"Yuya Yamashita,Kenta Doi,Tetsuji Kiyota,Shuhei Watanabe,Kazuki Shimatani,Wataru Kikuchi,Atsushi Nezu,Hiroshi Akatsuka","Electron temperature diagnosis of CF4/O2 plasma based on fluorine atomic corona model by tomographic optical emission spectroscopic measurement","The 71st JSAP Spring Meeting","Extended Abstracts of the 71st JSAP Spring Meeting","The Japan Society of Applied Physics (JSAP)",,,"p. 07-009",2024,Mar.
"Kenta Ishi,Kenta Doi,Tetsuji Kiyota,Yuya Yamashita,Kazuma Yoneda,Shuhei Watanabe,Kazuki Shimatani,Atsushi Nezu,Hiroshi Akatsuka","Population Kinetics and Number Densities of Excited Species in Nitrogen Inductively Coupled Plasma","ISPlasma2024/IC-PLANTS2024/APSPT-13","Proc. ISPlasma2024/IC-PLANTS2024/APSPT-13","Organizing Committee of ISPlasma2024/IC-PLANTS2024/APSPT-13",,,,2024,Mar.
"Yuya Yamashita,Kenta Doi,Tetsuji Kiyota,Kenta Ishi,Shuhei Watanabe,Wataru Kikuchi,Atsushi Nezu,Hiroshi Akatsuka","Spatial distribution diagnosis of electron temperature and density of argon inductively coupled plasma by tomographic optical emission spectroscopic measurement and collisional-radiative model",,"J. Vac. Sci. Technol. A","AIP Publishing","Vol. 42","No. 2","  023003",2024,Jan.
"Yuya Yamashita,Kenta Doi,Tetsuji Kiyota,Wataru Kikuchi,Kenta Ishi,Shuhei Watanabe,Atsushi Nezu,Hiroshi Akatsuka","Spatial Diagnosis of Electron Temperature and Density of Argon Inductively Coupled Plasma by Improved Spectral Tomography Algorithm","The 41st Symposium on Plasma Processing (SPP-41)","Proceedings of 41st Symposium on Plasma Processing (SPP-41)","Plasma Electronics Division, Japan Society of Applied Physics",,,"pp. 64 - 65",2024,Jan.
"Shuhei Watanabe,Kenta Doi,Tetsuji Kiyota,Yuya Yamashita,Wataru Kikuchi,Kenta Ishi,Atsushi Nezu,Hiroshi Akatsuka","Optical Emission Spectroscopic Measurement of Inductively Coupled Oxygen Plasma","The 41st Symposium on Plasma Processing","Proceedings of 41st Symposium on Plasma Processing (SPP-41)","Plasma Electronics Division, Japan Society of Applied Physics",,,"pp. 82 - 83",2024,Jan.
"Kenta Ishi,Kenta Doi,Tetsuji Kiyota,Yuya Yamashita,Kazuma Yoneda,Shuhei Watanabe,Kazuki Shimatani,Atsushi Nezu,Hiroshi Akatsuka","Discussion on the Relationship between Number Densities of Excited States and Electron Temperature in Inductively Coupled Nitrogen Plasma","The 41st Symposium on Plasma Processing","Proceedings of 41st Symposium on Plasma Processing (SPP-41)","Plasma Electronics Division, Japan Society of Applied Physics",,,"pp. 30-31",2024,Jan.