"Masako Okumura,Tomoyuki Kurioka,Torauto Yamada,Tatsuhiko Mori,Tso-Fu Mark Chang,Yoshihiro Miyake,Hiroyuki Ito,Masato Sone,Katsuyuki Machida","Warpage Suppression and Device Characteristics of Gold Single-Axis Circular Proof-mass MEMS Capacitive Accelerometer Authors Information","International Microprocesses and Nanotechnology Conference (MNC 2025)",,,,,,2025,Nov.
"Tatsuhiko Mori,Tomoyuki Kurioka,Chun-Yi  Chen,Tso-Fu Mark Chang,Katsuyuki Machida,Hiroyuki Ito,Miyake,Masato Sone","Evaluation of the Annealing Induced Warpage of an Electrodeposited-Au Octagonal Proof Mass with a Ti/Au Multi-layered Structure toward MEMS Capacitive Accelerometers",,"Journal of The Electrochemical Society",,"Vol. 172",,"p. 102508",2025,Oct.
"奥村 雅子,栗岡 智行,森 達彦,山田 虎人,向出 隼人,Chun Yi-Chen,Tso-Fu Mark Chang,町田 克之,伊藤 浩之,三宅 美博,曽根 正人","静電容量型MEMS加速度センサにおける金錘の形状による反り抑制の検討","第17回集積化MEMSシンポジウム",,,,,,2025,Oct.
"森 達彦,栗岡 智行,渡邉 春海,Chun-Yi Chen,Tso-Fu Mark Chang,町田 克之,伊藤 浩之,三宅 美博,曽根 正人","静電容量型MEMS加速度センサに向けたTi/Au積層マイクロカンチレバーの実効ヤング率に対するアニーリングの影響評価","第17回集積化MEMSシンポジウム",,,,,,2025,Oct.
"Tatsuhiko Mori,Tomoyuki Kurioka,Shunkai Watanabe,Chun-Yi Chen,Tso-Fu Mark Chang,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Effects of Annealing on Effective Young’s Modulus of Ti/Au Multi-layered Micro-Cantilevers for MEMS Capacitive Accelerometers","MNE2025 Southampton","MNE2025 Southampton",,,,,2025,Sept.
"Tatsuhiko Mori,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Evaluation of Warpage Behavior of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-Layered Structures  caused by Thermal Treatment","CPIT2024, New Method of Damage and Failure Analysis of Structural Part","CPIT2024, New Method of Damage and Failure Analysis of Structural Part",,,,,2024,Oct.
"Tatsuhiko Mori,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Thermal Treatment Effects on Warpage of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-layered Structure  Toward High-sensitive Accelerometers","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)",,,,,2024,Sept.
"森 達彦,栗岡 智行,Chen Chun-Yi,Chang Tso-Fu Mark,町田 克之,伊藤 浩之,三宅 美博,曽根 正人","Ti/Au 積層電気金めっき錘の反り変形の熱処理温度依存性評価","第71回応用物理学会春季学術講演会","Proc. The 71st JSAP Spring MeetinProc.",,,,"p. 23a-12K-2",2024,Mar.