"Y. Nishimura,M. Ishida,K. Sawada,H. Ishii,K. Machida,K. Masu,C. Wang,K. Iida,M. Saito,S. Yoshida","Stress Responses of Bacteria, Legionella, Confined in MEMS Microfluidic Chip","9th Int’l Symp. on Nanomedicine (ISNM2015)",,,,,,2015,Dec.
"Daisuke Yamane,Toshifumi Konishi,Motohiro Takayasu,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A Sub-1G CMOS-MEMS Accelerometer","IEEE Sensors 2015",,,,,"pp. 513-516",2015,Nov.
"Masaharu Yoshiba,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Micro-Mechanical Properties of Electrodeposited Gold Thin Films","TACT 2015 International Thin Films Conference","TACT 2015 International Thin Films Conference",,,,,2015,Nov.
"Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","Sub-1G?20G集積化MEMS慣性センサ","第7回集積化MEMSシンポジウム",,,,,"pp. 29pm3-PM-2",2015,Oct.
"Teruaki Safu,Toshifumi Konishi,Takaaki Matsushima,Daisuke Yamane,Hiroshi Toshiyoshi,Masato Sone,Kazuya Masu,Katsuyuki Machida","MEMS加速度センサのための金属構造体の密着力評価","第7回集積化MEMSシンポジウム",,,,,"pp. 29pm3-PM-5",2015,Oct.
"Y. Nishimura,M. Ishida,K. Sawada,H. Ishii,K. Machida,K. Masu,C. Wang,K. Iida,M. Saito,S. Yoshida","Observation of Stress Responses of Bacteria Confined in a MEMS Microfluidic Chip",,"ECS Trans.",,"Vol. 69","No. 10","pp. 259-267",2015,Oct.
"Yusuke Nishimura,Makoto Ishida,Kazuaki Sawada,Hiromu Ishii,Katsuyuki Machida,Kazuya Masu,Changle  Wang,Kenichiro Iida,Mitsumasa Saito,Shinichi Yoshida","Stress responses of bacteria confined in microfluidic chips","第7回集積化MEMSシンポジウム",,,,,"pp. 30pm1-D-3",2015,Oct.
"Y. Nishimura,M. Ishida,K. Sawada,H. Ishii,K. Machida,K. Masu,C. Wang,K. Iida,M. Saito,S. Yoshida","Observation of Stress Responses of Bacteria Confined in a MEMS Microfluidic Chip","The 228th Electrochemical Society Fall Meeting",,,,,,2015,Oct.
"Toshifumi Konishi,Daisuke Yamane,Motohiro Takayasu,Hiroyuki Ito,Noboru Ishihara,Kazuya Masu,Hiroshi Toshiyoshi,Katsuyuki Machida,Katsuyuki Machida","マルチフィジクスシミュレーションを用いたCMOS-MEMS 加速度センサのためのゲイン制御センサ回路の検討","第7回集積化MEMSシンポジウム",,,,,"pp. 29pm2-D-4",2015,Oct.
"Motohiro Takayasu,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","移動体制御における慣性センサ適用性の検討","第7回 集積化MEMSシンポジウム",,,,,,2015,Oct.
"Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A Low Mechanical Noise Tri-axis MEMS Ineretial Sensor Fabricated by Multi-layered Metal Technology","41st Micro and Nano Engineering (MNE2015)",,,,,"pp. Wed-C-p11",2015,Sept.
"Yusuke Nishimura,Makoto Ishida,Kazuaki Sawada,Hiromu Ishii,Katsuyuki Machida,Kazuya Masu,Changle  Wang,Kenichiro Iida,Mitsumasa Saito,Shinichi Yoshida","ビーズを用いたPDMS製細菌捕獲チップの検討? -紫外光照射によるレジオネラの光応答の観測-","第76回応用物理学会秋季学術講演会",,,,,"pp. 14a-1C-10",2015,Sept.
"Daisuke Yamane,Toshifumi Konishi,Motohiro Takayasu,Teruaki Safu,Hiroshi Toshiyoshi,Masato Sone,Kazuya Masu,Katsuyuki Machida","Robustness of Integrated Stoppers for MEMS Accelerometer Fabricated by Multi-layered Metal Technology","SSDM2015, 2015 International Conference on Solod State Devices and Materials","SSDM2015, 2015 International Conference on Solod State Devices and Materials",,,,"pp. 786-787",2015,Sept.
"Teruaki Safu,Toshifumi Konishi,Takaaki Matsushima,Daisuke Yamane,Hiroshi Toshiyoshi,Masato Sone,Kazuya Masu,Katsuyuki Machida","MEMS加速度センサのための金属構造体の密着力評価","第76回応用物理学会秋季学術講演会",,,,,"pp. 15a-PB4-3",2015,Sept.
"Toshifumi Konishi,Daisuke Yamane,Motohiro Takayasu,Hiroyuki Ito,Noboru Ishihara,Kazuya Masu,Hiroshi Toshiyoshi,Katsuyuki Machida,Katsuyuki Machida","ゲイン制御型CMOS-MEMS加速度センサ回路の検討","第76回応用物理学会秋季学術講演会",,,,,"pp. 15a-PB4-2",2015,Sept.
"Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","Sub-1G?20G集積化MEMS加速度センサの基本評価","第76回応用物理学会秋季学術講演会",,,,,"pp. 15a-PB4-3",2015,Sept.
"Daisuke Yamane,Toshifumi Konishi,Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Hiroshi Toshiyoshi,Kazuya Masu,Masato Sone,Katsuyuki Machida","A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology","25th Advanced Metallization Conference Asian Session (ADMETAplus2015)",,,,,,2015,Sept.
"Toshifumi Konishi,Daisuke Yamane,Motohiro Takayasu,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Kazuya Masu,Hiroshi Toshiyoshi,Katsuyuki Machida","Novel Gain-Controlled Sensor Circuits Designed by Multi-physics Simulation for CMOS-MEMS Accelerometer","2015 International Conference on Solid State Devices and Materials (SSDM 2015)",,,,,"pp. 798-799",2015,Sept.
"Chun-Yi Chen,Masaharu Yoshiba,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","High Mechanical Strength Gold Micro-Components Fabricated by Pulse Electroplating","MNE2015, 41th International Conference on Micro and Nano Engineering","MNE2015",,,,"pp. Wed-C-p5",2015,Sept.
"Masaharu Yoshiba,Chun-Yi Chen,Tso-Fu Mark Chang,Katsuyuki Machida,Daisuke Yamane,Kazuya Masu,Masato Sone","Sample Size Effect on Mechanical Properties of Electrodeposited Gold Evaluated by Micro-Compression Test","MNE2015, 41th International Conference on Micro and Nano Engineering","MNE2015",,,,"pp. Wed-C-p19",2015,Sept.
"Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","Structure Stability of High Aspect Ratio Ti/Au Two-Layered Cantilevers for Applications in MEMS Accelerometers","MNE2015, The 41th International Conference on Micro and Nano Engineering","MNE2015, The 41th International Conference on Micro and Nano Engineering",,,,"pp. Wed-C-p81",2015,Sept.
"Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","Study on Ti/Au Two-Layered Cantilevers with different Aspect Ratio for MEMS Devices","SSDM2015, 2015 International Conference on Solid State Devises and Materials","SSDM2015, 2015 International Conference on Solid State Devises and Materials",,,,"pp. 52-53",2015,Sept.
"Masaharu Yoshiba,Chun-Yi Chen,Tso-Fu Mark Chang,Katsuyuki Machida,Daisuke Yamane,Kazuya Masu,Masato Sone","Mechanical Properties of Electrodeposited Gold for Application in MEMS","SSDM2015, 2015 International Conference on Solid State Devises and Materials","SSDM2015, 2015 International Conference on Solid State Devises and Materials",,,,"pp. 48-49",2015,Sept.
"Daisuke Yamane,Toshifumi Konishi,Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Hiroshi Toshiyoshi,Kazuya Masu,Masato Sone,Katsuyuki Machida","A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology","AMC2015, Advanced Metallization Conference","AMC2015",,,,,2015,Sept.
"Daisuke Yamane,Kazuya Masu,Katsuyuki Machida","A Sub-1G MEMS Inertial Sensor","International Symposium for Advanced Materials Research (ISAMR 2015)",,,,,,2015,Aug.
"Masaharu Yoshiba,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Compression deformation of micro-components fabricated by FIB from gold electrodeposited films","International Symposium for Advanced Materials Research, ISAMR2015","ISAMR2015",,,,"pp. P13",2015,Aug.
"Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu","Nano-G metrology system and its biomedical applications by CMOS-MEMS technology","3rd Int'l Conf. on Integrative Biology","Biological Systems: Open Access","OMICS International Conferences","Volume 4",,"pp. 87",2015,Aug.
"Motohiro Takayasu,Daisuke Yamane,Toshifumi Konishi,Shota Kamei,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","慣性センサを用いた移動体制御の基礎検討","平成27年 電気学会 センサ・マイクロマシン部門総合研究会",,,,,,2015,July
"Minami Teranishi,Mark Chang,Daisuke Yamane,Toshifumi Konishi,Takaaki Matsushima,Hiroyuki Ito,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu,Masato Sone","電解金めっきで作製した微小カンチレバーの形状安定性評価","平成27年電気学会センサ・マイクロマシン部門総合研究会",,,,,"pp. 15-18",2015,July
"Minami Teranishi,Tso-Fu Mark Chang,Toshifumi Konishi,Takaaki Matsushima,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Hiroyuki Ito,Kazuya Masu,Masato Sone","電解金めっきで作製したMEMSデバイスにおける動作構造安定性","応用物理学会集積化MEMS技術研究会 第6回集積化MEMS技術研究ワークショップ",,,,,"p. 7",2015,July
"Daisuke Yamane,Toshifumi Konishi,Takaaki Matsushima,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A 0.1G-to-20G Integrated MEMS Inertial Sensor",,"Japanese Journal of Applied Physics","The Japan Society of Applied Physics","Volume 54","Number 8","pp. 087202.1-087202.4",2015,July
"Yusuke Nishimura,Makoto Ishida,Kazuaki Sawada,Hiromu Ishii,Katsuyuki Machida,Kazuya Masu,Changle  Wang,Kenichiro Iida,Mitsumasa Saito,Shinichi Yoshida","マイクロ流路内でのレジオネラ属菌のストレス応答","平成27年電気学会センサ・マイクロマシン部門総合研究会",,,,,,2015,July
"Motohiro Takayasu,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","MEMS慣性センサを用いた移動体制御の検討","第6回 集積化MEMS技術研究ワークショップ",,,,,,2015,July
"Minami Teranishi,Tso-Fu Mark Chang,Toshifumi Konishi,Masaki Yano,Katsuyuki Machida,Daisuke Yamane,Hiroyuki Ito,Kazuya Masu,Tatsuo Sato,Masato Sone","Stability of Movable Structure Formed by Au Electroplating for MEMS Devices","ICMAT2015 & IUMRS-ICA2015,","ICMAT2015 & IUMRS-ICA2015,",,,,,2015,June
"Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A Sub-1G MEMS Sensor","the 227th ECS Meeting",,,,,"pp. 1332",2015,May
"Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A Sub-1G MEMS Sensor",,"ECS Transactions","The Electrochemical Society","volume 66","No. 5","pp. 131-138",2015,May
"Daisuke Yamane,Takaaki Matsushima,Toshifumi Konishi,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A Dual-Axis MEMS Capacitive Inertial Sensor with High-Density Proof Mass",,"Microsystem Technologies","Springer Berlin Heidelberg","Vol. 22",,"pp. 459-464",2015,Apr.
"Katsuyuki Machida,Toshifumi Konishi,Daisuke Yamane,Hiroshi Toshiyoshi,Kazuya Masu","CMOS -MEMS -New Frontier of Multilevel Interconnect Technology-","2015 International Conference on Electronics Packaging and iMAPS All Asia Conference (ICEP-IAAC 2015)",,,,,"pp. 201",2015,Apr.
"Daisuke Yamane,Toshifumi Konishi,Takaaki Matsushima,Shota Kamei,Kazuya Masu,Katsuyuki Machida","An Evaluation Method of Brownian Noise in Highly Sensitive Capacitive Sensors",,"電気学会論文誌E（センサ・マイクロマシン部門誌）","一般社団法人 電気学会","vol. 135","no. 4","pp. 142-143",2015,Apr.
"Daisuke Yamane,Toshifumi Konishi,Takaaki Matsushima,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","Sub-1G検出可能な3軸MEMS加速度センサの基礎検討","平成27年電気学会全国大会",,,,,,2015,Mar.
"Toshifumi Konishi,Daisuke Yamane,Takaaki Matsushima,Kazuya Masu,Hiroshi Toshiyoshi,Katsuyuki Machida","エネルギーハーべスティングデバイスの検討（5）","第62回応用物理学会春季学術講演会",,,,,"p. 12-125",2015,Mar.
"Daisuke Yamane,Toshifumi Konishi,Takaaki Matsushima,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","Sub-1Gから20Gまで検知可能な集積化MEMS加速度センサの検討","第62回応用物理学会春季学術講演会",,,,,"p. 17-189",2015,Mar.
"Yusuke Nishimura,Ryuhei Hayashi,Hirokazu Nakazawa,Makoto Ishida,Kazuaki Sawada,Hiromu Ishii,Katsuyuki Machida,Kazuya Masu,Changle  Wang,Kenichiro Iida,Mitsumasa Saito,Shinichi Yoshida","ビーズを用いたPDMS製細菌捕獲チップの検討? -各種細菌の蛍光強度特性の時間依存性-","第62回応用物理学会春季学術講演会",,,,,"pp. 12-128",2015,Mar.