"Syota Kanno,Taro Omura,Tomoyuki Kurioka,Chun-Yi Chen,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone,Tso-Fu Mark Chang","Effect of Strain Rate in Compression Electrodeposited Gold Micro-Pillar toward Design of MEMS Component",,"Micro and Nano Engineering",,,,"p. 100254",2024,Apr.
"Syunkai Watanabe,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Dependence of Structural Design on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers ?",,"Micro and Nano Engineering",,"Vol. 29",,"p. 100249",2024,Mar.
"Ryosuke Miyai,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Clarification of Geometric Effects on Long-Term Structural Stability of Ti/Au Multi- Layered Micro-Cantilevers",,"Micro and Nano Engineering",,,,"p. 100244",2024,Mar.
"Syota Kanno,Taro Omura,Tomoyuki Kurioka,Chun Yi Chen,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Tso-Fu Mark Chang,Masato Sone","Investigation of strain rate dependence by micro-compression testing of electrodeposited gold for MEMS accelerometer applications","The 71st JSAP Spring Meeting 2024","Proc. The 71st JSAP Spring MeetinProc.",,,,"p. 23a-12K-3",2024,Mar.
"Tatsuhiko Mori,Tomoyuki Kurioka,Chun Yi Chen,Tso-Fu Mark Chang,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Evaluation of the Effects of Heat Treatment Temperature on Warpage Deformation of the Ti/Au Multi-layered Electrodeposited-Au Proof Mass","The 71st JSAP Spring Meeting 2024","Proc. The 71st JSAP Spring MeetinProc.",,,,"p. 23a-12K-2",2024,Mar.
"Ryosuke Miyai,Tomoyuki Kurioka,Chun Yi Chen,Tso-Fu Mark Chang,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Evaluation of Relationship between Heat Treatment Temperature and Structural Stability of Micro-cantilevers Possessing Ti/Au Multi-layered Structures","The 71st JSAP Spring Meeting 2024","Proc. The 71st JSAP Spring MeetinProc.",,,,"p. 23a-12K-1",2024,Mar.
"Taro Omura,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki ;  Ito,Yoshihiro Miyake,Masato Sone","Warpage Study of the Electrodeposited-Au Micro-Components Having the Ti/Au Multi-layered Structures toward MEMS Applications",,"Journal of The Electrochemical Society",,"Vol. 171",,"p. 032501",2024,Feb.
"Kisuke Miyado,Devi Srujana  Tenneti,Akira Onishi,Katsuyuki Machida,Tomoyuki Kurioka,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Serpentine Spring Design Technique for High Sensitivity MEMS Capacitive Accelerometer Fabricated by Gold Multi-layer Metal Technology",,"Japanese Journal of Applied Physics",,"Vol. 63","No. 4","p. 04SP23",2024,Feb.
"Ryohei Hori,Kazuya Fujita,Chun-Yi Chen,Tomoyuki Kurioka,Tso-Fu Mark Chang,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Evaluation of Cross-Sectional Geometry Effect of Au Polycrystalline Micro-cantilever on Bending Strength","Taiwan Association for Coating and Thin Film Technology (TACT2023)","Taiwan Association for Coating and Thin Film Technology (TACT2023)",,,,,2023,Nov.
"Kisuke Miyado*,Akira Onishi,Tenneti Devi Srujana,Katsuyuki Machida,Tomoyuki Kurioka,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Development of Proof-mass Position Control Electrodes for Au Proof-mass Single-Axis Differential CMOS-MEMS Accelerometer","第15回集積化MEMSシンポジウム","第15回集積化MEMSシンポジウム論文集","応用物理学会集積化MEMS技術研究会","Vol. 8A2-D-4",,,2023,Oct.
"Masato Sone,Tso-Fu Mark Chang,Tomoyuki Kurioka,Chun-yi Chen,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake","Mechanical Property Design of Multilayered Ti/Au Microcomponents by Electrodeposition Toward High-Sensitive MEMS Accelerometers","244th ECS Meeting","244th ECS Meeting",,,,,2023,Oct.
"Syota Kanno,Taro Omura,Tomoyuki Kurioka,Chun-Yi Chen,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone,Tso-Fu Mark Chang","Strain Rate Dependency of Mechanical Property in Micro-Compression of Electrodeposited Gold toward Design of MEMS Components","49th international conference on Micro and Nano Engineering (MNE2023)","49th international conference on Micro and Nano Engineering (MNE2023)",,,,,2023,Sept.
"Ryosuke Miyai,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki  Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Comprehensive Evaluation of Geometric Effects on Long-Term Structure Stability of Ti/Au Multi-Layered Micro-Cantilevers toward Gold-MEMS Capacitive Accelerometer","49th international conference on Micro and Nano Engineering (MNE2023)","49th international conference on Micro and Nano Engineering (MNE2023)",,,,,2023,Sept.
"Kisuke Miyado,Akira Onishi,Devi.Srujana Tenneti,Katsuyuki Machida,Tomoyuki Kurioka,Parthojit CHAKRABORTY,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Supression of process variation of serpentine spring constant for MEMS devices by gold multi-layer metal technology","第84回応用物理学会秋季学術講演会","第84回応用物理学会秋季学術講演会 講演予稿集",,"Vol. 20p-B201-1",,,2023,Sept.
"御宿 希祐Kisuke Miyado,Devi.Srujana Tenneti,Akira Onishi,Katsuyuki Machida,Tomoyuki Kurioka,Parthojit CHAKRABORTY,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Design Technique of Serpentine Spring with Half Edge Span Beam Length for High Sensitivity Gold Proof-mass MEMS Capacitive Accelerometer","2023 International Conference on Solid State Devices and Materials","Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials, Nagoya, 2023, pp325-326 G-2-02",,,,,2023,Sept.
"Takumi Akiyama,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Impurity Analysis of Electroplated Gold Components with Multi-Layered Structures by Thermal Desorption Spectrometry toward Application in Gold Micro Electro Mechanical System Capacitive Accelerometers ?",,"Micro and Nano Engineering",,"Vol. 21",,"p. 100226",2023,Sept.
"Syunkai Watanabe,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Dependence of Structural Design on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers","MNE2023","49th international conference on Micro and Nano Engineering (MNE2023)",,,,,2023,Sept.
"Kisuke Miyado,Devi.Srujana Tenneti,Katsuyuki Machida,Tomoyuki Kurioka,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Dependence of proof mass displacement on applied voltage for single differential CMOS-MEMS capacitive accelerometer","第14回集積化MEMS技術研究ワークショップ",,,"  p04",,,2023,Aug.
"Kosuke Suzuki,Yiming Jiang,Ryohei Hori,Ken Hashigata,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Correlation of Sample Geometry and Grain Size in Micro-Bending of Electrodeposited Polycrystalline Gold",,"Materials Today Communications",,"Vol. 35",,"p. 106072",2023,Apr.
"Ryohei Hori,Kazuya Fujita,Chun Yi Chen,Tomoyuki Kurioka,Tso-Fu Mark Chang,Parthojit CHAKRABORTY,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","単結晶金微小カンチレバーの曲げ強度に対する断面積の影響","第70回応用物理学会春季学術講演会","第70回応用物理学会春季学術講演会",,,,"p. 16a-B410-4",2023,Mar.
"Syota Kanno,Taro Omura,Tomoyuki Kurioka,Chun Yi Chen,Parthojit CHAKRABORTY,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone,Tso-Fu Mark Chang","金めっき微小ピラー構造体の微小圧縮試験におけるひずみ速度依存性とサンプルサイズ効果の解明","第70回応用物理学会春季学術講演会","第70回応用物理学会春季学術講演会",,,,"p. 16a-B410-2",2023,Mar.
"Ryosuke Miyai,Tomoyuki Kurioka,Chun Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit CHAKRABORTY,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Ti/Au 積層構造有するマイクロカンチレバーの長期構造安定性に対する幾何学構造の影響","第70回応用物理学会春季学術講演会","第70回応用物理学会春季学術講演会",,,,"p. 16a-B410-5",2023,Mar.
"Kisuke Miyado,Akira Onishi,Devi.Srujana Tenneti,Katsuyuki Machida,Parthojit CHAKRABORTY,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Design of serpentine spring for MEMS devices by gold multi-layer metal technology","第70回応用物理学会春季学術講演会","第70回応用物理学会春季学術講演会",,"  16a-B410-6",,,2023,Mar.
"Akira Onishi,Kisuke Miyado,Devi Srujana Tenneti,Katsuyuki Machida,Parthojit Chakraborty,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Gold Single-Axis Differential Capacitive MEMS Accelerometer With Proof-Mass Position Control Electrode Fabricated by Post-CMOS Technology","2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)",,,,,2023,Mar.
"Syunkai Watanabe,Chun Yi Chen,Tomoyuki Kurioka,Tso-Fu Mark Chang,Akira Onishi,Parthojit CHAKRABORTY,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Ti/Au 多層カンチレバーの実効ヤング率における構造因子の研究","第70回応用物理学会春季学術講演会","第70回応用物理学会春季学術講演会",,,,"p. 16a-B410-4",2023,Mar.
"Taro Omura,Chun-Yi Chen,Tomoyuki Kurioka,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Warpage Characteristics of Gold Proof Mass  in MEMS Capacitive Accelerometer","48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES)",,,,,,2022,Sept.
"Ryohei Hori,Kazuya Fujita,Chun Yi Chen,Tomoyuki Kurioka,Tso-Fu Mark Chang,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Effects of Cross-Sectional Geometry in Bending Test of Gold Micro-Cantilever toward Design of Movable MEMS Components","48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES)",,,,,,2022,Sept.
"Kisuke Miyado,Akira Onishi,Devi.Srujana Tenneti,Parthojit CHAKRABORTY,Katsuyuki Machida,Shinichi Iida,Toshifumi Konishi,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Study of simplified analytical damping constant model of Au MEMS capacitive accelerometer with perforated proof-mass structure","第83回応用物理学会秋季学術講演会","第83回応用物理学会秋季学術講演会",,"  22a-A406-2",,,2022,Sept.
"Masato Sone,Hitomi Watanabe,Kyotaro Nitta,Hideaki Nakajima,Tomoyuki Kurioka,Chun-Yi Chen,Parthojit Chakraborty,Daisuke Yamane,Hiroyuki Ito,Katsuyuki. Machida,Yoshihiro Miyake,Tso-Fu Mark Chang","A Non-Distructive Resoneance Frequency Method to determine Effective young's Modulus of 3-Dimentional Multilayered Ti/Au Micro-cantilevers Toward Highly Sensitive MEMS Accerelometer","NEW METHODS OF DAMAGE AND FAILURE ANALYSES OF STRUCTURAL PARTS",,,,,,2022,Sept.
"Tomoyuki Kurioka,Koichiro Tachibana,Kyotaro Nitta,Chun-Yi Chen,Tso-Fu Mark Chang,Parthojit Chakraborty,Daisuke Yamane,Hiroyuki Ito,Katsuyuki. Machida,Yoshihiro Miyake,Masato Sone","Evaluation of Streucture Stability of  Au-Based Micro Cantilevers Evidenced by Long-Term Vibration Tests","NEW METHODS OF DAMAGE AND FAILURE ANALYSES OF STRUCTURAL PARTS",,,,,,2022,Sept.
"Takumi Akiyama,Chun-Yi Chen,Tomoyuki Kurioka,Tso-Fu Mark Chang,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Impurities Analysis of the Gold Components in MEMS Accelerometer by TDS","48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES)",,,,,,2022,Sept.
"Kisuke Miyado,Akira Onishi,Devi.Srujana Tenneti,Parthojit CHAKRABORTY,Katsuyuki Machida,Shinichi Iida,Toshifumi Konishi,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Study of simplified analytical damping constant model of Au perforated proof-mass MEMS capacitive accelerometer","第13回集積化MEMS技術研究ワークショップ",,,,,,2022,Aug.
"Kohei Shibata,Akihiro Uchiyama,Akira Onishi,Katsuyuki Machida,Parthojit Chakraborty,Shin-ichi Iida,Toshifumi Konishi,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Simplified Analytical Damping Constant Model for Design of MEMS Capacitive Accelerometer with Gold Perforated Proof-mass Structure",,"IEEE Sensors Journal",,"Vol. 22","Issue 15",,2022,June
"Ryohei Hori,Kazuya Fujita,Chun Yi Chen,Tso-Fu Mark Chang,Hiroyuki Ito,Katsuyuki Machida,Yoshihiro Miyake,Masato Sone","Au単結晶の微?カンチレバーの機械的特性における断?形状依存性","2022年応?物理学会春季講演会",,,,,,2022,Mar.
"Akira Onishi,Kohei Shibata,Akihiro Uchiyama,Katsuyuki  Machida,Taiki  Ogata,Noboru  Ishihara,Hirotaka Uchitomi,Tso-Fu Mark  Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki  Ito","Suppressed Drift and Low-Noise Sensor Module  with a Single-Axis Gold Proof-Mass MEMS Accelerometer for Micro Muscle Sound Measurement",,"Japanese Journal of Applied Physics",,"Vol. 61",,"p. SD1028",2022,Mar.
"Taro Omura,Chun Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Yoshihiro Miyake,Masato Sone","?めっき材料における機械的特性の電流密度依存性","2022年応?物理学会春季講演会",,,,,,2022,Mar.
"Takumi Akiyama,Yu-An Chien,Chun Yi Chen,Tso-Fu Mark Chang,Hiroyuki Ito,Katsuyuki Machida,Yoshihiro Miyake,Masato Sone","MEMSデバイスへの応?に向けた?ニッケル合?の微?機械的特性 の評価","2022年応?物理学会春季講演会",,,,,,2022,Mar.
"Taro Omura,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Effect of Current Density on Micro-Mechanical Property of Electrodeposited Gold Film Evaluated by Micro-Compression",,"Surface & Coatings Technology","Elsevier","Vol. 436",,"p. 128315",2022,Feb.
"Yu-An Chien,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Electro-co-deposition of Au-TiO2 Composites with Improved Mechanical Property toward Miniaturized Electronics","The 2021 International Chemical Congress of Pacific Basin Societies (Pacifichem 2021)",,,,,,2021,Dec.
"Akira Onishi,Akihiro Uchiyama,Kohei Shibata,Takasi Ichikawa,Sangyeop Lee,Shinichi Iida,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu,Hiroyuki Ito","3次元容量検出電極による単一Au錘3軸MEMS加速度センサの検討","第13回集積化MEMSシンポジウム",,,,,,2021,Nov.
"Akihiro Uchiyama,Kohei Shibata,Akira Onishi,Takasi Ichikawa,Shinichi Iida,Sangyeop Lee,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu,Hiroyuki Ito","ワイドレンジAu錘1軸MEMS加速度センサの検討","第13回集積化MEMSシンポジウム",,,,,,2021,Nov.
"Kohei Shibata,Akihiro Uchiyama,Akira Onishi,Sangyeop Lee,Katsuyuki Machida,Noboru Ishihara,Kazuya Masu,Hiroyuki Ito","Au錘1軸差動型CMOS-MEMS加速度センサの統合設計シミュレーションの検討","第13回集積化MEMSシンポジウム",,,,,,2021,Nov.
"Takumi Akiyama,Chun-Yi Chen,Tso-Fu Mark Chang,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Alloy Electrodeposition of Gold-Nickel Alloys and the Mechanical Property in Micro-Scale","TACT2021 International Thin Films Conference","TACT2021 International Thin Films Conference",,,,,2021,Nov.
"Taro Omura,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Effect of Current Density on Micro-Mechanical Characteristic of Electrodeposited Gold Evaluated from Cyanide Bath","TACT2021 International Thin Films Conference","TACT2021 International Thin Films Conference",,,,,2021,Nov.
"Kazuya Fujita,Kosuke Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Micro-Mechanical Property of Single Crystal Gold for Applications in Microelectronics","TACT2021 International Thin Films Conference","TACT2021 International Thin Films Conference",,,,,2021,Nov.
"Hiroyuki Ito,Katsuyuki Machida,Noboru Ishihara,Yoshihiro Miyake,Kazuya Masu","A Highly Sensitive MEMS Accelerometer Module for Measuring Micro Muscular Sounds",,"ECS Transactions",,"Vol. 104","No. 4","pp. 83-91",2021,Oct.
"藤田 一矢,鈴木 康介,Chun-Yi Chen,Tso-Fu Mark Chang,山根 大輔,伊藤 浩之,町田 克之,益 一哉,曽根 正人","金単結晶微小カンチレバーの機械的特性とサンプル形状効果","第82回応用物理学会秋季学術講演会","第82回応用物理学会秋季学術講演会",,,,,2021,Sept.
"Akira Onishi,Akihiro Uchiyama,Kohei Shibata,Takasi Itikawa,Sangyeop Lee,Shinichi Iida,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu,Hiroyuki Ito","3D容量検出電極による単一Au錘3軸MEMS加速度センサの検討","第82回 応用物理学会秋季学術講演会",,,,,,2021,Sept.
"Kazuya Fujita,Kosuke Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Mechanical Property of Gold Micro-Cantilevers for Application in Microelectronics and the Sample Geometry Effect","Micro and Nano Engineering Conference 2021 (MNE2021)",,,,,,2021,Sept.
"Taro Omura,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Effect of Current Density on Mechanical Properties of Electrodeposited Gold Evaluated by Micro-Compression Test","Micro and Nano Engineering Conference 2021 (MNE2021)",,,,,,2021,Sept.
"Takumi Akiyama,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Micro-Mechanical Property Evaluation of Gold-Nickel Alloys toward Design of MEMS Components","Micro and Nano Engineering Conference 2021 (MNE2021)",,,,,,2021,Sept.
"Kohei Shibata,Akihiro Uchiyama,Akira Onishi,Sangyeop Lee,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu,Hiroyuki Ito","1軸差動型CMOS-MEMS加速度センサの統合設計シミュレーションの検討","令和3年度E部門総合研究会",,,,,,2021,July
"Takasi Itikawa,Sayaka Koga,Shinichi Iida,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu,Hiroyuki Ito","単一 Au 錘 3 軸加速度センサのための分割容量検出 2 重電極に関する検討","令和2年度E部門総合研究会",,,,,,2021,July
"Akihiro Uchiyama,Takasi Ichikawa,Kohei Shibata,Shinichi Iida,Sangyeop Lee,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu,Hiroyuki Ito","A MEMS accelerometer with a single axis two proof masses for a wide detection range","Transducers",,,,,,2021,June
"Tso-Fu Mark Chang,Hideaki Nakajima,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Hiroshi Toshiyoshi,Masato Sone","Effective Young’s Modulus of Elelectrodeposited Gold for Design of MEMS Accelerometers",,"Advances in Microelectronics: Reviews","IFSA PUBLISHING, S.L.","Vol. 3",,,2021,Apr.
"Hitomi Watanabe,Tso-Fu Mark Chang,Michael  Schneider,Ulrich  Schmid,Chun-Yi Chen,Shinichi Iida,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electro-deposition and the Temperature Dependency",,"Electrochem","MDPI","Vol. 2",,"pp. 216-223",2021,Apr.
"Takasi Ichikawa,Akihiro Uchiyama,Kohei Shibata,Shinichi Iida,Sangyeop Lee,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu,Hiroyuki Ito","A 3-D capacitive-detection electrode for a single gold proof-mass three-axis MEMS accelerometer","Inertial",,,,,,2021,Mar.
"Masato Sone,Tso-Fu Mark Chang,Takashi Nagoshi,Katsuyuki Machida,Daisuke Yamane,Hiroyuki Ito,Kazuya Masu","医用MEMSデバイス応用に向けた 微小貴金属めっき材料の機械的特性評価","日本金属学会 2021年春季講演大会","日本金属学会 2021年春季講演大会",,,,,2021,Mar.
"Akihiro Uchiyama,Takasi Ichikawa,Kohei Shibata,Shinichi Iida,Sangyeop Lee,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu,Hiroyuki Ito","ワイドレンジ検出可能なAu錘1軸MEMS加速度センサ の検討","応用物理学会春季学術講演会",,,,,,2021,Mar.
"Yu-An Chien,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Co-Electrodeposition of Au-TiO2 Nanocomposite and the Micro-Mechanical Properties",,"Electrochem","MDPI","Vol. 1","No. 4","pp. 388-393",2020,Nov.
"Hao-Chun Tang,Tso-Fu Mark Chang,Yaw-Wang Chai,Chun-Yi Chen,Takashi Nagoshi,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Nanoscale Hierarchical Structure of Twins in Nanograins Embedded with Twins and the Strengthening Effect",,"Dislocation Mechanics of Metal Plasticity and Fracturing (RonaldW. Armstrong, Ed)","MDPI",,,"pp. 87-96",2020,Nov.
"Takasi Itikawa,Akihiro Uchiyama,Sayaka Koga,Katsuyuki Machida,Noboru Ishihara,Kazuya Masu,Shinichi Iida,Hiroyuki Ito","100 nG/√Hz レベルを目指した分割 2 重電極を有する単一Au錘 3 軸 MEMS 加速度センサの検討","第12回集積化MEMSシンポジウム",,,,,,2020,Oct.
"Akihiro Uchiyama,Takasi Itikawa,Sayaka Koga,Katsuyuki Machida,Kazuya Masu,Noboru Ishihara,Shinichi Iida,Hiroyuki Ito","Au錘一軸MEMS加速度センサの差動容量型電極構造の検討","第12回集積化MEMSシンポジウム",,,,,,2020,Oct.
"Kohei Shibata,Takasi Itikawa,Sayaka Koga,Katsuyuki Machida,Kazuya Masu,Noboru Ishihara,Shinichi Iida,Hiroyuki Ito","高分解能単一Au 錘CMOS-MEMS 加速度センサの検討","第12回集積化MEMSシンポジウム",,,,,,2020,Oct.
"Takashi Ichikawa,Kohei Shibata,Tatsuya Koga,Katsuyuki Machida,Shinichi Iida,Noboru Ishihara,Kazuya Masu,Hiroyuki Ito","A High Resolution Single Gold Proof-Mass CMOS-MEMS Accelerometer","International Conference on Solid State Devices and Materials",,,,,,2020,Sept.
"Akihiro Uchiyama,Takasi Itikawa,Sayaka Koga,Shinichi Iida,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu,Hiroyuki Ito","マイクロGレベルセンシングのための金錘1軸差動容量型MEMS加速度センサ","第81回 応用物理学会秋季学術講演会",,,,,,2020,Sept.
"Takasi Itikawa,Ken Atsumi,Sayaka Koga,Shinichi Iida,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu,Hiroyuki Ito","100 nG/√Hzレベルを目指したピラー型電極を有する単一Au錘3軸MEMS加速度センサの検討","第81回 応用物理学会秋季学術講演会",,,,,,2020,Sept.
"本田優斗,田中佐和子,崔容俊,Toshihiko Noda,Kazuhiro Takahashi,Kazuaki Sawada,Hitoshi Ishii,Katsuyuki Machida,Hiroyuki Ito,二階堂靖彦,Mitsumasa Saito,Shinichi Yoshida","フォトゲート型蛍光センサによるレジオネラ属菌の識別方法の検討","令和2年度E部門総合研究会",,,,,,2020,July
"Takashi Ichikawa,Ken Atsumi,Tatsuya Koga,Daisuke Yamane,Shin-ichi Iida,Hiroyuki Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A 100-nG/√Hz-Level Single Au Proof-Mass 3-Axis MEMS Accelerometer with Pillar-Shaped electrodes","Design, Test, Integration & Packaging of MEMS/MOEMS",,,,,,2020,June
"Kyotaro Nitta,Hao-Chun Tang,Tso-Fu Mark Chang,Chun-Yi Chen,Shinichi Iida,Daisuke Yamane,Katsuyuki Machida,Hiroyuki  Ito,Kazuya Masu,Masato Sone","Alloy Electroplating and Young’s Modulus Characterization of AuCu Alloy Microcantilevers",,"Journal of The Electrochemical Society","IOP Science","Vol. 167",,"pp. 082503",2020,Apr.
"Kazuya Masu,Katsuyuki Machida,Daisuke Yamane,Hiroyuki Ito,Noboru Ishihara,Tso-Fu Mark Chang,Masato Sone,Ryo Shigeyama,Taiki Ogata,Yoshihiro Miyake","CMOS-MEMS Based Microgravity Sensor and Its Application",,"ECS Transactions",,"Vol. 97","No. 5","pp. 91-108",2020,Apr.
"Ken Atsumi,Sayaka Koga,Takasi Itikawa,Daisuke Yamane,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","ピラー型電極を用いた単一錘3軸MEMS加速度センサの検討","第67回応用物理学会春季学術講演会",,,,,,2020,Mar.
"Takasi Itikawa,Ken Atsumi,Sayaka Koga,Daisuke Yamane,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","ピラー型電極による単一Au錘3軸MEMS加速度センサの感度均一化の検討","第67回応用物理学会春季学術講演会",,,,,,2020,Mar.
"Tatsuya Koga,Takashi Ichikawa,Daisuke Yamane,Shinichi Iida,Noboru Ishihara,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu","A Gold Proof-Mass Differential MEMS Accelerometer for Micro-G Level Sensing","The 7th IEEE International Symposium on Inertial Sensors & Systems (INERTIAL 2020)",,,,,,2020,Mar.
"Kyotaro Nitta,Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Shinichi Iida,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability","IEEE Sensors 2019","IEEE Conference Paper","2019 IEEE SENSORS",,,,2020,Jan.
"Kyotaro Nitta,Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Shinichi Iida,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Electrodepostion of Au-Cu Alloy  Micro-Cantilevers and the Young’s modulus by Resonance Frequency Method","MRS Fall Meeting 2019",,,,,,2019,Dec.
"Yu-An Chien,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Micro-Mechanical Properties of Electrodeposited Au-TiO2 Composite Film","MRS Fall Meeting 2019",,,,,,2019,Dec.
"Takasi Itikawa,Sayaka Koga,Daisuke Yamane,Shinichi Iida,Noboru Ishihara,Hiroyuki Ito,Tso-Fu Mark Chang,Masato Sone,Katsuyuki Machida,Kazuya Masu","積層メタル技術で作製したMEMS加速度センサの衝撃特性評価","第11回集積化MEMSシンポジウム",,,,,"  19pm4-A-4",2019,Nov.
"Sayaka Koga,Takasi Itikawa,Naoto Tanaka,Taiki Ogata,Hiroki Ora,Daisuke Yamane,Noboru Ishihara,Hiroyuki Ito,Masato Sone,Katsuyuki Machida,Yoshihiro Miyake,Kazuya Masu","微弱筋音計測に向けた高分解能MEMS慣性センサモジュールの検討","第11回集積化MEMSシンポジウム",,,,,"  19pm4-A-3",2019,Nov.
"Tomoki Iriya,Kyotaro Nitta,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Electroplating of Au-Pd Alloy Films and the Mechanical Properties","International Thin Films Conference (TACT 2019)",,,,,,2019,Nov.
"Takasi Itikawa,Shouta Otobe,Ken Atsumi,Sayaka Koga,Daisuke Yamane,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Masato Sone,Katsuyuki Machida,Kazuya Masu","3Dピラー型Au錘MEMS加速度センサ","第36回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,"  19am3-PS3-21",2019,Nov.
"Hiroyuki Ito,Sayaka Koga,Takasi Itikawa,Daisuke Yamane,Noboru Ishihara,Yoshihiro Miyake,Katsuyuki Machida,Kazuya Masu","兆し計測のための高感度MEMS加速度センサ技術","計測自動制御学会 システム・情報部門 学術講演会 2019",,,,,,2019,Nov.
"Tatsuya Koga,Takashi Ichikawa,Naoto Tanaka,Taiki Ogata,Hiroki Ora,Daisuke Yamane,Noboru Ishihara,Hiroyuki Ito,Masato Sone,Katsuyuki Machida,Yoshihiro Miyake,Kazuya Masu","High-Sensitivity Inertial Sensor Module to Measure Hidden Micro Muscular Sounds","IEEE Biomedical Circuits and Systems Conference 2019 (BioCAS2019)","IEEE Conference Paper","IEEE",,,,2019,Oct.
"Takasi Itikawa,Shouta Otobe,Ken Atsumi,Sayaka Koga,Daisuke Yamane,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Katsuyuki Machida,Masato Sone,Kazuya Masu","Au錘3軸MEMS加速度センサのためのSCD電極の検討 (2)","第80回応用物理学会秋季学術講演会",,,,,,2019,Sept.
"Tso-Fu Mark Chang,Yu-An Chien,Hao-Chun Tang,Chun-Yi Chen,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Strengthening of Gold-Based Micro-Structures by Alloying and Incorporation of Oxide Nanoparticles","第80回応用物理学会秋季学術講演会",,,,,,2019,Sept.
"Hao-Chun Tang,Tso-Fu Mark Chang,Yaw-Wang Chai,Chun-Yi Chen,Takashi Nagoshi,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Nanoscale Hierarchical Structure of Twins in Nanograins Embedded with Twins and the Strengthening Effect",,"Metals","MDPI","Vol. 9","No. 9","pp. 987",2019,Sept.
"Katsuyuki Machida,Daisuke Yamane,Toshifumi Konishi,Shin-ichi Iida,Noboru Ishihara,Tso-Fu Mark Chang,Masato Sone,Hiroyuki Ito,Kazuya Masu","MEMS Accelerometer Fabricated by Gold Multi-Layer Metal Technology",,"ECS Transactions",,"Vol. 92",,"pp. 169-184",2019,July
"Masato Sone,Hao-Chun Tang,Tso-Fu Mark Chang,Chun Yi Chen,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu","超高感度加速度センサ実現のための高強度金合金材料の創製とその機械的特性評価","2019年 関西表面技術シンポジウム","電気鍍金研究会",,,,,2019,July
"Kyotaro Nitta,Tso-Fu Mark Chang,Koichiro Tachibana,Hao-chun Tang,Chun-Yi Chen,Shinichi Iida,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Cu-Alloying Effect on Structure Stability of Electrodeposited Gold-Based Micro-Cantilever Evaluated by Long-Term Vibration Test",,"Microelectronic Engineering",,"Vol. 215",,"pp. 111001",2019,May
"Ken Atsumi,Shota Otobe,Tatsuya Koga,Takashi Ichikawa,Daisuke Yamane,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Masato Sone,Katsuyuki Machida,Kazuya Masu","Pillar-Shaped Electrodes for 3-axis Gold-Proof-Mass MEMS Capacitive Accelerometers","Design, Test, Integration & Packaging of MEMS/MOEMS(DTIP2019)","IEEE Conference Paper","IEEE",,,,2019,May
"Ken Hashigata,Hao-Chun Tang,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Strengthening of Micro-Cantilever by Au/Ti Bi-Layered Structure Evaluated by Micro-Bending Test toward MEMS Devices",,"Microelectronic Engineering",,"Vol. 213",,"pp. 13-17",2019,May
"Kosuke Suzuki,Ken Hashigata,Keisuke Asano,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Mechanical properties of gold micro-cantilevers with different thickness evaluated by micro-bending test","The 2nd International Conference on Material Strength and Applied Mechanics",,,,,,2019,May
"Masato Sone,Hao-Chun Tang,Masaharu Yoshiba,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu","Mechanical properties of electrodeposited gold-copper alloy by micro-compression test","The 2nd International Conference on Material Strength and Applied Mechanics","The 2nd International Conference on Material Strength and Applied Mechanics",,,,,2019,May
"Hitomi Watanabe,Takuma Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","High Structure Stability Ti/Au Multiple Layer Micro-Cantilever and the Temperature Dependence","The 2nd International Conference on Material Strength and Applied Mechanics",,,,,,2019,May
"Kosuke Suzuki,Ken Hashigata,Keisuke Asano,Chun Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","微小曲げ試験による金材料の機械的強度のサンプル形状効果","第66回応用物理学会春季学術講演会",,,,,,2019,Mar.
"Chun-Yi Chen,Masaharu Yoshiba,Haochun Tang,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida","Pulse-Current Electrodeposition of Gold",,"Novel Metal Electrodeposition and the Recent Application","IntechOpen",,,,2019,Mar.
"Haochun Tang,Tso-Fu Mark Chang,Chun-Yi Chen,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida","Electrodeposition of Gold Alloys and the Mechanical Properties",,"Novel Metal Electrodeposition and the Recent Application","IntechOpen",,,,2019,Mar.
"Kyotaro Nitta,Tang Haochun,Chun Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","電気めっき法によるAu-Cu合金微小カンチレバーの作製","第66回応用物理学会春季学術講演会",,,,,,2019,Mar.
"Shouta Otobe,Ken Atsumi,Sayaka Koga,Daisuke Yamane,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Masato Sone,Katsuyuki Machida,Kazuya Masu","Au錘3軸MEMS加速度センサのためのSCD電極の検討","第66回応用物理学会春季学術講演会",,,,,,2019,Mar.
"Hitomi Watanabe,Takuma Suzuki,Chun Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Ti/Au微小カンチレバーの温度依存性への積層構造の影響","第66回応用物理学会春季学術講演会",,,,,,2019,Mar.
"Takasi Itikawa,Hirofumi Niijima,Sayaka Koga,Daisuke Yamane,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Masato Sone,Katsuyuki Machida,Kazuya Masu","3軸Au錘MEMS加速度センサにおける平行平板型電極の検討","第66回応用物理学会春季学術講演会",,,,,,2019,Mar.
"Ken Atsumi,Shouta Otobe,Sayaka Koga,Takasi Itikawa,Daisuke Yamane,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Masato Sone,Katsuyuki Machida,Kazuya Masu","積層メタル技術によるピラー型容量検出電極の検討","第66回応用物理学会春季学術講演会",,,,,,2019,Mar.
"Tso-Fu Mark Chang,Chun-Yi Chen,Yota Ishizuka,Minami Teranishi,Takuma Suzuki,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Design of Au-Based Micro-Components with High Structure Stability for Applications in MEMS Inertial Sensors",,"Advances in Microelectronics Reviews","IFSA Publishing","Vol. 2",,"pp. 23-48",2019,Feb.
"Koichiro Tachibana,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Long-Term Structure Stability of Ti/Au Layered Micro-Cantilever Evaluated by Vibration Test",,"Microelectronic Engineering",,"Volume 207",,"pp. 33-36",2019,Jan.
"Daisuke Yamane,Shota Otobe,Ken Atsumi,Tatsuya Koga,Toshifumi Konishi,Teruaki Safu,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A 3-D PARALLEL-PLATE MEMS ACCELEROMETER WITH A GOLD PROOF MASS","32nd Int. Conf. on Micro Electro Mechanical Systems (MEMS 2019)",,,,,"pp. 684-687",2019,Jan.
"Motohiro Takayasu,Ippei Tsuji,Hiroyuki Ito,Daisuke Yamane,Shiro Dosho,Toshifumi Konishi,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","Microgravity Generation Using Tilting Board for Resolution Evaluation of MEMS Accelerometer",,"Sensors and Materials",,"Vol. 30","No. 12","pp. 2919-2926",2018,Dec.
"Daisuke Yamane,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu","Sub-1mG MEMS Inertial Sensor for Biomedical Applications","The 20th Takayanagi Kenjiro Memorial Symposium joined with the 4th International Conference on Nano Electronics Research and Education（ICNERE2018）",,,,,,2018,Nov.
"Shota Otobe,Tatsuya Koga,Ken Atsumi,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Shin-ichi Iida,Hiroyuki. Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Sub-1mG Tri-Axis MEMS Accelerometer with Multiple Segmented Capacitance Detection Electrodes","31st International Microprocesses and Nanotechnology Conference (MNC2018)",,,,,,2018,Nov.
"Shouta Otobe,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","シングルAu錘と分割電極容量検出(SCD)方式を用いた3軸全差動MEMS加速度センサ","第10回集積化MEMSシンポジウム",,,,,,2018,Oct.
"Sayaka Koga,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","1軸MEMS加速度センサのAu錘厚膜化による高性能化の検討","第35回「センサ・マイクロマシンと応用システム」シンポジウム（センサ・マイクロマシン部門大会）",,,,,,2018,Oct.
"Keisuke Asano,Hao-Chun Tang,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone.","Mechanical Characterization of Constant Current Electroplated Au-Cu Alloy Micro-Cantilever","IUMRS-ICA 2018","IUMRS-ICA 2018",,,,,2018,Oct.
"Takasi Itikawa,Hirofumi Niijima,Sayaka Koga,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","Au単一錘平行平板型3軸MEMS加速度センサの検討","第35回「センサ・マイクロマシンと応用システム」シンポジウム（センサ・マイクロマシン部門大会）",,,,,,2018,Oct.
"Haochun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Solid Solution Strengthening of Gold Based Materials  for MEMS Applications","The 35th SENSOR SYMPOSIUM on Sensors, Micromachines and Applied Systems",,,,,,2018,Oct.
"Ken Hashigata,Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone.","Electrodeposition of Gold on Titanium and Bending Test of Au-Ti Bi-Layered Micro-Cantilever","IUMRS-ICA 2018","IUMRS-ICA 2018",,,,,2018,Oct.
"Hideaki Nakajima,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Hiroyuki Ito,Kazuya Masu,Masato Sone","Young’s Modulus of Ti/Au Micro-Cantilever by Resonance Frequency Method toward Au-Based MEMS Device","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Keisuke Asano,Hao-chun Tang,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Electrodeposited Au-Cu Alloy with High Yield Stress Evaluated by Micro-Bending Test","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Kyotaro Nitta,Koichiro Tachibana,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Cu-Alloying Effect on Structure Stability of Au Micro-Cantilever","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Koichiro Tachibana,Chun-Yi Chen,Tso-Fu Mark Chang,Kyotaro Nitta,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Reliability Characteristics of Ti/Au Micro-Cantilever by Long-Term Vibration Test","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Tso-Fu Mark Chang,Hao-chun Tang,Kyotaro Nitta,Chun-Yi Chen,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Electrodeposition of High Strength Au-Cu Alloys for MEMS Device","2018 International Conference on Solid State Devices and Materials (SSDM2018)","2018 International Conference on Solid State Devices and Materials (SSDM2018)",,,,,2018,Sept.
"Masato Sone,Hideaki Nakajima,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Hiroyuki Ito,Kazuya Masu","EFFECTIVE YOUNG’S MODULUS EVALUATION OF TI/AU MICRO STRUCTURES FOR MEMS ACCELEROMETER","8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS"","8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS"",,,,,2018,Sept.
"Hideaki Nakajima,Tso-Fu Mark Chang,Chun Yi Chen,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Kazuya Masu,Masato Sone","A Study on Young’s Modulus of Micro-Cantilevers Fabricated by Au Electroplating for MEMS Accelerometers","第79回応用物理学会秋季学術講演会","第79回応用物理学会秋季学術講演会",,,,,2018,Sept.
"Daisuke Yamane,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu","High-Resolution MEMS Accelerometer by Multi-Layer Metal Technology","Taiwan-Japan-US Joint Workshop on Energy Materials and Sustainable Development",,,,,,2018,Sept.
"Ken Hashigata,Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Mechanical Strength Enhancement of Ti/Au Layered Structure Evaluated by Micro-Bending Test","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Hitomi Watanabe,Takuma Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Effects of Ti/Au Layered Structure on Temperature Dependence of Micro-Cantilever Structure Stability","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Takahiro Yamamoto,Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Mechanical Property and Thermal Stability of Electrodeposited Au-Cu Alloys  for Reliability of MEMS Devices","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Takashi Nagoshib,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","High Strength Electrodeposited Gold-Copper Alloys for MEMS Devices","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Kazuya Masu,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake","CMOS-MEMS accelerometer with gold proof-mass and its application in diagnosis of Parkinsons Disease","4th International Conference on Condensed Matter and Materials Physics",,,,,,2018,Aug.
"Chun-Yi Chen,Hao-Chun Tang,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Ultra-high Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests for MEMS Devices","The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan","Nano Engineering and Microsystem Technology Conference, Taiwan",,,,,2018,June
"Kyotaro Nitta,Koichiro Tachibana,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Reliability Evaluation of Au-Cu Microcantilever by Long-Term Vibration Test toward MEMS Components","The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan","Nano Engineering and Microsystem Technology Conference, Taiwan",,,,,2018,June
"Ken Hashigata,Haochun Tang,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","The effect of acid pre-treatment on electroplating of gold on titanium substrate","32nd International Conference on Surface Modification Technologies (SMT32)",,,,,,2018,June
"Keisuke Asano,Hao-Chun Tang,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Promoted bending strength in micro-cantilevers composed of nanograined gold toward MEMS applications",,"Microelectronic Engineering","Elsevier","Vol. 196",,"pp. 20-24",2018,June
"Shota Otobe,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","Tri-Axis Fully-Differential MEMS Accelerometer with Segmented Capacitance Detection","Asia-Pacific Conference of Transducers and Micro-Nano Technology 2018 (APCOT 2018)",,,,,,2018,June
"Masato Sone,Hao-Chun Tang,Chun-yi Chen,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu","Characteristics of Electroplated Gold Material with Multilayer Metal Technology for CMOS-MEMS Accelerometer","The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan","Nano Engineering and Microsystem Technology Conference, Taiwan",,,,,2018,June
"Koichiro Tachibana,Chun-Yi Chen,Tso-Fu Mark Chang,Kyoutarou Nitta,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Structure stability of Ti/Au micro-cantolever evaluated by long-term vibration test","The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan","Nano Engineering and Microsystem Technology Conference, Taiwan",,,,,2018,June
"HIdeaki Nakajima,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,HIroshi Toshiyoshi,Hiroyuki Ito,Kazuya Masu,Masato Sone","A Study on Effective Young’s Modulus of Micro-Cantilevers Fabricated by Au Electroplating","The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan","Nano Engineering and Microsystem Technology Conference, Taiwan",,,,,2018,June
"Kyoutarou Nitta,Koichiro Tachibana,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Structure Stability of Electrodeposited Au-Cu Alloy Micro-Cantilever Evaluated By Long-Term Vibration Test for Applications As Movable Components in MEMS Devices","233rd ECS Meeting","233rd ECS Meeting",,,,,2018,May
"Hiroyuki Ito,Daisuke Yamane,Toshifumi Konishi,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Masato Sone,Yoshihiro Miyake,Kazuya Masu","MEMS加速度センサと生体計測への応用","新化学技術推進協会 電子情報技術部会 マイクロナノシステムと材料・加工分科会 講演会",,,,,,2018,May
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Shin-ichi Iida,Takuma Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Masato Sone,Katsuyuki Machida,Kazuya Masu","Temperature Characteristics of MEMS Inertial Sensor Fabricated by Gold Multi-Layer Metal Technology","13th Annual IEEE International Conference on Nano-Micro Engineered and Molecular Systems (IEEE NEMS 2018)",,,,,"pp. WM-II-f<sub>3</sub>243",2018,Apr.
"Ken Hashigata,Hao-Chun Tang,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Electroplating of Gold on Titanium Substrate: Method to Deposit Defect-Free Film","22nd Topical Meeting of the International Society of Electrochemistry",,,,,,2018,Apr.
"Haochun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Pulse Current Electrodeposition of Ultrahigh Strength of Nanocrystalline Au-Cu Alloys","22nd Topical Meeting of the International Society of Electrochemistry","22nd Topical Meeting of the International Society of Electrochemistry",,,,,2018,Apr.
"Minami Teranishi,Chun-Yi Chen,Tso-Fu Mark Chang,Toshifumi Konishi,Katsuyuki Machida,Daisuke Yamane,Kazuya Masu,Masato Sone","Enhancement in Structure Stability of Gold Micro-Cantilever by Constrainted Fixed-End in MEMS devices",,"Microelectronic Engineering",,"Vol. 187-188",,"pp. 105-109",2018,Apr.
"Toshifumi Konishi,Daisuke Yamane,Teruaki Safu,Chun Yi Chen,Tso-Fu Mark Chang,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Masato Sone,Katsuyuki Machida,Kazuya Masu,Shinichi Iida","積層メタル技術を用いたMEMS慣性センサの封止環境における温度依存性","第64回応用物理学会春季学術講演会",,,,,,2018,Mar.
"Hiroyuki Ito,Daisuke Yamane,Toshifumi Konishi,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Masato Sone,Yoshihiro Miyake,Kazuya Masu","集積化CMOS-MEMS技術による高感度慣性センサと応用システム","第64回応用物理学会春季学術講演会",,,,,,2018,Mar.
"Hirofumi Niijima,Shouta Otobe,Motohiro Takayasu,Daisuke Yamane,Hiroyuki Ito,Teruaki Safu,Toshifumi Konishi,Shiro Dosho,Shinichi Iida,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Tri-axis Differential MEMS Accelerometer with a Single Au Proof Mass","平成30年電気学会全国大会",,,,,,2018,Mar.
"Motohiro Takayasu,Tatsuya Koga,Ippei Tsuji,Hiroyuki Ito,Daisuke Yamane,Shiro Dosho,Toshifumi Konishi,Shinichi Iida,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","Study on resolution evaluation using tilt for 1-mG MEMS accelerometer","The 2018 Annual Meeting of The Institute of Electrical Engineers of Japan",,,,,,2018,Mar.
"Hiroyuki Ito,Daisuke Yamane,Toshifumi Konishi,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Masato Sone,Yoshihiro Miyake,Kazuya Masu","集積化CMOS-MEMS技術による?感度慣性センサと応?システム","応用物理学会第65回春季講演会","応用物理学会第65回春季講演会",,,,,2018,Mar.
"Hao-Chun Tang,Ken Hashigata,Tso-Fu Mark Chang,Chun-Yi Chen,Takashi Nagoshi,Toshifumi Konishi,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Sample size effect on micro-mechanical properties of gold electroplated with dense carbon dioxide",,"Surface and Coatings Technology","Elsevier","Vol. 350",,"pp. 1065-1070",2018,Mar.
"Hao-Chun Tang,Chun Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","電解めっき法によるMEMS??銅合?の作製及び機械的特性評価","応用物理学会第６５回春季講演会","応用物理学会第65回春季講演会",,,,,2018,Mar.
"Hideaki Nakajima,Chun Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Kazuya Masu,Masato Sone","電解めっき法によるTi/Au微?カンチレバーのヤング率評価","応用物理学会第６５回春季講演会","応用物理学会第65回春季講演会",,,,,2018,Mar.
"Kyoutarou Nitta,Koichiro Tachibana,Hao-Chun Tang,Chun Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","?期振動試験によるAu-Cu合?微?カンチレバーの構造安定性","応用物理学会第６５回春季講演会","応用物理学会第65回春季講演会",,,,,2018,Mar.
"Ken Hashigata,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Enhanced Mechanical Strength of Ti-Au Bi-Layered Micro-Cantilever for MEMS Accelerometers","第64回応用物理学会春季学術講演会",,,,,,2018,Mar.
"Keisuke Asano,Hao-Chun Tang,Chun Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","電析制御による微??カンチレバーの曲げ特性の改善","応用物理学会第６５回春季講演会","応用物理学会第65回春季講演会",,,,,2018,Mar.
"Tatsuya Koga,Motohiro Takayasu,Daisuke Yamane,Hiroyuki Ito,Toshifumi Konishi,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","積層メタル技術で作製したMEMS慣性センサのモジュール化の検討(2)","第64回応用物理学会春季学術講演会",,,,,,2018,Mar.
"Katsuyuki Machida,Kazuya Masu","集積化CMOS-MEMS技術の課題と展望","第64回応用物理学会春季学術講演会",,,,,,2018,Mar.
"Hirofumi Niijima,Shouta Otobe,Motohiro Takayasu,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","高感度MEMS加速度センサのBrownian Noise評価に関する検討","第64回応用物理学会春季学術講演会",,,,,,2018,Mar.
"Motohiro Takayasu,Shiro Dosho,Hiroyuki Ito,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Noboru Ishihara,Kazuya Masu","A 0.18-?m CMOS time-domain capacitive-sensor interface for sub-1mG MEMS accelerometers",,"IEICE Electronics Express",,"Vol. 15","no. 2","p. 20171227",2018,Jan.
"Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Au-Cu Alloys Prepared by Pulse Electrodeposition toward Applications as Movable Micro-Components in Electronic Devices",,"Journal of The Electrochemical Society",,"Vol. 165","No. 2","pp. D58-D63",2018,Jan.
"Tso-Fu Mark Chang,Chun-Yi Chen,Hao-Chun Tang,Masaharu Yoshiba,Takashi Nagoshi,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Fabrication and Characterization of High Strength Electrodeposited Gold toward High-Sensitive MEMS Inertial Sensors",,"Advances in Microelectronics Reviews","IFSA Publishing","Vol. 1",,"pp. 93-106",2017,Dec.
"Masato Sone,Haochun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu","Material Design of High Strength Electroplated Gold Alloy toward High-Sensitive MEMS Accelerometers","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Tso-Fu Mark Chang,Haochun Tang,Chun-Yi Chen,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Micro-Mechanical Property Enhancement of Metals Electroplated in Electrolyte Containing Supercritical CO2","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Takuma Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology","2017 MRS Fall Meeting",,,,,,2017,Nov.
"Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Ultrahigh Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests","2017 MRS Fall Meeting",,,,,,2017,Nov.
"Koichiro Tachibana,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Long-Term Vibration Testing of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology","2017 MRS Fall Meeting",,,,,,2017,Nov.
"Toshifumi Konishi,Daisuke Yamane,Teruaki Safu,Chun Yi Chen,Tso-Fu Mark Chang,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Masato Sone,Katsuyuki Machida,Kazuya Masu,Shinichi Iida","Temperature Dependence on Package Sealing Ambient of MEMS Sensor Fabricated by Gold Electroplating","The 30th International Microprocesses and Nanotechnology Conference",,,,,,2017,Nov.
"Haochun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Strategies of Mechanical Strengthening in Electroplated  Au Materials","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Hirofumi Niijima,Motohiro Takayasu,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Novel Tri-Axis MEMS Accelerometer with a Single Au Proof Mass and Fully Differential Sensing Electrodes","The 30th International Microprocesses and Nanotechnology Conference",,,,,,2017,Nov.
"Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","Sub-1mG Inertial Sensors by Multi-layer Metal Technology","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,"  F5-05",2017,Nov.
"Hideaki Nakajima,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Young’s Modulus Evaluation of Ti/Au Micro-Cantilevers by Au Electrodeposition","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Keisuke Asano,Haochun Tang,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Mechanical Strengthening of Gold Micro-Cantilever by Control of Electroplating Conditions","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Koichiro Tachibana,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Long-Term Vibration Test and Structure Stability of Ti/Au Micro-Cantilever as MEMS Components","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Takuma Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Temperature Structure Stability of Multi-Ti/Au-Layered Micro-Cantilever","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Ippei Tsuji,Motohiro Takayasu,Hiroyuki Ito,Daisuke Yamane,Shiro Dosho,Toshifumi Konishi,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","積層メタル技術を用いたMEMS加速度センサの傾斜計応用の検討","第9回集積化MEMSシンポジウム",,,,,"  01pm1-A-6",2017,Oct.
"Hirofumi Niijima,Motohiro Takayasu,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","静電容量型MEMSセンサにおけるブラウニアン・ノイズ評価手法の検討(2)","第34回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,"  01am2-PLN-8",2017,Oct.
"大西  脩平,崔  容俊,Makoto Ishida,Kazuaki Sawada,Hitoshi Ishii,Katsuyuki Machida,Kazuya Masu,二階堂 靖彦,Mitsumasa Saito,Shinichi Yoshida","フォトゲート型蛍光センサを用いたレジオネラの蛍光観測","第9回集積化MEMSシンポジウム",,,,,,2017,Oct.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Koichiro Tachibana,Minami Teranishi,Chun Yi Chen,Tso-Fu Mark Chang,Masato Sone,Katsuyuki Machida,Kazuya Masu","積層メタルMEMS慣性センサの長期振動特性評価","第9回集積化MEMSシンポジウム",,,,,,2017,Oct.
"Toshifumi Konishi,Daisuke Yamane,Teruaki Safu,Masato Sone,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","積層メタル技術を用いたMEMS慣性センサの構造設計のための粘性定数モデルの検討","第9回集積化MEMSシンポジウム",,,,,,2017,Oct.
"Ken Hashigata,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Defect-Free and Uniform Electroplating of Gold on Titanium Surface for Design of MEMS Components","TACT2017 International Thin Films Conference",,,,,,2017,Oct.
"Kosuke Orihara,Motohiro Takayasu,Shiro Dosho,Hiroyuki Ito,Daisuke Yamane,Toshifumi Konishi,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","発振型容量検出回路を用いたAu錘CMOS-MEMS加速度センサの検討","第34回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,"  31am3-PLN-2",2017,Oct.
"Tatsuya Koga,Ippei Tsuji,Motohiro Takayasu,Hiroyuki Ito,Daisuke Yamane,Shiro Dosho,Toshifumi Konishi,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","Inclining Angle Sensitivity Characteristics of MEMS Accelerometer Fabricated by Multi-Layer Metal Technology","The 9th Symposium on Integrated MEMS Technology",,,,,,2017,Oct.
"Shouta Otobe,Motohiro Takayasu,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Study of a Single Au Proof Mass and Segmented Electrodes for Tri-axis MEMS Accelerometer","The 34th SENSOR SYMPOSIUM",,,,,,2017,Oct.
"Motohiro Takayasu,Shiro Dosho,Hiroyuki Ito,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Noboru Ishihara,Kazuya Masu","A capacitive sensor circuit based on relaxation oscillator for MEMS inertial sensors","The 9th Symposium on Integrated MEMS Technology",,,,,,2017,Oct.
"Haochun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Utilization of supercritical carbon dioxide in the electrodeposition of Au films for MEMS application","TSCFA 2017 Annual Meeting",,,,,,2017,Oct.
"Ken Hashigata,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Effects of Bi-Layered Au/Ti Structure on Mechanical Properties of Micro-Cantilever Evaluated by Micro-Bending Test Toward Applications in MEMS Devices","43rd International Conference on Micro & Nano Engineering (MNE2017)","MNE2017",,,,,2017,Sept.
"Minami Teranishi,Chun-Yi Chen,Tso-Fu Mark Chang,Toshifumi Konishi,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Structure Stability Enhancement of Gold Micro-Cantilever with a Constrained at Top and Bottom of the Fixed-End","43rd International Conference on Micro & Nano Engineering (MNE2017)","MNE2017",,,,,2017,Sept.
"Shouta Otobe,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Tri-axis MEMS Accelerometer With a Gold Electroplated Single-proof-mass and Segmented Electrodes","2017 International Conference on Solid State Devices and Materials (SSDM 2017)",,,,,,2017,Sept.
"Ippei Tsuji,Motohiro Takayasu,Hiroyuki Ito,Daisuke Yamane,Shiro Dosho,Toshifumi Konishi,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","Tilt Characteristics of a MEMS Accelerometer fabricated by Multi-layer Metal Technology","2017 International Conference on Solid State Devices and Materials (SSDM 2017)",,,,,,2017,Sept.
"Motohiro Takayasu,Shiro Dosho,Hiroyuki Ito,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Noboru Ishihara,Kazuya Masu","A capacitive sensor circuit based on relaxation oscillator for sub-1mG MEMS inertial sensors","2017 International Conference on Solid State Devices and Materials (SSDM 2017)",,,,,,2017,Sept.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Koichiro Tachibana,Minami Teranishi,Chun Yi Chen,Tso-Fu Mark Chang,Masato Sone,Katsuyuki Machida,Kazuya Masu","A Study of Long-Term Vibration Characteristics of MEMS Accelerometers Fabricated by Au Electroplating","The 78th JSAP Autumn Meeting, 2017",,,,,,2017,Sept.
"Tatsuya Koga,Ippei Tsuji,Motohiro Takayasu,Hiroyuki Ito,Daisuke Yamane,Shiro Dosho,Toshifumi Konishi,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","Inclining Angle Sensitivity Characteristics of MEMS Inertial Sensor Fabricated by Multi-Layer Metal Technology","The 78th JSAP Autumn Meeting, 2017",,,,,,2017,Sept.
"Ippei Tsuji,Motohiro Takayasu,Hiroyuki Ito,Daisuke Yamane,Shiro Dosho,Toshifumi Konishi,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Tilt Sensor Using a High-Resolution MEMS Inertial Sensor Fabricated by Multi-Layer Metal Technology","The 78th JSAP Autumn Meeting, 2017",,,,,,2017,Sept.
"Motohiro Takayasu,Shiro Dosho,Hiroyuki Ito,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Noboru Ishihara,Kazuya Masu","A high-resolution capacitive sensor circuit for MEMS accelerometers","The 78th JSAP Autumn Meeting, 2017",,,,,,2017,Sept.
"Masaharu Yoshiba,Chun-Yi Chen,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Mechanical Property Anisotropy of Pure Gold Evaluated by Micro-compression Test","43rd International Conference on Micro & Nano Engineering (MNE2017)","MNE2017",,,,,2017,Sept.
"Hideaki Nakajima,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices",,"Proceedings of the 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","IEEE Conference Publications",,,"pp. 264 - 267",2017,Aug.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Koichiro Tachibana,Minami Teranishi,Chun-Yi Chen,Tso-Fu Mark Chang,Masato Sone,Katsuyuki Machida,Kazuya Masu","LONG-TERM VIBRATION CHARACTERISTICS OF MEMS INERTIAL SENSORS BY MULTI-LAYER METAL TECHNOLOGY",,"Proceedings of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","IEEE Conference Publications",,,"pp. 2187 - 2190",2017,Aug.
"Motohiro Takayasu,Shiro Dosho,Hiroyuki Ito,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Noboru Ishihara,Kazuya Masu","An evaluation of capacitive sensor circuit for MEMS accelerometers","第8回 集積化MEMS技術研究ワークショップ",,,,,,2017,July
"Chun-Yi Chen,Hao-Chun Tang,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Electrochemical Plating of Au-Cu Alloy Films for MEMS Sensor Applications","RACI National Centenary Conference",,,,,,2017,July
"Ippei Tsuji,Motohiro Takayasu,Hiroyuki Ito,Daisuke Yamane,Toshifumi Konishi,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Study on a High-Resolution MEMS Tilt Sensor Fabricated by Multi-layer Metal Technology","第8回 集積化MEMS技術研究ワークショップ",,,,,,2017,July
"Chun-Yi Chen,Hao-chun Tang,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Electroplated Au-based Materials with High Micro-mecchanical Properties as MEMS accelerometer Components","21th International Conference on Solid State Ionics, SSI-21","SSI-21",,,,,2017,June
"Hao-chun Tang,Chun-yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Micro-Mechanical Property Evaluation of Electroplated Au-Cu Alloys toward Applications in MEMS Accelerometers","21th International Conference on Solid State Ionics, SSI-21","SSI-21",,,,,2017,June
"Keisuke Asano,Hao-Chun Tang,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Micro-Bending Testing of Electrodeposited Gold for Applications as Movable Components in MEMS Devices",,"Microelectronic Engineering",,"Vol. 180",,"pp. 15-19",2017,June
"Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","FEM Simulation on Structure Stability of Ti/Au Multi-Layered Cantilevers with Various Dimensions for Applications as Movable Structures in MEMS Devices","21th International Conference on Solid State Ionics",,,,,,2017,June
"Masato Sone,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu","非侵襲性高感度医用デバイスのための貴金属材料の作製とその材料評価","第63回 国立大学共同利用・共同研究拠点 知の拠点セミナー","第63回 国立大学共同利用・共同研究拠点 知の拠点セミナー",,,,,2017,June
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Koichiro Tachibana,Minami Teranishi,Chun-Yi Chen,Tso-Fu Mark Chang,Masato Sone,Katsuyuki Machida,Kazuya Masu","Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technology","The 19th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2017)",,,,,"pp. 2187-2190",2017,June
"Motohiro Takayasu,Toshiaki Gonda,Toshifumi Konishi,Daisuke Yamane,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","人体振動測定のためのMEMS慣性センサを用いたモジュールの検討","LSIとシステムのワークショップ2017",,,,,,2017,May
"Masaharu Yoshiba,Chun-Yi Chen,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Deformation Behavior of Electroplated Gold Composed of Nano-Columnar Grains Embedded in Micro-Columnar Textures",,"Materials Letters",,"Vol. 202",,"pp. 82-85",2017,May
"Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Masato Sone,Katsuyuki Machida,Yoshihiro Miyake,Kazuya Masu","MEMS inertial sensors for biomedical applications","12th Annual IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2017)",,,,,,2017,Apr.
"Sari Yanagida,Tso-Fu Mark Chang,Chun-Yi Chen,Takashi Nagoshi,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Tensile Tests of Micro-Specimens Made of Electroplated Gold",,"Microelectronics Engineering",,"Vol. 174",,"pp. 6-10",2017,Apr.
"Hideaki Nakajima,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices","IEEE-NEMS 2017","IEEE-NEMS 2017",,,,,2017,Apr.
"Hao-Chun Tang,Chun-Yi Chen,Masaharu Yoshiba,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","High-Strength Electroplated Au-Cu Alloys as Micro-components in MEMS Devices",,"Journal of The Electrochemical Society",,"Vol. 164","No. 4","pp. D244-D247",2017,Apr.
"Chun-Yi Chen,Hao-Chun Tang,Masaharu Yoshiba,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Preparation and Characterization of Au-Cu Alloy Films for MEMS Accelerometer","21st Topical Meeting of the International Society of Electrochemistry",,,,,,2017,Apr.
"Takuma Suzuki,Tso-Fu Mark Chang,Chun Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","積層メタル技術によるTi/Auマイクロカンチレバーの疲労特性の検討","応用物理学会 2017年春季講演会","応用物理学会 2017年春季講演会",,,,"p. 14p-P3-12",2017,Mar.
"Teruaki Safu,Toshifumi Konishi,Daisuke Yamane,Hiroshi Toshiyoshi,Masato Sone,Kazuya Masu,Katsuyuki Machida","積層メタル技術による3軸MEMS加速度センサのばね定数設計方法","応用物理学会 2017年春季講演会","応用物理学会 2017年春季講演会",,,,"p. 14p-P3-17",2017,Mar.
"Tomoki Iizuka,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","振動型エネルギーハーベスティングデバイスのためのSPICE系統合設計の検討","第64回応用物理学会春季学術講演会",,,,,"p. 14p-P3-13",2017,Mar.
"Motohiro Takayasu,Toshiaki Gonda,Daisuke Yamane,Hiroyuki Ito,Toshifumi Konishi,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A study of module using MEMS accelerometer by multi-layer metal technology","The 64th JSAP Spring Meeting, 2017",,,,,,2017,Mar.
"Toshiaki Gonda,Motohiro Takayasu,Daisuke Yamane,Hiroyuki Ito,Toshifumi Konishi,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Measurement-System using Vehicle-Control for Inertial Sensors","第64回応用物理学会春季学術講演会",,,,,"p. 14p-P3-19",2017,Mar.
"Tso-Fu Mark Chang,Toshifumi Konishi,Teruaki Safu,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Tso-Fu Mark Chang,Masato Sone,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","積層メタル技術によるTi/Auめっき構造体のヤング率評価（１）","応用物理学会 2017年春季講演会","応用物理学会 2017年春季講演会",,,,"p. 14p-P3-14",2017,Mar.
"Takuma Suzuki,Tso-Fu Mark Chang,Chun Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","積層メタル技術によるTi/Auマイクロカンチレバーの温度依存性のシミュレーションの検討","応用物理学会 2017年春季講演会","応用物理学会 2017年春季講演会",,,,"p. 14p-P3-11",2017,Mar.
"Katsuyuki Machida,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Tso-Fu Mark Chang,Kazuya Masu,Masato Sone","積層メタル技術によるTi/Auめっき構造体のヤング率評価（2）","応用物理学会 2017年春季講演会","応用物理学会 2017年春季講演会",,,,"p. 14p-P3-15",2017,Mar.
"Toshifumi Konishi,Daisuke Yamane,Teruaki Safu,Masato Sone,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","積層メタル技術を用いたMEMS慣性センサにおける粘性定数の検討","応用物理学会 2017年春季講演会","応用物理学会 2017年春季講演会",,,,"p. 14p-P3-16",2017,Mar.
"Onishi, S.,Joon, C. Y.,Ishida, M.,Sawada, K.,Ishii, H.,Katsuyuki Machida,Kazuya Masu,Nikaido, Y.,Saito, M.,Yoshida, S.","Detection of Bacterial Fluorescence by the Combination of MEMS Microfluidic Chip and Si Photodetector toward On-chip Biological Sensing","Symposium on Semiconductor Process Integration 10 held during the 232nd Meeting of the Electrochemical-Society (ECS)","SEMICONDUCTOR PROCESS INTEGRATION 10","ELECTROCHEMICAL SOC INC","Vol. 80","No. 4","pp. 157-164",2017,
"Masato Sone,Mark Chang,Chun-Yi Chen,Daisuke Yamane,Kazuya Masu,Katsuyuki Machida","微小電気機械システムのための超臨界流体を用いた金属皮膜形成技術 （招待講演）","第6回CSJ化学フェスタ","第6回CSJ化学フェスタ","日本化学会",,,,2016,Nov.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroshi Toshiyoshi,Masato Sone,Kazuya Masu,Katsuyuki Machida","Evaluation and Modeling of Adhesion Layer in Shock-Protection Structure for MEMS Accelerometer",,"Microelectronics Reliability",,"Vol. 66",,"pp. 78-84",2016,Nov.
"Masaharu Yoshiba,Mark Chang,Chun Yi Chen,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone,Takashi Nagoshi","高感度MEMS加速度センサー用金電気めっきの変形挙動および強度の結晶方位依存性評価","第３３回「センサ・マイクロマシンと応用システム」シンポジウム","第３３回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,2016,Oct.
"Yusuke Nishimura,Makoto Ishida,Kazuaki Sawada,Hiromu Ishii,Katsuyuki Machida,Kazuya Masu,Changle  Wang,Kenichiro Iida,Mitsumasa Saito,Shinichi Yoshida,Shinichi Yoshida","マイクロ流路チップを用いたレジオネラ・ニューモフィラとレジオネラ・デュモフィのストレス応答の観測","第8回集積化MEMSシンポジウム",,,,,"p. 25am2-PM-019",2016,Oct.
"Toshifumi Konishi,Daisuke Yamane,Teruaki Safu,Masato Sone,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A Damping Constant Model for Proof-Mass Structure Design of MEMS Inertial Sensor by Multi-Layer Metal Technology","IEEE Sensors 2016","IEEE Proceeding",,,,"pp. 1162-1164",2016,Oct.
"Toshifumi Konishi,Daisuke Yamane,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","マルチフィジクスシミュレーションを用いたCMOS-MEMS慣性センサのノイズ解析手法","第8回集積化MEMSシンポジウム",,,,,"p. 25am2-PM-007",2016,Oct.
"Teruaki Safu,Toshifumi Konishi,Daisuke Yamane,Hiroshi Toshiyoshi,Masato Sone,Kazuya Masu,Katsuyuki Machida","積層メタル技術によるMEMS加速度センサのばね定数設計方法","第8回集積化MEMSシンポジウム",,,,,"p. 25pm4-PM-008",2016,Oct.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Masato Sone,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","Sub-1mG検出へ向けた積層メタルMEMS慣性センサ","第8回集積化MEMSシンポジウム",,,,,"p. 25am2-PM-001",2016,Oct.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Masato Sone,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","差動型積層メタルMEMS加速度センサの検討","第8回集積化MEMSシンポジウム",,,,,"p. 25am2-PM-003",2016,Oct.
"Toshiaki Gonda,Motohiro Takayasu,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Study of Inertial Sensor Module with MEMS Accelerometers by Multi-layer Metal Technology","集積化MEMSシンポジウム",,,,,"p. 25pm4-PM-006",2016,Oct.
"Motohiro Takayasu,Shiro Dosho,Hiroyuki Ito,Noboru Ishihara,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu","A high-resolution capacitive sensor circuit using RC oscillator","第8回 集積化MEMSシンポジウム",,,,,,2016,Oct.
"Keisuke Asano,Hao-Chun Tang,Mark Chang,Chun Yi Chen,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone,Takashi Nagoshi","微小曲げ試験による金めっきで作製した微小カンチレバーの機械的特性評価","第３３回「センサ・マイクロマシンと応用システム」シンポジウム","第３３回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,2016,Oct.
"Sari Yanagida,Mark Chang,Chun Yi Chen,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone,Takashi Nagoshi","微小引張試験片を用いたMEMS用金めっき材料の機械的特性の評価","第３３回「センサ・マイクロマシンと応用システム」シンポジウム","第３３回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,2016,Oct.
"Minami Teranishi,Mark Chang,Chun Yi Chen,Daisuke Yamane,Kazuya Masu,Masato Sone,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi","電解金めっき法により作製した金/チタン積層構造を有する微小カンチレバーの構造安定性の評価","第３３回「センサ・マイクロマシンと応用システム」シンポジウム","第３３回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,2016,Oct.
"Chun-Yi Chen,Masaharu Yoshiba,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Fine Grained Au Films with Controllable Mechanical Strength by Pulse Plating","The 2016 PRiME Meeting",,,,,,2016,Oct.
"曽根正人,Tso-Fu Mark Chang,陳君怡,山根大輔,益一哉,町田克之","高感度MEMS加速度センサーのための金めっき材料の合成とその機械的特性評価 （招待講演）","日本学術振興会・第172委員会","日本学術振興会・第172委員会",,,,,2016,Oct.
"Sari Yanagida,Tso-Fu Mark Chang,Chun-Yi Chen,Takashi Nagoshi,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Mechanical Behaviour of Electroplated Gold Evaluated by Micro-Tensile Test for Application in MEMS Accelerometer","MNE2016, 42nd Micro& Nano Engineering","MNE2016, 42nd Micro& Nano Engineering",,,,,2016,Sept.
"Chun-Yi Chen,Masaharu Yoshiba,Haochun Tang,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","High Strength Au film Fabricated by Advanced Electrochemical Technique in Supercritical CO2 Emulsified Electrolyte for MEMS Accelerometers","Separation Techniques 2016,2nd International Conference and Expo on Separation Techniques","Separation Techniques 2016",,,,,2016,Sept.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroshi Toshiyoshi,Masato Sone,Kazuya Masu,Katsuyuki Machida","A Spring Design for Tri-axis MEMS Accelerometer by Multi-layer Metal Technology","2016 Int. Conf. on Solid State Devices and Materials (SSDM 2016)",,,,,"pp. 485-486",2016,Sept.
"Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","High Mechanical Strength in Gold Films Electroplated with Supercritical Carbon Dioxide for MEMS Applications","第77回応用物理学会秋季学術講演会",,,,,"pp. 15a-B10-13",2016,Sept.
"Teruaki Safu,Toshifumi Konishi,Daisuke Yamane,Hiroshi Toshiyoshi,Masato Sone,Kazuya Masu,Katsuyuki Machida","積層メタル技術によるMEMS加速度センサのばね定数設計方法（I）","第77回応用物理学会秋季学術講演会",,,,,"pp. 15p-B10-8",2016,Sept.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Masato Sone,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","Sub-1mG検出へ向けた積層メタルMEMS慣性センサ","第77回応用物理学会秋季学術講演会",,,,,"pp. 14p-P5-2",2016,Sept.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Masato Sone,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","積層メタル差動型MEMS加速度センサの基礎検討","第77回応用物理学会秋季学術講演会",,,,,"pp. 14p-P5-3",2016,Sept.
"Toshifumi Konishi,Daisuke Yamane,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","CMOS-MEMS慣性センサにおける機械的ノイズの解析手法","第77回応用物理学会秋季学術講演会",,,,,"pp. 14p-P5-1",2016,Sept.
"Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Enhanced mechanical property of metallic films with supercritical carbon dioxide for micro-electrical-mechanical system accelerometer","The 15th Symposium on Development of Supercritical Fluid Technology and Application and The 2nd International Workshop on Supercritical Fluid Dyeing Technology",,,,,,2016,Sept.
"Keisuke Asano,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Micro-Bending Tests of Pure Gold Cantilevers for Applications as Movable Components in MEMS Devices","MNE2016, 42nd Micro& Nano Engineering","MNE2016, 42nd Micro& Nano Engineering",,,,,2016,Sept.
"Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Enhancement of Mechanical Properties in Au Films Electroplated with Supercritical Carbon Dioxide","MNE2016, 42nd Micro& Nano Engineering","MNE2016, 42nd Micro& Nano Engineering",,,,,2016,Sept.
"Kazuya Masu,Daisuke Yamane,Katsuyuki Machida,Masato Sone,Yoshihiro Miyake","Development of High Sensitivity CMOS-MEMS Inertia Sensor and its Application to Early-Stage Diagnosis of Parkinson's Disease","the 46th European Solid-State Device Research Conference (ESSDERC)","the 46th European Solid-State Device Research Conference (ESSDERC)",,,,"pp. 99-104",2016,Sept.
"Hao-chun Tang,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Enhancement of Mechanical Strength in Au Films Electroplated with Supercritical Carbon Dioxide",,"Electrochemistry Communications",,"Vol. 72",,"pp. 126-130",2016,Sept.
"Masaharu Yoshiba,Chun-Yi Chen,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Controllable Mechanical Properties of Au Films by Pulse Electroplating for MEMS Accelerometer","MNE2016, 42nd Micro& Nano Engineering","MNE2016, 42nd Micro& Nano Engineering",,,,,2016,Sept.