"Takasi Itikawa,Ken Atsumi,Sayaka Koga,Shinichi Iida,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu,Hiroyuki Ito","100 nG/√Hzレベルを目指したピラー型電極を有する単一Au錘3軸MEMS加速度センサの検討","第81回 応用物理学会秋季学術講演会",,,,,,2020,Sept.
"Takashi Ichikawa,Ken Atsumi,Tatsuya Koga,Daisuke Yamane,Shin-ichi Iida,Hiroyuki Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A 100-nG/√Hz-Level Single Au Proof-Mass 3-Axis MEMS Accelerometer with Pillar-Shaped electrodes","Design, Test, Integration & Packaging of MEMS/MOEMS",,,,,,2020,June
"Ken Atsumi,Sayaka Koga,Takasi Itikawa,Daisuke Yamane,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","ピラー型電極を用いた単一錘3軸MEMS加速度センサの検討","第67回応用物理学会春季学術講演会",,,,,,2020,Mar.
"Takasi Itikawa,Ken Atsumi,Sayaka Koga,Daisuke Yamane,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","ピラー型電極による単一Au錘3軸MEMS加速度センサの感度均一化の検討","第67回応用物理学会春季学術講演会",,,,,,2020,Mar.