"H. Akatsuka,Y. Ichikawa,T. Sakamoto,T. Shibata,A. Nezu","Population Kinetics and Number Densities of Excited Species in Low-Pressure Discharge Nitrogen Plasma","The 6th EU-Japan Joint Symposium on Plasma Processing","Book of Abstracts, The 6th EU-Japan Joint Symposium on Plasma Processing","Center for Atomic and Molecular Technologies, Osaka University",,,"pp. 13-14",2008,Apr.