"Tetsuro Obu,Seiichiro Hara,Nobuyuki Takahashi","Measurement of areal surface topography using confocal laser microscope with tilted focal plane","The 19th International Conference on Precision Engineering (ICPE 2022 in Nara)","ICPE 2022 Proceedings","ICPE",,,,2022,Nov. "Nobuyuki TAKAHASHI,Seiichiro HARA","Wide-area Surface Profile Measurement by Confocal Laser Microscope Using Tilted Focal Plane","5th International Conference on Design Engineering and Science )ICDES 2020)","Proceedings of The 5th International Conference on Design Engineering and Science ICDES 2020",,,,,2020,Nov.