"KAZUO TSUTSUI,Masaoki Tanaka,Norifumi Hoshino,Hiroshi Nohira,Kuniyuki KAKUSHIMA,Ahmet Parhat,佐々木雄一朗,Bunji Mizuno,T. Muro,T. Kinoshita,takeo hattori,HIROSHI IWAI","Soft X-ray Photoelectron Spectroscopy Study of Activation and Deactivation of Impurities in Shallow Junctions","ICSICT(International Conference on Solid-State and Integrated Circuit Technology)2010",,,,,,2010,Nov.
"田中正興,金原潤,宮田陽平,角嶋邦之,パールハットアヘメト,室隆桂之,木下豊彦,野平博司,筒井一生,室田 淳一,服部健雄,岩井洋","Siエピタキシャル層にドープされたボロンの軟X線光電子分光","第７１回応用物理学会学術講演会",,,,,,2010,Sept.
"KAZUO TSUTSUI,Norifumi Hoshino,Yasumasa Nakagawa,Masaoki Tanaka,Hiroshi Nohira,Kuniyuki KAKUSHIMA,Ahmet Parhat,佐々木雄一朗,Bunji Mizuno,takeo hattori,HIROSHI IWAI","Depth Profiling of Chemical Bonding States of Impurity Atoms and Their Correlation with Electrical Activity in Si Shallow Junctions","IEEE IWJT 2010 Extended Abstracts 2010 International Workshop on Junction Technology",,,,,,2010,May
"田中正興,星野憲文,筒井一生,野平博司,室隆桂之,加藤有香子,木下豊彦,パールハットアヘメト,角嶋邦之,服部健雄,岩井洋","光電子分光により検出したSi中のAsおよびPの化学結合状態の評価","第57回応用物理学関係連合講演会","第57回応用物理学関係連合講演会講演予稿集",,,,"pp. 13-191",2010,Mar.