,町田 克之,栗岡 智行,Tso-Fu Mark Chang,曽根正人,三宅美博,伊藤浩之","Au錘１軸差動型CMOS-MEMS加速度センサのための錘位置制御電極の検討","第15回集積化MEMSシンポジウム","第15回集積化MEMSシンポジウム論文集","応用物理学会集積化MEMS技術研究会","Vol. 8A2-D-4",,,2023,Oct.
"Ryosuke Miyai,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki  Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Comprehensive Evaluation of Geometric Effects on Long-Term Structure Stability of Ti/Au Multi-Layered Micro-Cantilevers toward Gold-MEMS Capacitive Accelerometer","49th international conference on Micro and Nano Engineering (MNE2023)","49th international conference on Micro and Nano Engineering (MNE2023)",,,,,2023,Sept.
"Syunkai Watanabe,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Dependence of Structural Design on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers","MNE2023","49th international conference on Micro and Nano Engineering (MNE2023)",,,,,2023,Sept.
"御宿 希祐Kisuke Miyado,Devi.Srujana Tenneti,Akira Onishi,Katsuyuki Machida,Tomoyuki Kurioka,Parthojit CHAKRABORTY,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Design Technique of Serpentine Spring with Half Edge Span Beam Length for High Sensitivity Gold Proof-mass MEMS Capacitive Accelerometer","2023 International Conference on Solid State Devices and Materials","Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials, Nagoya, 2023, pp325-326 G-2-02",,,,,2023,Sept.
"御宿 希祐,大西 哲,Devi Srujana Tenneti,町田 克之,栗岡智行,CHAKRABORTYP,Tso-Fu Mark Chang,曽根正人,三宅美博,伊藤浩之","Au積層メタル技術によるMEMSデバイスの九十九折ばね定数ばらつき抑制の検討","第84回応用物理学会秋季学術講演会","第84回応用物理学会秋季学術講演会 講演予稿集",,"Vol. 20p-B201-1",,,2023,Sept.
"渡邉 春海,Chen Chun-Yi,栗岡 智行,Chang Tso-Fu Mark,大西 哲,Parthojit Chakraborty,町田 克之,伊藤 浩之,三宅 美博,曽根 正人","Ti/Au 多層カンチレバーの実効ヤング率における構造因子の研究","第70回応用物理学会春季学術講演会","第70回応用物理学会春季学術講演会",,,,"p. 16a-B410-4",2023,Mar.
"Akira Onishi,Kisuke Miyado,Devi Srujana Tenneti,Katsuyuki Machida,Parthojit Chakraborty,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Gold Single-Axis Differential Capacitive MEMS Accelerometer With Proof-Mass Position Control Electrode Fabricated by Post-CMOS Technology","2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)",,,,,2023,Mar.
"御宿 希祐,大西哲,TENNETIDEVI,町田克之,CHAKRABORTYP,曽根正人,三宅美博,伊藤浩之","Au積層メタル技術によるMEMSデバイスのための九十九折ばね設計手法の検討","第70回応用物理学会春季学術講演会","第70回応用物理学会春季学術講演会",,"  16a-B410-6",,,2023,Mar.
"宮井 良介,栗岡 智行,Chun-Yi Chen,Tso-Fu Mark Chang,大西 哲,Parthojit Chakraborty,町田 克之,伊藤 浩之,三宅 美博,曽根 正人","Ti/Au 積層構造有するマイクロカンチレバーの長期構造安定性に対する幾何学構造の影響","第70回応用物理学会春季学術講演会","第70回応用物理学会春季学術講演会",,,,"p. 16a-B410-5",2023,Mar.
"御宿 希祐,大西哲,TENNETIDEVI,CHAKRABORTYP,町田克之,飯田慎一,小西敏文,曽根正人,三宅美博,伊藤浩之","エッチホールを有するAu錘構造のMEMS加速度センサの減衰定数簡易解析モデルの検討","第83回応用物理学会秋季学術講演会","第83回応用物理学会秋季学術講演会",,"  22a-A406-2",,,2022,Sept.
"Taro Omura,Chun-Yi Chen,Tomoyuki Kurioka,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Warpage Characteristics of Gold Proof Mass  in MEMS Capacitive Accelerometer","48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES)",,,,,,2022,Sept.
"御宿 希祐,大西哲,TENNETIDEVI,CHAKRABORTYP,町田克之,飯田慎一,小西敏文,曽根正人,三宅美博,伊藤浩之","Au錘MEMS容量型加速度センサにおける減衰定数簡易解析モデルの検討","第13回集積化MEMS技術研究ワークショップ",,,,,,2022,Aug.
"Kohei Shibata,Akihiro Uchiyama,Akira Onishi,Katsuyuki Machida,Parthojit Chakraborty,Shin-ichi Iida,Toshifumi Konishi,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Simplified Analytical Damping Constant Model for Design of MEMS Capacitive Accelerometer with Gold Perforated Proof-mass Structure",,"IEEE Sensors Journal",,"Vol. 22","Issue 15",,2022,June
"Akira Onishi,Kohei Shibata,Akihiro Uchiyama,Katsuyuki  Machida,Taiki  Ogata,Noboru  Ishihara,Hirotaka Uchitomi,Tso-Fu Mark  Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki  Ito","Suppressed Drift and Low-Noise Sensor Module  with a Single-Axis Gold Proof-Mass MEMS Accelerometer for Micro Muscle Sound Measurement",,"Japanese Journal of Applied Physics",,"Vol. 61",,"p. SD1028",2022,Mar.
"柴田滉平,内山晃宏,大西哲,李尚曄,町田克之,石原昇,益一哉,伊藤浩之","Au錘1軸差動型CMOS-MEMS加速度センサの統合設計シミュレーションの検討","第13回集積化MEMSシンポジウム",,,,,,2021,Nov.
"内山晃宏,柴田滉平,大西哲,市川崇志,飯田慎一,李尚曄,石原昇,町田克之,益一哉,伊藤浩之","ワイドレンジAu錘1軸MEMS加速度センサの検討","第13回集積化MEMSシンポジウム",,,,,,2021,Nov.
"大西哲,内山晃宏,柴田滉平,市川崇志,李尚曄,飯田慎一,石原昇,町田克之,益一哉,伊藤浩之","3次元容量検出電極による単一Au錘3軸MEMS加速度センサの検討","第13回集積化MEMSシンポジウム",,,,,,2021,Nov.
"大西哲,内山晃宏,柴田滉平,市川崇志,李尚曄,飯田慎一,石原昇,町田克之,益一哉,伊藤浩之","3D容量検出電極による単一Au錘3軸MEMS加速度センサの検討","第82回 応用物理学会秋季学術講演会",,,,,,2021,Sept.
"柴田滉平,内山晃宏,大西哲,李尚曄,石原昇,町田克之,益一哉,伊藤浩之","1軸差動型CMOS-MEMS加速度センサの統合設計シミュレーションの検討","令和3年度E部門総合研究会",,,,,,2021,July