"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroshi Toshiyoshi,Masato Sone,Kazuya Masu,Katsuyuki Machida","Evaluation and Modeling of Adhesion Layer in Shock-Protection Structure for MEMS Accelerometer",,"Microelectronics Reliability",,"Vol. 66",,"pp. 78-84",2016,Nov.
"Masato Sone,Mark Chang,Chun-Yi Chen,Daisuke Yamane,Kazuya Masu,Katsuyuki Machida","微小電気機械システムのための超臨界流体を用いた金属皮膜形成技術 （招待講演）","第6回CSJ化学フェスタ","第6回CSJ化学フェスタ","日本化学会",,,,2016,Nov.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Masato Sone,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","Sub-1mG検出へ向けた積層メタルMEMS慣性センサ","第8回集積化MEMSシンポジウム",,,,,"p. 25am2-PM-001",2016,Oct.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Masato Sone,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","差動型積層メタルMEMS加速度センサの検討","第8回集積化MEMSシンポジウム",,,,,"p. 25am2-PM-003",2016,Oct.
"Toshiaki Gonda,Motohiro Takayasu,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Study of Inertial Sensor Module with MEMS Accelerometers by Multi-layer Metal Technology","集積化MEMSシンポジウム",,,,,"p. 25pm4-PM-006",2016,Oct.
"Chun-Yi Chen,Masaharu Yoshiba,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Fine Grained Au Films with Controllable Mechanical Strength by Pulse Plating","The 2016 PRiME Meeting",,,,,,2016,Oct.
"Motohiro Takayasu,Shiro Dosho,Hiroyuki Ito,Noboru Ishihara,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu","A high-resolution capacitive sensor circuit using RC oscillator","第8回 集積化MEMSシンポジウム",,,,,,2016,Oct.
"曽根正人,Tso-Fu Mark Chang,陳君怡,山根大輔,益一哉,町田克之","高感度MEMS加速度センサーのための金めっき材料の合成とその機械的特性評価 （招待講演）","日本学術振興会・第172委員会","日本学術振興会・第172委員会",,,,,2016,Oct.
"Keisuke Asano,Hao-Chun Tang,Mark Chang,Chun Yi Chen,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone,Takashi Nagoshi","微小曲げ試験による金めっきで作製した微小カンチレバーの機械的特性評価","第３３回「センサ・マイクロマシンと応用システム」シンポジウム","第３３回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,2016,Oct.
"Sari Yanagida,Mark Chang,Chun Yi Chen,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone,Takashi Nagoshi","微小引張試験片を用いたMEMS用金めっき材料の機械的特性の評価","第３３回「センサ・マイクロマシンと応用システム」シンポジウム","第３３回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,2016,Oct.
"Masaharu Yoshiba,Mark Chang,Chun Yi Chen,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone,Takashi Nagoshi","高感度MEMS加速度センサー用金電気めっきの変形挙動および強度の結晶方位依存性評価","第３３回「センサ・マイクロマシンと応用システム」シンポジウム","第３３回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,2016,Oct.
"Minami Teranishi,Mark Chang,Chun Yi Chen,Daisuke Yamane,Kazuya Masu,Masato Sone,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi","電解金めっき法により作製した金/チタン積層構造を有する微小カンチレバーの構造安定性の評価","第３３回「センサ・マイクロマシンと応用システム」シンポジウム","第３３回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,2016,Oct.
"Yusuke Nishimura,Makoto Ishida,Kazuaki Sawada,Hiromu Ishii,Katsuyuki Machida,Kazuya Masu,Changle  Wang,Kenichiro Iida,Mitsumasa Saito,Shinichi Yoshida,Shinichi Yoshida","マイクロ流路チップを用いたレジオネラ・ニューモフィラとレジオネラ・デュモフィのストレス応答の観測","第8回集積化MEMSシンポジウム",,,,,"p. 25am2-PM-019",2016,Oct.
"Toshifumi Konishi,Daisuke Yamane,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","マルチフィジクスシミュレーションを用いたCMOS-MEMS慣性センサのノイズ解析手法","第8回集積化MEMSシンポジウム",,,,,"p. 25am2-PM-007",2016,Oct.
"Toshifumi Konishi,Daisuke Yamane,Teruaki Safu,Masato Sone,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A Damping Constant Model for Proof-Mass Structure Design of MEMS Inertial Sensor by Multi-Layer Metal Technology","IEEE Sensors 2016","IEEE Proceeding",,,,"pp. 1162-1164",2016,Oct.
"Teruaki Safu,Toshifumi Konishi,Daisuke Yamane,Hiroshi Toshiyoshi,Masato Sone,Kazuya Masu,Katsuyuki Machida","積層メタル技術によるMEMS加速度センサのばね定数設計方法","第8回集積化MEMSシンポジウム",,,,,"p. 25pm4-PM-008",2016,Oct.
"Hao-chun Tang,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Enhancement of Mechanical Strength in Au Films Electroplated with Supercritical Carbon Dioxide",,"Electrochemistry Communications",,"Vol. 72",,"pp. 126-130",2016,Sept.
"Kazuya Masu,Daisuke Yamane,Katsuyuki Machida,Masato Sone,Yoshihiro Miyake","Development of High Sensitivity CMOS-MEMS Inertia Sensor and its Application to Early-Stage Diagnosis of Parkinson's Disease","the 46th European Solid-State Device Research Conference (ESSDERC)","the 46th European Solid-State Device Research Conference (ESSDERC)",,,,"pp. 99-104",2016,Sept.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroshi Toshiyoshi,Masato Sone,Kazuya Masu,Katsuyuki Machida","A Spring Design for Tri-axis MEMS Accelerometer by Multi-layer Metal Technology","2016 Int. Conf. on Solid State Devices and Materials (SSDM 2016)",,,,,"pp. 485-486",2016,Sept.
"Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","High Mechanical Strength in Gold Films Electroplated with Supercritical Carbon Dioxide for MEMS Applications","第77回応用物理学会秋季学術講演会",,,,,"pp. 15a-B10-13",2016,Sept.
"Teruaki Safu,Toshifumi Konishi,Daisuke Yamane,Hiroshi Toshiyoshi,Masato Sone,Kazuya Masu,Katsuyuki Machida","積層メタル技術によるMEMS加速度センサのばね定数設計方法（I）","第77回応用物理学会秋季学術講演会",,,,,"pp. 15p-B10-8",2016,Sept.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Masato Sone,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","Sub-1mG検出へ向けた積層メタルMEMS慣性センサ","第77回応用物理学会秋季学術講演会",,,,,"pp. 14p-P5-2",2016,Sept.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Masato Sone,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","積層メタル差動型MEMS加速度センサの基礎検討","第77回応用物理学会秋季学術講演会",,,,,"pp. 14p-P5-3",2016,Sept.
"Toshifumi Konishi,Daisuke Yamane,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","CMOS-MEMS慣性センサにおける機械的ノイズの解析手法","第77回応用物理学会秋季学術講演会",,,,,"pp. 14p-P5-1",2016,Sept.
"Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Enhanced mechanical property of metallic films with supercritical carbon dioxide for micro-electrical-mechanical system accelerometer","The 15th Symposium on Development of Supercritical Fluid Technology and Application and The 2nd International Workshop on Supercritical Fluid Dyeing Technology",,,,,,2016,Sept.
"Keisuke Asano,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Micro-Bending Tests of Pure Gold Cantilevers for Applications as Movable Components in MEMS Devices","MNE2016, 42nd Micro& Nano Engineering","MNE2016, 42nd Micro& Nano Engineering",,,,,2016,Sept.
"Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Enhancement of Mechanical Properties in Au Films Electroplated with Supercritical Carbon Dioxide","MNE2016, 42nd Micro& Nano Engineering","MNE2016, 42nd Micro& Nano Engineering",,,,,2016,Sept.
"Sari Yanagida,Tso-Fu Mark Chang,Chun-Yi Chen,Takashi Nagoshi,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Mechanical Behaviour of Electroplated Gold Evaluated by Micro-Tensile Test for Application in MEMS Accelerometer","MNE2016, 42nd Micro& Nano Engineering","MNE2016, 42nd Micro& Nano Engineering",,,,,2016,Sept.
"Masaharu Yoshiba,Chun-Yi Chen,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Controllable Mechanical Properties of Au Films by Pulse Electroplating for MEMS Accelerometer","MNE2016, 42nd Micro& Nano Engineering","MNE2016, 42nd Micro& Nano Engineering",,,,,2016,Sept.
"Chun-Yi Chen,Masaharu Yoshiba,Haochun Tang,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","High Strength Au film Fabricated by Advanced Electrochemical Technique in Supercritical CO2 Emulsified Electrolyte for MEMS Accelerometers","Separation Techniques 2016,2nd International Conference and Expo on Separation Techniques","Separation Techniques 2016",,,,,2016,Sept.
"Masato Sone,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu","Electrodeposited Gold for Next Generation MEMS Accelerometer Toward Medical Applications (Invited Lecture)","Integrative Biology-2016, International Conference on Integrative Biology Summit","Integrative Biology-2016","OMICS International",,,,2016,July
"Masaharu Yoshiba,Chun-Yi Chen,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Brittle Fracture of Electrodeposited Gold Observed by Micro-Compression",,"Materials Transactions",,"Vol. 57","No. 8","pp. 1257-1260",2016,July
"Yusuke Nishimura,Onishi Shuhei,Makoto Ishida,Kazuaki Sawada,Hiromu Ishii,Katsuyuki Machida,Kazuya Masu,Changle Wang,Mitsumasa Saito,Shinichi Yoshida","COMPARISON OF BACTERIAL STRESS RESPONSES BETWEEN LEGIONELLA PNEUMOPHILA AND LEGIONELLA DUMOFFII TRAPPED IN A MEMS MICROFLUIDIC CHIP","Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2016)",,,,,"pp. 87-88",2016,June
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A Novel MEMS Inertial Sensor With Out-of-plane Differential Sensing Structure By Multi-layer Metal Technology","Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2016)",,,,,"pp. 299-300",2016,June
"Chun-Yi Chen,Masaharu Yoshiba,Hao-Chun Tang,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Pulse Electroplating of Au Films with Ultra High Strength","229th ECS Meeting",,,,,,2016,May
"Motohiro Takayasu,Toshiaki Gonda,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","小型高感度MEMS慣性センサモジュールの試作評価","LSIとシステムのワークショップ2016",,,,,,2016,May
"Motohiro Takayasu,Daisuke Yamane,Toshifumi Konishi,Masakazu Sonobe,Takumi Kobayashi,Yamato Fukuta,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Kazuya Masu,Katsuyuki Machida","A study of railroad vehicle control by inertial sensors","11th World Congress on Railway Research (11th WCRR)",,,,,,2016,May
"Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A 1-mG MEMS Sensor","229th ECS Meeting",,,,,,2016,May
"Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A 1-mG MEMS Sensor",,"ECS Transactions",,"vol. 72","no. 3","pp. 7-14",2016,May
"Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","Mechanical Characteristics of Structure Stability with Ti/Au Micro-Cantilevers Formed by Au Electroplating","ISE - Topical Meeting","ISE - Topical Meeting",,,,,2016,Apr.
"Chun-Yi Chen,Masaharu Yoshiba,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Pulse Electroplating of Ultra-Fine Grained Au Films with High Compressive Strength",,"Electrochemistry Communications",,"Vol. 67",,"Page 51-54",2016,Apr.
"Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Katsuyuki Machida,Daisuke Yamane,Kazuya Masu,Masato Sone","Preparation and Characterization of Gold Films by Electroplating with Supercritical Carbon Dioxide","ISE - Topical Meeting","ISE - Topical Meeting",,,,,2016,Apr.
"Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","Structure Stability of High Aspect Ratio Ti/Au Two-Layer Cantilevers for Applications in MEMS Accelerometers",,"Microelectronics Engineering",,"Vol. 153",,"pp. 90-93",2016,Apr.
"Yota Ishizuka,Sari Yanagida,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","Electroplated Gold Materials with Enhanced Mechanical Strength by Multi-Layered Structure","ISE - Topical Meeting","ISE - Topical Meeting",,,,,2016,Apr.
"Masaharu Yoshiba,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Study of Gold Electroplating by Constant and Pulse Current Method with Non-Cyanide Gold Sulfite Electrolyte","ISE - Topical Meeting","ISE - Topical Meeting",,,,,2016,Apr.
"Chun-Yi Chen,Masaharu Yoshiba,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Pulse Electroplating of Ultra-Fine Grained Au Films with High Strength for Micro-Electrical-Mechanical System Devices","ISE - Topical Meeting","ISE - Topical Meeting",,,,,2016,Apr.
"Anky Liu,小西敏文,山根大輔,伊藤浩之,道正志郎,石原昇,町田克之,益一哉","CMOS低雑音オペアンプ設計法の検討","電子情報通信学会2016年総合大会",,,,,"pp. C-12-13",2016,Mar.
"Keisuke Asano,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","マイクロ曲げ試験による電析金薄膜の機械的特性評価","第63回応用物理学会春季学術講演会","第63回応用物理学会春季学術講演会",,,,,2016,Mar.
"Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","電解金めっきで作製したTi/Au微小カンチレバーの構造安定性","第63回応用物理学会春季学術講演会","第63回応用物理学会春季学術講演会",,,,,2016,Mar.
"Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Katsuyuki Machida,Daisuke Yamane,Kazuya Masu,Masato Sone","Application of Supercritical Carbon Dioxide in Electroplating of Gold Materials Used in MEMS Devices","第63回応用物理学会春季学術講演会","第63回応用物理学会春季学術講演会",,,,,2016,Mar.
"Yota Ishizuka,Sari Yanagida,Tso-Fu Mark Chang,Chun-Yi Chen,Toshihumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","マイクロ圧縮試験による金/チタン積層構造の機械的特性評価","第63回応用物理学会春季学術講演会","第63回応用物理学会春季学術講演会",,,,,2016,Mar.
"Masaharu Yoshiba,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","マイクロ圧縮試験によるMEMS用金電気めっきの機械的特性の評価","第63回応用物理学会春季学術講演会","第63回応用物理学会春季学術講演会",,,,,2016,Mar.
"Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","Sub-1G 検出へ向けた CMOS-MEMS 加速度センサの検討","第63回応用物理学会春季学術講演会",,,,,"pp. 21p-P17-18",2016,Mar.
"Toshifumi Konishi,Daisuke Yamane,Teruaki Safu,Hiroshi Toshiyoshi,Masato Sone,Kazuya Masu,Katsuyuki Machida","積層メタル構造を用いた MEMS 加速度センサのストッパーのロバスト性検討","第63回応用物理学会春季学術講演会",,,,,"pp. 21p-P17-17",2016,Mar.
"Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","Sub-1G検出へ向けた積層メタル3軸加速度センサの基礎検討","電子情報通信学会2016年総合大会",,,,,"pp. C-10-16",2016,Mar.
"Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A MEMS Inertia Sensor with Brownian Noise of Below 50 nG/Hz^1/2 by Multi-Layer Metal Technology","IEEE Inertial Sensors 2016",,,,,"pp. 148-149",2016,Feb.
"Daisuke Yamane,Konishi, T.,Safu, T.,Toshiyoshi, H.,Masato Sone,Kazuya Masu,Katsuyuki Machida","A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology",,"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016",,,,"pp. 419-422",2016,