"Y. Takimoto,Huang Bin,O. Sakuchi,M. Watanabe,E. Hotta","Study of a Gas Jet Type Z-pinch EUV Light Source","Frontiers of Particle Beam and High Energy Density Plasma Science using Pulse Power Technology","Frontiers of Particle Beam and High Energy Density Plasma Science using Pulse Power Technology","NIFS"," NIFS-PROC-87",,"pp. 1-5",2011,Apr. "–x“c‰hŠì,“nç²³l,Žðˆä—Y—S,•xˆÀ–M•F,´…­Žu,ì’nC,‚‹´r•ã,ŽR“c~ŽO˜Y,ŽéHÎ,‰¡ŽR‰õ,‰Á“¡‘å•ã","•ú“dŒ^ƒr[ƒ€Šj—Z‡’†«ŽqŒ¹",,"•úŽËü—˜—pŽÀŒ±•ñ‘","“Œ‹žH‹Æ‘åŠwƒoƒCƒIŒ¤‹†Šî”ÕŽx‰‡ƒZƒ“ƒ^[","Vol. 24",,"pp. 29-32",2009,May "Osamu Sakuchi,Fei Jiang,Junzaburo Yamada,Qiushi Zhu,Masato Watanabe,Tohru Kawamura,Akitoshi Okino,Kazuhiko Horioka,Eiki Hotta","Development of Xenon Gas-Jet Z-Pinch Discharge and Laser Triggered Tin Discharge Light Sources for EUV Lithography","14th International Congress on Plasma Physics","ICPP2008 Abstracts","JSPF",," FG-P3-079","p. 349",2008,Sept. "Masato Watanabe,Nozomu Kishi,Junzaburo Yamada,Osamu Sakuchi,Jiang Fei,Zhu Qiushi,Akitoshi Okino,Kazuhiko Horioka,Eiki Hotta","Experimental Study on Xenon and Tin Discharge Produced Plasma EUV Light Source","The 35th IEEE International Conference on Plasma Science","IEEE Conference Record Abstracts The 35th IEEE International Conference on Plasma Science","IEEE",," 1P67","p. 170",2008,June "Sakuchi Osamu,Iizuka Naoya,Jiang Fei,Watanabe Masato,Kawamura Tohru,Okino Akitoshi,Horioka Kazuhiko,Hotta Eiki","Development of a Gas Jet-Type Z-pinch Plasma Light Source for EUV Lithography","The 25th Symposium on Plasma Processing (SPP-25)",,,,,,2008,Jan.