"Toshiyuki Yamamoto,Toshinori Fujita,Kenji Kawashima,Toshiharu Kagawa,Kazutoshi Sakaki","低流体ノイズ弁による空気圧微動ステージの超精密位置決め制御",,"平成22年秋季フルードパワーシステム講演会講演論文集",,,,"pp. 25?27",2010,Dec. "Jun Li,Joonmyeong Choi,Kenji Kawashima,Toshinori Fujita,Toshiharu Kagawa","Integrated control design of pneumatic servo table considering the dynamics of pipelines",,"計測自動制御学会産業応用部門大会講演論文集",,,,"pp. 41-46",2010,Nov. "Kotaro Tadano,Takeshi Arai,Kenji Kawashima,Toshinori Fujita,Toshiharu Kagawa","Precise Position Control of Coarse/Fine Dual Stage using Pneumatic Actuators",,"World Automation Congress 2010",,,,,2010,Sept. "Kenji Kawashima,Takeshi Arai,Kotaro Tadano,Toshinori Fujita,Toshiharu Kagawa","Development of Coarse/Fine Dual Stages using Pneumatically Driven Bellows Actuator and Cylinder wiht Air Bearings",,"Precision Engineering",,"Vol. 34",,"pp. 526-533",2010,July "Kenji Kawashima,Toshinori Fujita","Precise Position Stages Using Pneumatically Driven Bellows Actuator and Cylinder Equipped with Air Bearings",,"Next-Generation Actuators Leading Breakthroughs","Springer",,,"pp. 67-77",2010,Jan.