"Takasi Itikawa,Hirofumi Niijima,Sayaka Koga,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","Au単一錘平行平板型3軸MEMS加速度センサの検討","第35回「センサ・マイクロマシンと応用システム」シンポジウム(センサ・マイクロマシン部門大会)",,,,,,2018,Oct. "Hirofumi Niijima,Shouta Otobe,Motohiro Takayasu,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","高感度MEMS加速度センサのBrownian Noise評価に関する検討","第64回応用物理学会春季学術講演会",,,,,,2018,Mar. "Hirofumi Niijima,Shouta Otobe,Motohiro Takayasu,Daisuke Yamane,Hiroyuki Ito,Teruaki Safu,Toshifumi Konishi,Shiro Dosho,Shinichi Iida,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Tri-axis Differential MEMS Accelerometer with a Single Au Proof Mass","平成30年電気学会全国大会",,,,,,2018,Mar.