"Yu-An Chien,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Electro-co-deposition of Au-TiO2 Composites with Improved Mechanical Property toward Miniaturized Electronics","The 2021 International Chemical Congress of Pacific Basin Societies (Pacifichem 2021)",,,,,,2021,Dec.
"Akihiro Uchiyama,Kohei Shibata,Akira Onishi,Takasi Ichikawa,Shinichi Iida,Sangyeop Lee,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu,Hiroyuki Ito","ワイドレンジAu錘1軸MEMS加速度センサの検討","第13回集積化MEMSシンポジウム",,,,,,2021,Nov.
"Akira Onishi,Akihiro Uchiyama,Kohei Shibata,Takasi Ichikawa,Sangyeop Lee,Shinichi Iida,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu,Hiroyuki Ito","3次元容量検出電極による単一Au錘3軸MEMS加速度センサの検討","第13回集積化MEMSシンポジウム",,,,,,2021,Nov.
"Takumi Akiyama,Chun-Yi Chen,Tso-Fu Mark Chang,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Alloy Electrodeposition of Gold-Nickel Alloys and the Mechanical Property in Micro-Scale","TACT2021 International Thin Films Conference","TACT2021 International Thin Films Conference",,,,,2021,Nov.
"Kazuya Fujita,Kosuke Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Micro-Mechanical Property of Single Crystal Gold for Applications in Microelectronics","TACT2021 International Thin Films Conference","TACT2021 International Thin Films Conference",,,,,2021,Nov.
"Taro Omura,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Effect of Current Density on Micro-Mechanical Characteristic of Electrodeposited Gold Evaluated from Cyanide Bath","TACT2021 International Thin Films Conference","TACT2021 International Thin Films Conference",,,,,2021,Nov.
"Kohei Shibata,Akihiro Uchiyama,Akira Onishi,Sangyeop Lee,Katsuyuki Machida,Noboru Ishihara,Kazuya Masu,Hiroyuki Ito","Au錘1軸差動型CMOS-MEMS加速度センサの統合設計シミュレーションの検討","第13回集積化MEMSシンポジウム",,,,,,2021,Nov.
"Hiroyuki Ito,Katsuyuki Machida,Noboru Ishihara,Yoshihiro Miyake,Kazuya Masu","A Highly Sensitive MEMS Accelerometer Module for Measuring Micro Muscular Sounds",,"ECS Transactions",,"Vol. 104","No. 4","pp. 83-91",2021,Oct.
"藤田 一矢,鈴木 康介,Chun-Yi Chen,Tso-Fu Mark Chang,山根 大輔,伊藤 浩之,町田 克之,益 一哉,曽根 正人","金単結晶微小カンチレバーの機械的特性とサンプル形状効果","第82回応用物理学会秋季学術講演会","第82回応用物理学会秋季学術講演会",,,,,2021,Sept.
"Takumi Akiyama,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Micro-Mechanical Property Evaluation of Gold-Nickel Alloys toward Design of MEMS Components","Micro and Nano Engineering Conference 2021 (MNE2021)",,,,,,2021,Sept.
"Taro Omura,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Effect of Current Density on Mechanical Properties of Electrodeposited Gold Evaluated by Micro-Compression Test","Micro and Nano Engineering Conference 2021 (MNE2021)",,,,,,2021,Sept.
"Kazuya Fujita,Kosuke Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Mechanical Property of Gold Micro-Cantilevers for Application in Microelectronics and the Sample Geometry Effect","Micro and Nano Engineering Conference 2021 (MNE2021)",,,,,,2021,Sept.
"Akira Onishi,Akihiro Uchiyama,Kohei Shibata,Takasi Itikawa,Sangyeop Lee,Shinichi Iida,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu,Hiroyuki Ito","3D容量検出電極による単一Au錘3軸MEMS加速度センサの検討","第82回 応用物理学会秋季学術講演会",,,,,,2021,Sept.
"Takasi Itikawa,Sayaka Koga,Shinichi Iida,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu,Hiroyuki Ito","単一 Au 錘 3 軸加速度センサのための分割容量検出 2 重電極に関する検討","令和2年度E部門総合研究会",,,,,,2021,July
"Kohei Shibata,Akihiro Uchiyama,Akira Onishi,Sangyeop Lee,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu,Hiroyuki Ito","1軸差動型CMOS-MEMS加速度センサの統合設計シミュレーションの検討","令和3年度E部門総合研究会",,,,,,2021,July
"Akihiro Uchiyama,Takasi Ichikawa,Kohei Shibata,Shinichi Iida,Sangyeop Lee,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu,Hiroyuki Ito","A MEMS accelerometer with a single axis two proof masses for a wide detection range","Transducers",,,,,,2021,June
"Hitomi Watanabe,Tso-Fu Mark Chang,Michael  Schneider,Ulrich  Schmid,Chun-Yi Chen,Shinichi Iida,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electro-deposition and the Temperature Dependency",,"Electrochem","MDPI","Vol. 2",,"pp. 216-223",2021,Apr.
"Tso-Fu Mark Chang,Hideaki Nakajima,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Hiroshi Toshiyoshi,Masato Sone","Effective Young’s Modulus of Elelectrodeposited Gold for Design of MEMS Accelerometers",,"Advances in Microelectronics: Reviews","IFSA PUBLISHING, S.L.","Vol. 3",,,2021,Apr.
"Akihiro Uchiyama,Takasi Ichikawa,Kohei Shibata,Shinichi Iida,Sangyeop Lee,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu,Hiroyuki Ito","ワイドレンジ検出可能なAu錘1軸MEMS加速度センサ の検討","応用物理学会春季学術講演会",,,,,,2021,Mar.
"Takasi Ichikawa,Akihiro Uchiyama,Kohei Shibata,Shinichi Iida,Sangyeop Lee,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu,Hiroyuki Ito","A 3-D capacitive-detection electrode for a single gold proof-mass three-axis MEMS accelerometer","Inertial",,,,,,2021,Mar.
"Masato Sone,Tso-Fu Mark Chang,Takashi Nagoshi,Katsuyuki Machida,Daisuke Yamane,Hiroyuki Ito,Kazuya Masu","医用MEMSデバイス応用に向けた 微小貴金属めっき材料の機械的特性評価","日本金属学会 2021年春季講演大会","日本金属学会 2021年春季講演大会",,,,,2021,Mar.