"Ryohei Hori,Kazuya Fujita,Chun-Yi Chen,Tomoyuki Kurioka,Tso-Fu Mark Chang,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Evaluation of Cross-Sectional Geometry Effect of Au Polycrystalline Micro-cantilever on Bending Strength","Taiwan Association for Coating and Thin Film Technology (TACT2023)","Taiwan Association for Coating and Thin Film Technology (TACT2023)",,,,,2023,Nov.
"Kisuke Miyado*,Akira Onishi,Tenneti Devi Srujana,Katsuyuki Machida,Tomoyuki Kurioka,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Development of Proof-mass Position Control Electrodes for Au Proof-mass Single-Axis Differential CMOS-MEMS Accelerometer","第15回集積化MEMSシンポジウム","第15回集積化MEMSシンポジウム論文集","応用物理学会集積化MEMS技術研究会","Vol. 8A2-D-4",,,2023,Oct.
"Masato Sone,Tso-Fu Mark Chang,Tomoyuki Kurioka,Chun-yi Chen,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake","Mechanical Property Design of Multilayered Ti/Au Microcomponents by Electrodeposition Toward High-Sensitive MEMS Accelerometers","244th ECS Meeting","244th ECS Meeting",,,,,2023,Oct.
"Takumi Akiyama,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Impurity Analysis of Electroplated Gold Components with Multi-Layered Structures by Thermal Desorption Spectrometry toward Application in Gold Micro Electro Mechanical System Capacitive Accelerometers ?",,"Micro and Nano Engineering",,"Vol. 21",,"p. 100226",2023,Sept.
"Syota Kanno,Taro Omura,Tomoyuki Kurioka,Chun-Yi Chen,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone,Tso-Fu Mark Chang","Strain Rate Dependency of Mechanical Property in Micro-Compression of Electrodeposited Gold toward Design of MEMS Components","49th international conference on Micro and Nano Engineering (MNE2023)","49th international conference on Micro and Nano Engineering (MNE2023)",,,,,2023,Sept.
"Syunkai Watanabe,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Dependence of Structural Design on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers","MNE2023","49th international conference on Micro and Nano Engineering (MNE2023)",,,,,2023,Sept.
"Kisuke Miyado,Akira Onishi,Devi.Srujana Tenneti,Katsuyuki Machida,Tomoyuki Kurioka,Parthojit CHAKRABORTY,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Supression of process variation of serpentine spring constant for MEMS devices by gold multi-layer metal technology","第84回応用物理学会秋季学術講演会","第84回応用物理学会秋季学術講演会 講演予稿集",,"Vol. 20p-B201-1",,,2023,Sept.
"御宿 希祐Kisuke Miyado,Devi.Srujana Tenneti,Akira Onishi,Katsuyuki Machida,Tomoyuki Kurioka,Parthojit CHAKRABORTY,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Design Technique of Serpentine Spring with Half Edge Span Beam Length for High Sensitivity Gold Proof-mass MEMS Capacitive Accelerometer","2023 International Conference on Solid State Devices and Materials","Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials, Nagoya, 2023, pp325-326 G-2-02",,,,,2023,Sept.
"Ryosuke Miyai,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki  Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Comprehensive Evaluation of Geometric Effects on Long-Term Structure Stability of Ti/Au Multi-Layered Micro-Cantilevers toward Gold-MEMS Capacitive Accelerometer","49th international conference on Micro and Nano Engineering (MNE2023)","49th international conference on Micro and Nano Engineering (MNE2023)",,,,,2023,Sept.
"Kisuke Miyado,Devi.Srujana Tenneti,Katsuyuki Machida,Tomoyuki Kurioka,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Dependence of proof mass displacement on applied voltage for single differential CMOS-MEMS capacitive accelerometer","第14回集積化MEMS技術研究ワークショップ",,,"  p04",,,2023,Aug.
"Kosuke Suzuki,Yiming Jiang,Ryohei Hori,Ken Hashigata,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Correlation of Sample Geometry and Grain Size in Micro-Bending of Electrodeposited Polycrystalline Gold",,"Materials Today Communications",,"Vol. 35",,"p. 106072",2023,Apr.
"Ryohei Hori,Kazuya Fujita,Chun Yi Chen,Tomoyuki Kurioka,Tso-Fu Mark Chang,Parthojit CHAKRABORTY,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","単結晶金微小カンチレバーの曲げ強度に対する断面積の影響","第70回応用物理学会春季学術講演会","第70回応用物理学会春季学術講演会",,,,"p. 16a-B410-4",2023,Mar.
"Syunkai Watanabe,Chun Yi Chen,Tomoyuki Kurioka,Tso-Fu Mark Chang,Akira Onishi,Parthojit CHAKRABORTY,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Ti/Au 多層カンチレバーの実効ヤング率における構造因子の研究","第70回応用物理学会春季学術講演会","第70回応用物理学会春季学術講演会",,,,"p. 16a-B410-4",2023,Mar.
"Syota Kanno,Taro Omura,Tomoyuki Kurioka,Chun Yi Chen,Parthojit CHAKRABORTY,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone,Tso-Fu Mark Chang","金めっき微小ピラー構造体の微小圧縮試験におけるひずみ速度依存性とサンプルサイズ効果の解明","第70回応用物理学会春季学術講演会","第70回応用物理学会春季学術講演会",,,,"p. 16a-B410-2",2023,Mar.
"Ryosuke Miyai,Tomoyuki Kurioka,Chun Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit CHAKRABORTY,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Ti/Au 積層構造有するマイクロカンチレバーの長期構造安定性に対する幾何学構造の影響","第70回応用物理学会春季学術講演会","第70回応用物理学会春季学術講演会",,,,"p. 16a-B410-5",2023,Mar.
"Kisuke Miyado,Akira Onishi,Devi.Srujana Tenneti,Katsuyuki Machida,Parthojit CHAKRABORTY,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Design of serpentine spring for MEMS devices by gold multi-layer metal technology","第70回応用物理学会春季学術講演会","第70回応用物理学会春季学術講演会",,"  16a-B410-6",,,2023,Mar.
"Akira Onishi,Kisuke Miyado,Devi Srujana Tenneti,Katsuyuki Machida,Parthojit Chakraborty,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Gold Single-Axis Differential Capacitive MEMS Accelerometer With Proof-Mass Position Control Electrode Fabricated by Post-CMOS Technology","2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)",,,,,2023,Mar.