"Yuma Wada,Kurniawan Winarto,Kubouchi Masatoshi,田窪 毅,Tetsuya Yamamoto,MASATOSHI KUBOUCHI","プラズマエッチング装置に用いられるシール用FKM のラジカル劣化における応力の影響","CEJ 53nd Autumn Meeting","第53回化学工学会秋季大会 講演要旨集",,,,,2022,Sept. "Naofumi Iezumi,MASATOSHI KUBOUCHI,Winarto Kurniawan,Tsuyoshi Takubo,Yuma Wada,Tetsuya Yamamoto","Effect of strain on radical thinning rate of fluororubber for sealing products (II) - Tensile strain dependence of thinning rate using rectangular specimens -","2022Annual Meeting of the Materials Science Society of Japan","Proc. of 2022 Annual Meeting of the Materials Science Society of Japan","日本材料科学会",,,"pp. 14-15",2022,May