"–Ψ“cŒ›”V•,“ϊ–μŽj˜Y,ŽO‰Y ¬‹v,‘ςΉ”V,Šέ’J”ŽΊ,“ΏŒυ‰i•γ","H(CH3)2Al‚π—p‚’‚½MOCVD–@SiCŠξ”γ‚Φ‚ΜAl2O3–Œ‚ΜŒ`¬‚ΖAl2O3/SiC MOSFET‚Μ“d‹C“I“Α«•]‰Ώ","‘ζ‚V‚Q‰ρ‰ž—p•¨—Šw‰οŠwpu‰‰‰ο",,,,,,2011,Aug.