"KAZUO TSUTSUI,Masaoki Tanaka,Norifumi Hoshino,Hiroshi Nohira,Kuniyuki KAKUSHIMA,Ahmet Parhat,佐々木雄一朗,Bunji Mizuno,T. Muro,T. Kinoshita,takeo hattori,HIROSHI IWAI","Soft X-ray Photoelectron Spectroscopy Study of Activation and Deactivation of Impurities in Shallow Junctions","ICSICT(International Conference on Solid-State and Integrated Circuit Technology)2010",,,,,,2010,Nov.
"KAZUO TSUTSUI,Norifumi Hoshino,Yasumasa Nakagawa,Masaoki Tanaka,Hiroshi Nohira,Kuniyuki KAKUSHIMA,Ahmet Parhat,佐々木雄一朗,Bunji Mizuno,takeo hattori,HIROSHI IWAI","Depth Profiling of Chemical Bonding States of Impurity Atoms and Their Correlation with Electrical Activity in Si Shallow Junctions","IEEE IWJT 2010 Extended Abstracts 2010 International Workshop on Junction Technology",,,,,,2010,May
"田中正興,星野憲文,筒井一生,野平博司,室隆桂之,加藤有香子,木下豊彦,パールハットアヘメト,角嶋邦之,服部健雄,岩井洋","光電子分光により検出したSi中のAsおよびPの化学結合状態の評価","第57回応用物理学関係連合講演会","第57回応用物理学関係連合講演会講演予稿集",,,,"pp. 13-191",2010,Mar.
"星野憲文,中川恭成,野平博司,室 隆桂之,加藤 有香子,甲斐隆行,金成国,パールハットアヘメト,角嶋邦之,水野文二,木下 豊彦,筒井一生,服部健雄,岩井洋","光電子分光によるSi中Asの化学結合状態評価","第56回応用物理学関係連合講演会","第56回応用物理学関係連合講演会予稿集","応用物理学会",,"No. 2","pp. 883",2009,Mar.