"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hideaki Nakajima,Minami Teranishi,Chun-Yi Chen,Tso-Fu Mark Chang,Masato Sone,Hiroshi Toshiyoshi,Kazuya Masu","Young’s modulus evaluation of electroplated Ti/Au structures for MEMS devices","29th International Microprocesses and Nanotechnology Conference (MNC 2016)",,,,,"pp. 10D-5-1",2016,Nov. "Minami Teranishi,Mark Chang,Chun Yi Chen,Daisuke Yamane,Kazuya Masu,Masato Sone,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi","電解金めっき法により作製した金/チタン積層構造を有する微小カンチレバーの構造安定性の評価","第33回「センサ・マイクロマシンと応用システム」シンポジウム","第33回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,2016,Oct. "Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","Structure Stability of High Aspect Ratio Ti/Au Two-Layer Cantilevers for Applications in MEMS Accelerometers",,"Microelectronics Engineering",,"Vol. 153",,"pp. 90-93",2016,Apr. "Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","Mechanical Characteristics of Structure Stability with Ti/Au Micro-Cantilevers Formed by Au Electroplating","ISE - Topical Meeting","ISE - Topical Meeting",,,,,2016,Apr. "Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","電解金めっきで作製したTi/Au微小カンチレバーの構造安定性","第63回応用物理学会春季学術講演会","第63回応用物理学会春季学術講演会",,,,,2016,Mar.