"高井渉,根津篤,松浦治明,赤塚洋","マイクロ波放電酸素プラズマの解離度に対する希ガス混入効果のアクチノメトリー測定","平成22年電気学会全国大会","平成22年電気学会全国大会講演論文集","電気学会",,,"p. 220",2010,Mar. "Wataru Takai,Atsushi Nezu,Haruaki Matsuura,Hiroshi Akatsuka","Diagnostics of oxygen-rare gas mixed plasmas excited by microwave discharge","The 27th Symposium on Plasma Processing","Proceedings 27th Symposium on Plasma Processing","Division of Plasma Electronics, The Japan Society of Applied Physics",,,"pp. 175-176",2010,Feb. "Wataru Takai,Atsushi Nezu,Haruaki Matsuura,Hiroshi Akatsuka","Diagnostics of oxygen-rare gas mixed plasmas excited by microwave discharge","The 6th Asia-Pacific International Symposium on the Basic and Application of Plasma Technology","Proc. The 6th Asia-Pacific International Symposium on the Basic and Application of Plasma Technology","Minghsin University of Science and Technology",,,"pp. 63-66",2009,Dec. "高井渉,根津篤,松浦治明,赤塚洋","マイクロ波励起による希ガス混入酸素プラズマの特性解析","電気学会研究会 プラズマ・パルスパワー・放電合同研究会","電気学会研究会資料 プラズマ・パルスパワー・放電合同研究会","社団法人 電気学会","Vol. PST-09-22~40","# PST-09-25","pp. 19-23",2009,Aug.