"Tatsuhiko Mori,Tomoyuki Kurioka,Shunkai Watanabe,Chun-Yi Chen,Tso-Fu Mark Chang,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Effects of Annealing on Effective Young�fs Modulus of Ti/Au Multi-layered Micro-Cantilevers for MEMS Capacitive Accelerometers","MNE2025 Southampton","MNE2025 Southampton",,,,,2025,Sept.
"Tatsuhiko Mori,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Evaluation of Warpage Behavior of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-Layered Structures  caused by Thermal Treatment","CPIT2024, New Method of Damage and Failure Analysis of Structural Part","CPIT2024, New Method of Damage and Failure Analysis of Structural Part",,,,,2024,Oct.
"Tatsuhiko Mori,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Thermal Treatment Effects on Warpage of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-layered Structure  Toward High-sensitive Accelerometers","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)",,,,,2024,Sept.
"�X ’B•F,ŒI‰ª ’q�s,Chen Chun-Yi,Chang Tso-Fu Mark,’¬“c �Ž”V,ˆÉ“¡ �_”V,ŽO‘î ”ü”Ž,‘]�ª �³�l","Ti/Au �Ï‘w“d‹C‹à‚ß‚Á‚«�Ž‚Ì”½‚è•ÏŒ`‚Ì”M�ˆ—�‰·“xˆË‘¶�«•]‰¿","‘æ71‰ñ‰ž—p•¨—�Šw‰ï�t‹GŠw�p�u‰‰‰ï","Proc. The 71st JSAP Spring MeetinProc.",,,,"p. 23a-12K-2",2024,Mar.