"Yuchen Ye,Kenta Doi,Tetsuji Kiyota,Shuhei Watanabe,Kazuki Shimatani,Ayaki Sakurai,Yuya Yamashita,Wataru Kikuchi,Atsushi Nezu,Hiroshi Akatsuka","Detection of Two-Temperature Distributions of Argon ICP Using Collisional-Radiative Model and Tomographic Optical Emission Spectroscopy","2024 nifs Atomic Process Workshop","「プラズマの分光診断と原子分子素過程の研究フロンティア」「原子分子データ応用フォーラムセミナー」合同研究会(2024/12)要旨集","特定非営利活動法人 原子分子データ応用フォーラム",,,,2024,Dec.
"H. Akatsuka,S. Watanabe,K. Doi,T. Kiyota,Y. Yamashita,W. Kikuchi,K. Ishi,Y. Ye,A. Nezu","Optical Emission Spectroscopic Measurement of Electron Temperature and Density of Oxygen ICP","The 45th International Symposium on Dry Process (DPS2024)","Proc. DPS2024","International Symposium on Dry Process Organizing Committee",,,"pp. 81-82",2024,Nov.
"Yuya Yamashita,Kenta Doi,Tetsuji Kiyota,Shuhei Watanabe,Kazuki Shimatani,Wataru Kikuchi,Yuchen Ye,Atsushi Nezu,Hiroshi Akatsuka","Electron temperature diagnosis of CF4/O2 plasma  based on fluorine atomic corona model  by tomographic optical emission spectroscopic measurement","ESCAMPIG (Europhysics Conference on Atomic and Molecular Physics of Ionized Gases) 2024","Proceedings of ESCAMPIG2024","Department of Plasma Physics and Technology of Masaryk University (MUNI)",,,,2024,July
"Yuya Yamashita,Kenta Doi,Tetsuji Kiyota,Shuhei Watanabe,Kazuki Shimatani,Wataru Kikuchi,Atsushi Nezu,Hiroshi Akatsuka","Electron temperature diagnosis of CF4/O2 plasma based on fluorine atomic corona model by tomographic optical emission spectroscopic measurement","The 71st JSAP Spring Meeting","Extended Abstracts of the 71st JSAP Spring Meeting","The Japan Society of Applied Physics (JSAP)",,,"p. 07-009",2024,Mar.
"Kenta Ishi,Kenta Doi,Tetsuji Kiyota,Yuya Yamashita,Kazuma Yoneda,Shuhei Watanabe,Kazuki Shimatani,Atsushi Nezu,Hiroshi Akatsuka","Population Kinetics and Number Densities of Excited Species in Nitrogen Inductively Coupled Plasma","ISPlasma2024/IC-PLANTS2024/APSPT-13","Proc. ISPlasma2024/IC-PLANTS2024/APSPT-13","Organizing Committee of ISPlasma2024/IC-PLANTS2024/APSPT-13",,,,2024,Mar.
"Kenta Ishi,Kenta Doi,Tetsuji Kiyota,Yuya Yamashita,Kazuma Yoneda,Shuhei Watanabe,Kazuki Shimatani,Atsushi Nezu,Hiroshi Akatsuka","Discussion on the Relationship between Number Densities of Excited States and Electron Temperature in Inductively Coupled Nitrogen Plasma","The 41st Symposium on Plasma Processing","Proceedings of 41st Symposium on Plasma Processing (SPP-41)","Plasma Electronics Division, Japan Society of Applied Physics",,,"pp. 30-31",2024,Jan.
"Yuya Yamashita,Kenta Doi,Tetsuji Kiyota,Kenta Ishi,Shuhei Watanabe,Wataru Kikuchi,Atsushi Nezu,Hiroshi Akatsuka","Spatial distribution diagnosis of electron temperature and density of argon inductively coupled plasma by tomographic optical emission spectroscopic measurement and collisional-radiative model",,"Journal of Vacuum Science & Technology A","American Vacuum Society","Vol. 42","No. 2","  023003",2024,Jan.
"Yuya Yamashita,Kenta Doi,Tetsuji Kiyota,Wataru Kikuchi,Kenta Ishi,Shuhei Watanabe,Atsushi Nezu,Hiroshi Akatsuka","Spatial Diagnosis of Electron Temperature and Density of Argon Inductively Coupled Plasma by Improved Spectral Tomography Algorithm","The 41st Symposium on Plasma Processing (SPP-41)","Proceedings of 41st Symposium on Plasma Processing (SPP-41)","Plasma Electronics Division, Japan Society of Applied Physics",,,"pp. 64 - 65",2024,Jan.
"Shuhei Watanabe,Kenta Doi,Tetsuji Kiyota,Yuya Yamashita,Wataru Kikuchi,Kenta Ishi,Atsushi Nezu,Hiroshi Akatsuka","Optical Emission Spectroscopic Measurement of Inductively Coupled Oxygen Plasma","The 41st Symposium on Plasma Processing","Proceedings of 41st Symposium on Plasma Processing (SPP-41)","Plasma Electronics Division, Japan Society of Applied Physics",,,"pp. 82 - 83",2024,Jan.
"Yuchen Ye,Kenta Doi,Tetsuji Kiyota,Shuhei Watanabe,Kazuki Shimatani,Ayaki Sakurai,Yuya Yamashita,Wataru Kikuchi,Atsushi Nezu,Hiroshi Akatsuka","Electron Temperature and Density Diagnosis in Argon Dual-Frequency ICP by Tomographic Optical Emission Spectroscopy and Langmuir Probe Measurements","The 41st annual meeting of The Japan Society of Plasma Science and Nuclear Fusion Research","Extended Abstracts of the 41st Annual Meeting of JSPF","The Japan Society of Plasma Science and Nuclear Fusion Research",,,,2024,