"Masaki Otomo,Masaya Hamada,Ryo Ono,Iriya Muneta,Kuniyuki Kakushima,Kazuo Tsutsui,Hitoshi Wakabayashi","Chemical states of PVD-ZrS2 film underneath scaled high-k film with self-oxidized ZrO2 film as interfacial layer",,"Japanese Journal of Applied Physics","IOP Publishing","Vol. 62",,"p. SC1015",2023,Jan.