"Shigeki Saito,Jeremy Gavriel,Juntian Zhou,Yuki Taoka","Effect of Heat-Induced Adjustable Stiffness at the Contact Interface on the Gripping Force of a Bipolar Electrostatic Chuck","2023 MRS Fall Meeting",,,,,,2023,Nov. "Jeremy Gavriel,Yuki Taoka,shigeki saito","Influence of heatinduced changeable stiffness a t the contact interface o n the gripping force of a bipolar electrostatic chuck","2023年度精密工学会春季大会学術講演会",,,,,,2023,Mar. "Jeremy Gavriel,Yuki Taoka,shigeki saito","Influence of the surface conductivity of a polymer film on the attractive force of a bipolar electrostatic chuck","MRS 2022 Spring",,,,,,2022,May "ジェレミー ガブリエル,田岡 祐樹,齊藤 滋規","吸着対象物としてのポリマーフィルムの表面導電性が双極型静電吸着デバイスの発生力に与える影響","2021年度精密工学会春季大会学術講演会","2021年度精密工学会春季大会学術講演会講演論文集",,,,,2021,Mar.