"YOSHIHIKO HIRAI,YUKI ONISHI","ナノインプリントの最新技術と装置・材料・応用",,,"フロンティア出版",,,,2008,June "H. Takagi,M.Takahashi,R.Maeda,Y.Onishi,Y.Iriye,T.Iwasaki,Y.Hirai","Analysis of time dependent polymer deformation based on a viscoelastic model in thermal imprint process",,"Microelectronic Engineering",,"Vol. 85","No. 5","pp. 902-906",2008,May "H, Takagi,Y. Onishi,M. Takahashi,R. Maeda,Y. Iriye,T. Iwasaki,Y. Hirai","Experimental And Numerical Analysis On Recovery Of Polymer Deformation After Demolding In Hot-Embossing Process","52nd International Conference on Electron, Ion, and Photon BeamTechnology andNanofabrication (EIPBN)",,,,,,2008, "YUKI ONISHI,高木秀樹,高橋正春,前田龍太郎,平井義彦","伝熱構造連成解析による熱ナノインプリントの 高スループット化の検討","第21回計算力学講演会",,,,,,2008, "Y. Hirai,Y. Onishi,T. Tanabe,M. Shibata,T. Iwasaki,Y. Iriye","Pressure and resist thickness dependency of resist time evolutions profiles in nanoimprint lithography",,"Microelectronic Engineering",,"Vol. 85","No. 5","pp. 842?845",2008, "Y.Onishi,Y.Hirai,高木秀樹,M.Takahashi,T.Tanabe,R.Maeda,Y.Iriye","Numerical and Experimental Analysis of Intermittent Line-and-Space Patterns in Thermal Nanoimprint",,"Japanese Journal of Applied Physics",,"Vol. 47","No. 6","pp. 5145-5150",2008, "H. Takagi,M. Takahashi,R. Maeda,Y. Onishi,Y. Iriye,T. Iwasaki,Y. Hirai","Experimental and numerical analyses on recovery of polymer deformation after demolding in the hot embossing process",,"Journal of Vacuum Science and Technology B",,"Vol. 26","No. 6","pp. 2399-2403",2008,