"Hirofumi Niijima,Motohiro Takayasu,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Novel Tri-Axis MEMS Accelerometer with a Single Au Proof Mass and Fully Differential Sensing Electrodes","The 30th International Microprocesses and Nanotechnology Conference",,,,,,2017,Nov.
"Hirofumi Niijima,Motohiro Takayasu,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","静電容量型MEMSセンサにおけるブラウニアン・ノイズ評価手法の検討(2)","第34回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,"  01am2-PLN-8",2017,Oct.