"Daisuke Yamane,Toshifumi Konishi,Takaaki Matsushima,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A 1mG-to-20G Integrated MEMS Inertial Sensor","IEEE SENSORS 2014",,,,,"pp. 1591-1594",2014,Nov.
"Daisuke Yamane,Katsuyuki Machida,Kazuya Masu","MEMS for sensing sub-1G","The First Joint Workshop on Electrical Engineering between Tokyo Tech &",,,,,"pp. 19",2014,Nov.
"Takaaki Matsushima,Toshifumi Konishi,Daisuke Yamane,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A MEMS Energy Harvesting Device for Integrated CMOS-MEMS Technology","27th Int. Microprocesses and Nanotechnology Conference (MNC 2014)",,,,,"pp. 6C-5-5",2014,Nov.
"Daisuke Yamane,Toshifumi Konishi,Takaaki Matsushima,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","集積化ＣＭＯＳ?ＭＥＭＳ技術によるＳｕｂ-１Ｇ加速度センサの基礎検討","第６回集積化ＭＥＭＳシンポジウム",,,,,,2014,Oct.
"Toshifumi Konishi,Takaaki Matsushima,Daisuke Yamane,Kazuya Masu,Hiroshi Toshiyoshi,Katsuyuki Machida","回路シミュレータを用いたＭＥＭＳエネルギーハーベスティングデバイスの検討","第６回集積化ＭＥＭＳシンポジウム",,,,,,2014,Oct.
"Yusuke Nishimura,Ryuhei Hayashi,Hirokazu Nakazawa,Makoto Ishida,Kazuaki Sawada,Hiromu Ishii,Katsuyuki Machida,Kazuya Masu,Changle  Wang,Kenichiro Iida,Mitsumasa Saito,Shinichi Yoshida","マイクロビーズを用いたPDMS製マイクロ流路チップへのレジオネラ菌捕獲の検討","応用物理学会集積化MEMS技術研究会 第6回集積化MEMSシンポジウム",,,,,"p. 22pm1-C1",2014,Oct.
"Takaaki Matsushima,Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","Ａｕ積層形成技術による３軸ＭＥＭＳ加速度センサの検討","第６回集積化ＭＥＭＳシンポジウム",,,,,,2014,Oct.
"Daisuke Yamane,Toshifumi Konishi,Takaaki Matsushima,Shota Kamei,Kazuya Masu,Katsuyuki Machida","高感度静電容量型センサにおけるブラウニアン・ノイズ評価の検討","第６回集積化ＭＥＭＳシンポジウム",,,,,,2014,Oct.
"Takaaki Matsushima,Toshifumi Konishi,Daisuke Yamane,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","積層メタル構造による３軸加速度センサの検討","第７５回応用物理学会秋季学術講演会",,,,,"pp. 13-066",2014,Sept.
"Toshifumi Konishi,Takaaki Matsushima,Daisuke Yamane,Kazuya Masu,Hiroshi Toshiyoshi,Katsuyuki Machida","A Novel Electromechanical Model of a MEMS Energy Harvesting Device for a Multi-physics Simulation Platform on a Circuit Simulator","International Conference on Solid State Devices and Materials",,,,,"p. 100-101",2014,Sept.
"Yusuke Nishimura,Ryuhei Hayashi,Hirokazu Nakazawa,Makoto Ishida,Kazuaki Sawada,Hiromu Ishii,Katsuyuki Machida,Kazuya Masu,Kenichiro Iida,Mitsumasa Saito,Shinichi Yoshida","ビーズを用いたPDMS製細菌捕獲チップの検討? -蛍光強度の時間依存性 蛍光強度の時間依存性-","第75回応用物理学会秋季学術講演会",,,,,"pp. 13-101",2014,Sept.
"Daisuke Yamane,Toshifumi Konishi,Takaaki Matsushima,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A Sub-1G Tri-axis MEMS Capacitive Sensor for Integrated CMOS-MEMS Accelerometers","International Conference on Solid State Devices and Materials",,,,,"p. 974-975",2014,Sept.
"Toshifumi Konishi,Daisuke Yamane,Takaaki Matsushima,Kazuya Masu,Hiroshi Toshiyoshi,Katsuyuki Machida","エネルギーハーべスティングデバイスの検討（４）","第７５回応用物理学会秋季学術講演会",,,,,"pp. 13-067",2014,Sept.
"Shota Kamei,Daisuke Yamane,Toshifumi Konishi,Takaaki Matsushima,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","集積化CMOS?MEMS加速度センサへ向けたsub-1G静電容量型センサの検討","第７５回応用物理学会秋季学術講演会",,,,,"pp. 13-065",2014,Sept.
"Daisuke Yamane,Shota Kamei,Toshifumi Konishi,Takaaki Matsushima,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","集積化CMOS-MEMS加速度センサへ向けたsub-1Gセンサ","応用物理学会集積化ＭＥＭＳ技術研究会 第５回集積化ＭＥＭＳ技術研究ワークショップ",,,,,"pp. P4",2014,July
"Yusuke Nishimura,Ryuhei Hayashi,Hirokazu Nakazawa,Makoto Ishida,Kazuaki Sawada,Hiromu Ishii,Katsuyuki Machida,Kazuya Masu,Changle  Wang,Kenichiro Iida,Mitsumasa Saito,Shinichi Yoshida","マイクロビーズとPDMS製マイクロ流路を用いたレジオネラ菌捕獲チップの検討","応用物理学会集積化MEMS技術研究会 第5回集積化MEMS技術研究ワークショップ",,,,,"p. 8",2014,July
"Toshifumi Konishi,Daisuke Yamane,Takaaki Matsushima,Kazuya Masu,Hiroshi Toshiyoshi,Katsuyuki Machida","マルチフィジックスシミュレータを用いたCMOS-MEMS加速度センサの検討","応用物理学会集積化ＭＥＭＳ技術研究会 第５回集積化ＭＥＭＳ技術研究ワークショップ",,,,,"pp. P7",2014,July
"Takaaki Matsushima,Toshifumi Konishi,Daisuke Yamane,Shota Kamei,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","積層メタルによる静電容量型3軸加速度センサの基礎検討","応用物理学会集積化ＭＥＭＳ技術研究会 第５回集積化ＭＥＭＳ技術研究ワークショップ",,,,,"pp. P5",2014,July
"Daisuke Yamane,Toshifumi Konishi,Takaaki Matsushima,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","A Sub-1G Capacitive Sensor for Integrated CMOS-MEMS Accelerometers","7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT2014)",,,,,"pp. P2-55",2014,June
"Yusuke Shiino,Hiroyuki Ito,Taku Fujiwara,Noboru Ishihara,Hisashi Yamanouchi,Hiroki Tanabe,Satoshi Nomura,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu","An Ultra Low Power pH-Monitoring IC with a Duty-Cycling Wireless FM-Transmitter","The 2014 IEEE International Symposium on Circuits and Systems (ISCAS)",,,,,,2014,June
"R. Hayashi,Y. Nishimura,H. Nakazawa,M. Ishida,K. Sawada,H. Ishii,K. Machida,N. Ishihara,K. Masu,C. Wang,K. Iida,M. Saito,S. Yoshida","PDMA-Based Microfluidic Chip for Detection of Legionella pneumophila by Mixing with Microbeads","The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT)",,,,,,2014,June
"Katsuyuki Machida,Toshifumi Konishi,Daisuke Yamane,Hiroshi Toshiyoshi,Kazuya Masu","Integrated CMOS-MEMS Technology and Its Applications",,"ECS Transactions","The Electrochemical Society","volume 61","no. 6","pp. 21-39",2014,May
"Katsuyuki Machida,Toshifumi Konishi,Daisuke Yamane,Hiroshi Toshiyoshi,Kazuya Masu","Integrated CMOS-MEMS Technology and its Application","The 2nd Int. Symp. on More-than-Moore, the 225th Meeting of the Electrochemical Society",,,,,,2014,May
"Daisuke Yamane,Toshifumi Konishi,Takaaki Matsushima,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","A Tri-Axis MEMS Capacitive Sensor Using Multi-Layered High-density Metal for an Integrated CMOS-MEMS Accelerometer","2014 IEEE International Interconnect Technology Conference/Advanced Metallization Conference  (IITC/AMC 2014)",,,,,"pp. 113-116",2014,May
"Daisuke Yamane,Takaaki Matsushima,Toshifumi Konishi,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","集積化CMOS-MEMSへ向けた2軸加速度センサの基礎検討","平成２６年電気学会センサ・マイクロマシン部門総合研究会",,,,,"pp. MSS-14-002",2014,May
"Daisuke Yamane,Takaaki Matsushima,Toshifumi Konishi,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","A Dual-Axis MEMS Inertial Sensor Using Multi-Layered High-density Metal for an Arrayed CMOS-MEMS Accelerometer","Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP2014)",,,,,"pp. 69-72",2014,Apr.
"Toshifumi Konishi,Daisuke Yamane,Takaaki Matsushima,Kazuya Masu,Katsuyuki Machida,Hiroshi Toshiyoshi","A capacitive CMOS-MEMS sensor designed by multi-physics simulation for integrated CMOS-MEMS technology",,"Japanese Journal of Applied Physics",,"vol. 53",,"pp. 04EE15.1-7",2014,Mar.
"Daisuke Yamane,Toshifumi Konishi,Takaaki Matsushima,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","MEMS加速度センサによるSub-1G検出の基礎検討","平成２６年電気学会全国大会",,,,,,2014,Mar.
"Ken Kagaya,Toshifumi Konishi,Daisuke Yamane,Takaaki Matsushima,Hiroyuki Ito,Noboru Ishihara,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","エネルギーハーベスティングデバイスの検討（２）","第６１回応用物理学会春季学術講演会",,,,,,2014,Mar.
"Toshifumi Konishi,Ken Kagaya,Daisuke Yamane,Takaaki Matsushima,Hiroyuki Ito,Noboru Ishihara,Kazuya Masu,Katsuyuki Machida,Hiroshi Toshiyoshi","エネルギーハーベスティングデバイスの検討（３）","第６１回応用物理学会春季学術講演会",,,,,,2014,Mar.
"Daisuke Yamane,Toshifumi Konishi,Takaaki Matsushima,Hiroyuki Ito,Noboru Ishihara,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","Sub-1G MEMS加速度センサの検討","第６１回応用物理学会春季学術講演会",,,,,,2014,Mar.
"Hiroyuki Ito,Toshifumi Konishi,Takaaki Matsushima,Daisuke Yamane,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","RF受信機のためのアレイ型MEMS共振器ミキサの検討","第６１回応用物理学会春季学術講演会",,,,,,2014,Mar.
"Takaaki Matsushima,Toshifumi Konishi,Daisuke Yamane,Hiroyuki Ito,Noboru Ishihara,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","アレイ型ＭＥＭＳ加速度センサ-２軸ＭＥＭＳ加速度センサの検討-","第６１回応用物理学会春季学術講演会",,,,,,2014,Mar.
"Daisuke Yamane,Toshifumi Konishi,Takaaki Matsushima,Katsuyuki Machida,Hiroshi Toshiyoshi,Kazuya Masu","Design of sub-1g microelectromechanical systems accelerometers",,"Applied Physics Letters",,"Vol. 104","No. 7","pp. 74102",2014,Feb.
"Toshifumi Konishi,Daisuke Yamane,Takaaki Matsushima,Kazuya Masu,Katsuyuki Machida,Hiroshi Toshiyoshi","An arrayed accelerometer device of a wide range of detection for integrated CMOS-MEMS technology",,"Japanese Journal of Applied Physics",,"Vol. 53",,"pp. 27202",2014,Jan.