"Atsuo Katagiri,Mutsuo Uehara,Mao Kurokawa,Kensuke Akiyama,Takao Shimizu,Masaaki Matsushima,Hiroshi Uchida,Yoshisato Kimura,Hiroshi Funakubo","Composition Dependence of Crystal Structures and Electrical Properties of Ca-Mg-Si Films Prepared by Sputtering",,"Journal of ELECTRONIC MATERIALS",,"vol. 49","no. 12","pp. 7509-7517",2020,Oct.
"Atsuo Katagiri,Mutsuo Uehara,Mao Kurokawa,Kensuke Akiyama,masaaki matsushima,Hiroshi Uchida,YOSHISATO KIMURA,HIROSHI FUNAKUBO","Ca- Mg-SiŽOŒ³Œn”M“d�Þ—¿‚É‚¨‚¯‚éSiŠÜ—L—ʕω»‚É”º‚¤“±“dŒ^‚Ì�§Œä","‘æ81‰ñ‰ž—p•¨—�Šw‰ï�H‹GŠw�p�u‰‰‰ï",,,,,,2020,Sept.