"Yu-An Chien,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Micro-Mechanical Properties of Electrodeposited Au-TiO2 Composite Film","MRS Fall Meeting 2019",,,,,,2019,Dec. "Kyotaro Nitta,Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Shinichi Iida,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Electrodepostion of Au-Cu Alloy Micro-Cantilevers and the Young’s modulus by Resonance Frequency Method","MRS Fall Meeting 2019",,,,,,2019,Dec. "Sayaka Koga,Takasi Itikawa,Naoto Tanaka,Taiki Ogata,Hiroki Ora,Daisuke Yamane,Noboru Ishihara,Hiroyuki Ito,Masato Sone,Katsuyuki Machida,Yoshihiro Miyake,Kazuya Masu","微弱筋音計測に向けた高分解能MEMS慣性センサモジュールの検討","第11回集積化MEMSシンポジウム",,,,," 19pm4-A-3",2019,Nov. "Takasi Itikawa,Shouta Otobe,Ken Atsumi,Sayaka Koga,Daisuke Yamane,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Masato Sone,Katsuyuki Machida,Kazuya Masu","3Dピラー型Au錘MEMS加速度センサ","第36回「センサ・マイクロマシンと応用システム」シンポジウム",,,,," 19am3-PS3-21",2019,Nov. "Hiroyuki Ito,Sayaka Koga,Takasi Itikawa,Daisuke Yamane,Noboru Ishihara,Yoshihiro Miyake,Katsuyuki Machida,Kazuya Masu","兆し計測のための高感度MEMS加速度センサ技術","計測自動制御学会 システム・情報部門 学術講演会 2019",,,,,,2019,Nov. "Tomoki Iriya,Kyotaro Nitta,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Electroplating of Au-Pd Alloy Films and the Mechanical Properties","International Thin Films Conference (TACT 2019)",,,,,,2019,Nov. "Takasi Itikawa,Sayaka Koga,Daisuke Yamane,Shinichi Iida,Noboru Ishihara,Hiroyuki Ito,Tso-Fu Mark Chang,Masato Sone,Katsuyuki Machida,Kazuya Masu","積層メタル技術で作製したMEMS加速度センサの衝撃特性評価","第11回集積化MEMSシンポジウム",,,,," 19pm4-A-4",2019,Nov. "Tatsuya Koga,Takashi Ichikawa,Naoto Tanaka,Taiki Ogata,Hiroki Ora,Daisuke Yamane,Noboru Ishihara,Hiroyuki Ito,Masato Sone,Katsuyuki Machida,Yoshihiro Miyake,Kazuya Masu","High-Sensitivity Inertial Sensor Module to Measure Hidden Micro Muscular Sounds","IEEE Biomedical Circuits and Systems Conference 2019 (BioCAS2019)","IEEE Conference Paper","IEEE",,,,2019,Oct. "Kosuke Suzuki,Ken Hashigata,Keisuke Asano,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Sample Geometry Effect on Mechanical Property of Electrodeposited Gold Evaluated by Micro-Bending Test","45th International Conference on Micro & Nano Engineering (MNE2019)","45th International Conference on Micro & Nano Engineering (MNE2019)",,,,,2019,Sept. "Yu-An Chien,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Electrodeposition of TiO2 Nanoparticle Reinforced High Strength Au Film for MEMS Applications","45th International Conference on Micro & Nano Engineering (MNE2019)","45th International Conference on Micro & Nano Engineering (MNE2019)",,,,,2019,Sept. "Kyotaro Nitta,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Shinichi Iida,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Fabrication and Evaluation of Au-Cu Alloy 3D Structures toward MEMS Movable Components","45th International Conference on Micro & Nano Engineering (MNE2019)","45th International Conference on Micro & Nano Engineering (MNE2019)",,,,,2019,Sept. "Takasi Itikawa,Shouta Otobe,Ken Atsumi,Sayaka Koga,Daisuke Yamane,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Katsuyuki Machida,Masato Sone,Kazuya Masu","Au錘3軸MEMS加速度センサのためのSCD電極の検討 (2)","第80回応用物理学会秋季学術講演会",,,,,,2019,Sept. "Tso-Fu Mark Chang,Yu-An Chien,Hao-Chun Tang,Chun-Yi Chen,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Strengthening of Gold-Based Micro-Structures by Alloying and Incorporation of Oxide Nanoparticles","第80回応用物理学会秋季学術講演会",,,,,,2019,Sept. "Hao-Chun Tang,Tso-Fu Mark Chang,Yaw-Wang Chai,Chun-Yi Chen,Takashi Nagoshi,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Nanoscale Hierarchical Structure of Twins in Nanograins Embedded with Twins and the Strengthening Effect",,"Metals","MDPI","Vol. 9","No. 9","pp. 987",2019,Sept. "Kyotaro Nitta,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Shinichi Iida,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Au-Cu alloy/Ti Layered micro-cantilevers toward MEMS Movable Components","The 1st Tokyo Tech-NCTU Joint Symposium on Advanced Materials","The 1st Tokyo Tech-NCTU Joint Symposium on Advanced Materials",,,,"p. 46",2019,Sept. "Hitomi Watanabe,Chun-Yi Chen,Tso-Fu Mark Chang,Shinichi Iida,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Temperature Dependence Structure Stability of Ti/Au Layered Micro-Cantilevers","The 1st Tokyo Tech-NCTU Joint Symposium on Advanced Materials","The 1st Tokyo Tech-NCTU Joint Symposium on Advanced Materials",,,,"p. 45",2019,Sept. "Hitomi Watanabe,Chun-Yi Chen,Tso-Fu Mark Chang,Shinichi Iida,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Effects of Fixed End Structure on Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever toward MEMS Applications","45th International Conference on Micro & Nano Engineering (MNE2019)","45th International Conference on Micro & Nano Engineering (MNE2019)",,,,,2019,Sept. "Keisuke Asano,Tso-Fu Mark Chang,Hao-Chun Tang,Takashi Nagoshi,Chun-Yi Chen,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","High Strength Electrodeposited Au-Cu Alloys Evaluated by Bending Test toward Movable Micro-Components",,"ECS Journal of Solid State Science and Technology",,"Vol. 8","No. 8","pp. P412-P415",2019,July "Katsuyuki Machida,Daisuke Yamane,Toshifumi Konishi,Shin-ichi Iida,Noboru Ishihara,Tso-Fu Mark Chang,Masato Sone,Hiroyuki Ito,Kazuya Masu","MEMS Accelerometer Fabricated by Gold Multi-Layer Metal Technology",,"ECS Transactions",,"Vol. 92",,"pp. 169-184",2019,July "Masato Sone,Hao-Chun Tang,Tso-Fu Mark Chang,Chun Yi Chen,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu","超高感度加速度センサ実現のための高強度金合金材料の創製とその機械的特性評価","2019年 関西表面技術シンポジウム","電気鍍金研究会",,,,,2019,July "Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroshi Toshiyoshi,Masato Sone,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu","A MEMS Accelerometer for Sub-mG Sensing",,"Sensors and Materials",,"Vol. 31","no. 9","pp. 2883-2894",2019,July "Takasi Itikawa,Hirofumi Niijima,Sayaka Koga,Daisuke Yamane,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Masato Sone,Katsuyuki Machida,Kazuya Masu","3軸Au錘MEMS加速度センサにおける検出電極構造の検討","令和元年電気学会センサ・マイクロマシン部門総合研究会",,,,,"pp. 67-72",2019,July "Kosuke Suzuki,Ken Hashigata,Keisuke Asano,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Mechanical properties of gold micro-cantilevers with different thickness evaluated by micro-bending test","The 2nd International Conference on Material Strength and Applied Mechanics",,,,,,2019,May "Kyotaro Nitta,Tso-Fu Mark Chang,Koichiro Tachibana,Hao-chun Tang,Chun-Yi Chen,Shinichi Iida,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Cu-Alloying Effect on Structure Stability of Electrodeposited Gold-Based Micro-Cantilever Evaluated by Long-Term Vibration Test",,"Microelectronic Engineering",,"Vol. 215",,"pp. 111001",2019,May "Ken Atsumi,Shota Otobe,Tatsuya Koga,Takashi Ichikawa,Daisuke Yamane,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Masato Sone,Katsuyuki Machida,Kazuya Masu","Pillar-Shaped Electrodes for 3-axis Gold-Proof-Mass MEMS Capacitive Accelerometers","Design, Test, Integration & Packaging of MEMS/MOEMS(DTIP2019)","IEEE Conference Paper","IEEE",,,,2019,May "Hitomi Watanabe,Takuma Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","High Structure Stability Ti/Au Multiple Layer Micro-Cantilever and the Temperature Dependence","The 2nd International Conference on Material Strength and Applied Mechanics",,,,,,2019,May "Masato Sone,Hao-Chun Tang,Masaharu Yoshiba,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu","Mechanical properties of electrodeposited gold-copper alloy by micro-compression test","The 2nd International Conference on Material Strength and Applied Mechanics","The 2nd International Conference on Material Strength and Applied Mechanics",,,,,2019,May "Ken Hashigata,Hao-Chun Tang,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Strengthening of Micro-Cantilever by Au/Ti Bi-Layered Structure Evaluated by Micro-Bending Test toward MEMS Devices",,"Microelectronic Engineering",,"Vol. 213",,"pp. 13-17",2019,May "Ludovico Minati,Mattia Frasca,Natsue Yoshimura,Leonardo Ricci,Pawe? O?wiecimka,Yasuharu Koike,Kazuya Masu,Hiroyuki Ito","Current-starved cross-coupled CMOS inverter rings as versatile generators of chaotic and neural-like dynamics over multiple frequency decades",,"IEEE Access","IEEE","Vol. 7",,"pp. 54638 - 54657",2019,Apr. "Takasi Itikawa,Hirofumi Niijima,Sayaka Koga,Daisuke Yamane,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Masato Sone,Katsuyuki Machida,Kazuya Masu","3軸Au錘MEMS加速度センサにおける平行平板型電極の検討","第66回応用物理学会春季学術講演会",,,,,,2019,Mar. "Masato Sone,Kazuya Masu","Novel Metal Electrodeposition and the Recent Application",,"Novel Metel Electrodeposition and the Recent Application","INTECH",,,,2019,Mar. "Kyotaro Nitta,Tang Haochun,Chun Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","電気めっき法によるAu-Cu合金微小カンチレバーの作製","第66回応用物理学会春季学術講演会",,,,,,2019,Mar. "Kosuke Suzuki,Ken Hashigata,Keisuke Asano,Chun Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","微小曲げ試験による金材料の機械的強度のサンプル形状効果","第66回応用物理学会春季学術講演会",,,,,,2019,Mar. "Shouta Otobe,Ken Atsumi,Sayaka Koga,Daisuke Yamane,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Masato Sone,Katsuyuki Machida,Kazuya Masu","Au錘3軸MEMS加速度センサのためのSCD電極の検討","第66回応用物理学会春季学術講演会",,,,,,2019,Mar. "Hitomi Watanabe,Takuma Suzuki,Chun Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Ti/Au微小カンチレバーの温度依存性への積層構造の影響","第66回応用物理学会春季学術講演会",,,,,,2019,Mar. "Ken Atsumi,Shouta Otobe,Sayaka Koga,Takasi Itikawa,Daisuke Yamane,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Masato Sone,Katsuyuki Machida,Kazuya Masu","積層メタル技術によるピラー型容量検出電極の検討","第66回応用物理学会春季学術講演会",,,,,,2019,Mar. "Tso-Fu Mark Chang,Chun-Yi Chen,Yota Ishizuka,Minami Teranishi,Takuma Suzuki,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Design of Au-Based Micro-Components with High Structure Stability for Applications in MEMS Inertial Sensors",,"Advances in Microelectronics Reviews","IFSA Publishing","Vol. 2",,"pp. 23-48",2019,Feb. "Koichiro Tachibana,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Long-Term Structure Stability of Ti/Au Layered Micro-Cantilever Evaluated by Vibration Test",,"Microelectronic Engineering",,"Volume 207",,"pp. 33-36",2019,Jan. "Daisuke Yamane,Shota Otobe,Ken Atsumi,Tatsuya Koga,Toshifumi Konishi,Teruaki Safu,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A 3-D PARALLEL-PLATE MEMS ACCELEROMETER WITH A GOLD PROOF MASS","32nd Int. Conf. on Micro Electro Mechanical Systems (MEMS 2019)",,,,,"pp. 684-687",2019,Jan. "Shuhei Amakawa,Atsushi Takeshige,Shinsuke Hara,Ruibing Dong,Sangyeop Lee,Takeshi Yoshida,Minoru Fujishima,Kazuya Masu,Hiroyuki Ito","Causal characteristic impedance determination using calibration comparison and propagation constant","IEEE ARFTG Microwave Measurement Conference",,,,,,2019,Jan.