"Tso-Fu Mark Chang,Chun-Yi Chen,Hao-Chun Tang,Masaharu Yoshiba,Takashi Nagoshi,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Fabrication and Characterization of High Strength Electrodeposited Gold toward High-Sensitive MEMS Inertial Sensors",,"Advances in Microelectronics Reviews","IFSA Publishing","Vol. 1",,"pp. 93-106",2017,Dec.
"Masato Sone,Haochun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu","Material Design of High Strength Electroplated Gold Alloy toward High-Sensitive MEMS Accelerometers","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Tso-Fu Mark Chang,Haochun Tang,Chun-Yi Chen,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Micro-Mechanical Property Enhancement of Metals Electroplated in Electrolyte Containing Supercritical CO2","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Takuma Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology","2017 MRS Fall Meeting",,,,,,2017,Nov.
"Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Ultrahigh Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests","2017 MRS Fall Meeting",,,,,,2017,Nov.
"Koichiro Tachibana,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Long-Term Vibration Testing of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology","2017 MRS Fall Meeting",,,,,,2017,Nov.
"Haochun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Strategies of Mechanical Strengthening in Electroplated  Au Materials","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Hirofumi Niijima,Motohiro Takayasu,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Novel Tri-Axis MEMS Accelerometer with a Single Au Proof Mass and Fully Differential Sensing Electrodes","The 30th International Microprocesses and Nanotechnology Conference",,,,,,2017,Nov.
"Toshifumi Konishi,Daisuke Yamane,Teruaki Safu,Chun Yi Chen,Tso-Fu Mark Chang,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Masato Sone,Katsuyuki Machida,Kazuya Masu,Shinichi Iida","Temperature Dependence on Package Sealing Ambient of MEMS Sensor Fabricated by Gold Electroplating","The 30th International Microprocesses and Nanotechnology Conference",,,,,,2017,Nov.
"Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","Sub-1mG Inertial Sensors by Multi-layer Metal Technology","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,"  F5-05",2017,Nov.
"Hideaki Nakajima,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Young’s Modulus Evaluation of Ti/Au Micro-Cantilevers by Au Electrodeposition","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Keisuke Asano,Haochun Tang,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Mechanical Strengthening of Gold Micro-Cantilever by Control of Electroplating Conditions","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Koichiro Tachibana,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Long-Term Vibration Test and Structure Stability of Ti/Au Micro-Cantilever as MEMS Components","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Takuma Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Temperature Structure Stability of Multi-Ti/Au-Layered Micro-Cantilever","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Ken Hashigata,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Defect-Free and Uniform Electroplating of Gold on Titanium Surface for Design of MEMS Components","TACT2017 International Thin Films Conference",,,,,,2017,Oct.
"大西  脩平,崔  容俊,Makoto Ishida,Kazuaki Sawada,Hitoshi Ishii,Katsuyuki Machida,Kazuya Masu,二階堂 靖彦,Mitsumasa Saito,Shinichi Yoshida","フォトゲート型蛍光センサを用いたレジオネラの蛍光観測","第9回集積化MEMSシンポジウム",,,,,,2017,Oct.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Koichiro Tachibana,Minami Teranishi,Chun Yi Chen,Tso-Fu Mark Chang,Masato Sone,Katsuyuki Machida,Kazuya Masu","積層メタルMEMS慣性センサの長期振動特性評価","第9回集積化MEMSシンポジウム",,,,,,2017,Oct.
"Toshifumi Konishi,Daisuke Yamane,Teruaki Safu,Masato Sone,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","積層メタル技術を用いたMEMS慣性センサの構造設計のための粘性定数モデルの検討","第9回集積化MEMSシンポジウム",,,,,,2017,Oct.
"Ippei Tsuji,Motohiro Takayasu,Hiroyuki Ito,Daisuke Yamane,Shiro Dosho,Toshifumi Konishi,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","積層メタル技術を用いたMEMS加速度センサの傾斜計応用の検討","第9回集積化MEMSシンポジウム",,,,,"  01pm1-A-6",2017,Oct.
"Hirofumi Niijima,Motohiro Takayasu,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","静電容量型MEMSセンサにおけるブラウニアン・ノイズ評価手法の検討(2)","第34回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,"  01am2-PLN-8",2017,Oct.
"Kosuke Orihara,Motohiro Takayasu,Shiro Dosho,Hiroyuki Ito,Daisuke Yamane,Toshifumi Konishi,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","発振型容量検出回路を用いたAu錘CMOS-MEMS加速度センサの検討","第34回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,"  31am3-PLN-2",2017,Oct.
"Tatsuya Koga,Ippei Tsuji,Motohiro Takayasu,Hiroyuki Ito,Daisuke Yamane,Shiro Dosho,Toshifumi Konishi,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","Inclining Angle Sensitivity Characteristics of MEMS Accelerometer Fabricated by Multi-Layer Metal Technology","The 9th Symposium on Integrated MEMS Technology",,,,,,2017,Oct.
"Shouta Otobe,Motohiro Takayasu,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Study of a Single Au Proof Mass and Segmented Electrodes for Tri-axis MEMS Accelerometer","The 34th SENSOR SYMPOSIUM",,,,,,2017,Oct.
"Motohiro Takayasu,Shiro Dosho,Hiroyuki Ito,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Noboru Ishihara,Kazuya Masu","A capacitive sensor circuit based on relaxation oscillator for MEMS inertial sensors","The 9th Symposium on Integrated MEMS Technology",,,,,,2017,Oct.
"Haochun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Utilization of supercritical carbon dioxide in the electrodeposition of Au films for MEMS application","TSCFA 2017 Annual Meeting",,,,,,2017,Oct.
"Shouta Otobe,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Tri-axis MEMS Accelerometer With a Gold Electroplated Single-proof-mass and Segmented Electrodes","2017 International Conference on Solid State Devices and Materials (SSDM 2017)",,,,,,2017,Sept.
"Ippei Tsuji,Motohiro Takayasu,Hiroyuki Ito,Daisuke Yamane,Shiro Dosho,Toshifumi Konishi,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","Tilt Characteristics of a MEMS Accelerometer fabricated by Multi-layer Metal Technology","2017 International Conference on Solid State Devices and Materials (SSDM 2017)",,,,,,2017,Sept.
"Motohiro Takayasu,Shiro Dosho,Hiroyuki Ito,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Noboru Ishihara,Kazuya Masu","A capacitive sensor circuit based on relaxation oscillator for sub-1mG MEMS inertial sensors","2017 International Conference on Solid State Devices and Materials (SSDM 2017)",,,,,,2017,Sept.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Koichiro Tachibana,Minami Teranishi,Chun Yi Chen,Tso-Fu Mark Chang,Masato Sone,Katsuyuki Machida,Kazuya Masu","A Study of Long-Term Vibration Characteristics of MEMS Accelerometers Fabricated by Au Electroplating","The 78th JSAP Autumn Meeting, 2017",,,,,,2017,Sept.
"Tatsuya Koga,Ippei Tsuji,Motohiro Takayasu,Hiroyuki Ito,Daisuke Yamane,Shiro Dosho,Toshifumi Konishi,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","Inclining Angle Sensitivity Characteristics of MEMS Inertial Sensor Fabricated by Multi-Layer Metal Technology","The 78th JSAP Autumn Meeting, 2017",,,,,,2017,Sept.
"Ippei Tsuji,Motohiro Takayasu,Hiroyuki Ito,Daisuke Yamane,Shiro Dosho,Toshifumi Konishi,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Tilt Sensor Using a High-Resolution MEMS Inertial Sensor Fabricated by Multi-Layer Metal Technology","The 78th JSAP Autumn Meeting, 2017",,,,,,2017,Sept.
"Motohiro Takayasu,Shiro Dosho,Hiroyuki Ito,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Noboru Ishihara,Kazuya Masu","A high-resolution capacitive sensor circuit for MEMS accelerometers","The 78th JSAP Autumn Meeting, 2017",,,,,,2017,Sept.
"Masaharu Yoshiba,Chun-Yi Chen,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Mechanical Property Anisotropy of Pure Gold Evaluated by Micro-compression Test","43rd International Conference on Micro & Nano Engineering (MNE2017)","MNE2017",,,,,2017,Sept.
"Minami Teranishi,Chun-Yi Chen,Tso-Fu Mark Chang,Toshifumi Konishi,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Structure Stability Enhancement of Gold Micro-Cantilever with a Constrained at Top and Bottom of the Fixed-End","43rd International Conference on Micro & Nano Engineering (MNE2017)","MNE2017",,,,,2017,Sept.
"Ken Hashigata,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Effects of Bi-Layered Au/Ti Structure on Mechanical Properties of Micro-Cantilever Evaluated by Micro-Bending Test Toward Applications in MEMS Devices","43rd International Conference on Micro & Nano Engineering (MNE2017)","MNE2017",,,,,2017,Sept.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Koichiro Tachibana,Minami Teranishi,Chun-Yi Chen,Tso-Fu Mark Chang,Masato Sone,Katsuyuki Machida,Kazuya Masu","LONG-TERM VIBRATION CHARACTERISTICS OF MEMS INERTIAL SENSORS BY MULTI-LAYER METAL TECHNOLOGY",,"Proceedings of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","IEEE Conference Publications",,,"pp. 2187 - 2190",2017,Aug.
"Hideaki Nakajima,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices",,"Proceedings of the 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","IEEE Conference Publications",,,"pp. 264 - 267",2017,Aug.
"Motohiro Takayasu,Shiro Dosho,Hiroyuki Ito,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Noboru Ishihara,Kazuya Masu","An evaluation of capacitive sensor circuit for MEMS accelerometers","第8回 集積化MEMS技術研究ワークショップ",,,,,,2017,July
"Chun-Yi Chen,Hao-Chun Tang,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Electrochemical Plating of Au-Cu Alloy Films for MEMS Sensor Applications","RACI National Centenary Conference",,,,,,2017,July
"Ippei Tsuji,Motohiro Takayasu,Hiroyuki Ito,Daisuke Yamane,Toshifumi Konishi,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Study on a High-Resolution MEMS Tilt Sensor Fabricated by Multi-layer Metal Technology","第8回 集積化MEMS技術研究ワークショップ",,,,,,2017,July
"Hao-chun Tang,Chun-yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Micro-Mechanical Property Evaluation of Electroplated Au-Cu Alloys toward Applications in MEMS Accelerometers","21th International Conference on Solid State Ionics, SSI-21","SSI-21",,,,,2017,June
"Masato Sone,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu","非侵襲性高感度医用デバイスのための貴金属材料の作製とその材料評価","第63回 国立大学共同利用・共同研究拠点 知の拠点セミナー","第63回 国立大学共同利用・共同研究拠点 知の拠点セミナー",,,,,2017,June
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Koichiro Tachibana,Minami Teranishi,Chun-Yi Chen,Tso-Fu Mark Chang,Masato Sone,Katsuyuki Machida,Kazuya Masu","Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technology","The 19th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2017)",,,,,"pp. 2187-2190",2017,June
"Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","FEM Simulation on Structure Stability of Ti/Au Multi-Layered Cantilevers with Various Dimensions for Applications as Movable Structures in MEMS Devices","21th International Conference on Solid State Ionics",,,,,,2017,June
"Keisuke Asano,Hao-Chun Tang,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Micro-Bending Testing of Electrodeposited Gold for Applications as Movable Components in MEMS Devices",,"Microelectronic Engineering",,"Vol. 180",,"pp. 15-19",2017,June
"Chun-Yi Chen,Hao-chun Tang,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Electroplated Au-based Materials with High Micro-mecchanical Properties as MEMS accelerometer Components","21th International Conference on Solid State Ionics, SSI-21","SSI-21",,,,,2017,June
"Motohiro Takayasu,Toshiaki Gonda,Toshifumi Konishi,Daisuke Yamane,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","人体振動測定のためのMEMS慣性センサを用いたモジュールの検討","LSIとシステムのワークショップ2017",,,,,,2017,May
"Masaharu Yoshiba,Chun-Yi Chen,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Deformation Behavior of Electroplated Gold Composed of Nano-Columnar Grains Embedded in Micro-Columnar Textures",,"Materials Letters",,"Vol. 202",,"pp. 82-85",2017,May
"Chun-Yi Chen,Hao-Chun Tang,Masaharu Yoshiba,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Preparation and Characterization of Au-Cu Alloy Films for MEMS Accelerometer","21st Topical Meeting of the International Society of Electrochemistry",,,,,,2017,Apr.
"Sari Yanagida,Tso-Fu Mark Chang,Chun-Yi Chen,Takashi Nagoshi,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Tensile Tests of Micro-Specimens Made of Electroplated Gold",,"Microelectronics Engineering",,"Vol. 174",,"pp. 6-10",2017,Apr.
"Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Masato Sone,Katsuyuki Machida,Yoshihiro Miyake,Kazuya Masu","MEMS inertial sensors for biomedical applications","12th Annual IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2017)",,,,,,2017,Apr.
"Hao-Chun Tang,Chun-Yi Chen,Masaharu Yoshiba,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","High-Strength Electroplated Au-Cu Alloys as Micro-components in MEMS Devices",,"Journal of The Electrochemical Society",,"Vol. 164","No. 4","pp. D244-D247",2017,Apr.
"Hideaki Nakajima,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices","IEEE-NEMS 2017","IEEE-NEMS 2017",,,,,2017,Apr.
"Tomoki Iizuka,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","振動型エネルギーハーベスティングデバイスのためのSPICE系統合設計の検討","第64回応用物理学会春季学術講演会",,,,,"p. 14p-P3-13",2017,Mar.
"Teruaki Safu,Toshifumi Konishi,Daisuke Yamane,Hiroshi Toshiyoshi,Masato Sone,Kazuya Masu,Katsuyuki Machida","積層メタル技術による3軸MEMS加速度センサのばね定数設計方法","応用物理学会 2017年春季講演会","応用物理学会 2017年春季講演会",,,,"p. 14p-P3-17",2017,Mar.
"Toshifumi Konishi,Daisuke Yamane,Teruaki Safu,Masato Sone,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","積層メタル技術を用いたMEMS慣性センサにおける粘性定数の検討","応用物理学会 2017年春季講演会","応用物理学会 2017年春季講演会",,,,"p. 14p-P3-16",2017,Mar.
"Katsuyuki Machida,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Tso-Fu Mark Chang,Kazuya Masu,Masato Sone","積層メタル技術によるTi/Auめっき構造体のヤング率評価（2）","応用物理学会 2017年春季講演会","応用物理学会 2017年春季講演会",,,,"p. 14p-P3-15",2017,Mar.
"Tso-Fu Mark Chang,Toshifumi Konishi,Teruaki Safu,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Tso-Fu Mark Chang,Masato Sone,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","積層メタル技術によるTi/Auめっき構造体のヤング率評価（１）","応用物理学会 2017年春季講演会","応用物理学会 2017年春季講演会",,,,"p. 14p-P3-14",2017,Mar.
"Takuma Suzuki,Tso-Fu Mark Chang,Chun Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","積層メタル技術によるTi/Auマイクロカンチレバーの疲労特性の検討","応用物理学会 2017年春季講演会","応用物理学会 2017年春季講演会",,,,"p. 14p-P3-12",2017,Mar.
"Takuma Suzuki,Tso-Fu Mark Chang,Chun Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","積層メタル技術によるTi/Auマイクロカンチレバーの温度依存性のシミュレーションの検討","応用物理学会 2017年春季講演会","応用物理学会 2017年春季講演会",,,,"p. 14p-P3-11",2017,Mar.
"Toshiaki Gonda,Motohiro Takayasu,Daisuke Yamane,Hiroyuki Ito,Toshifumi Konishi,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Measurement-System using Vehicle-Control for Inertial Sensors","第64回応用物理学会春季学術講演会",,,,,"p. 14p-P3-19",2017,Mar.
"Motohiro Takayasu,Toshiaki Gonda,Daisuke Yamane,Hiroyuki Ito,Toshifumi Konishi,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A study of module using MEMS accelerometer by multi-layer metal technology","The 64th JSAP Spring Meeting, 2017",,,,,,2017,Mar.
"Onishi, S.,Joon, C. Y.,Ishida, M.,Sawada, K.,Ishii, H.,Katsuyuki Machida,Kazuya Masu,Nikaido, Y.,Saito, M.,Yoshida, S.","Detection of Bacterial Fluorescence by the Combination of MEMS Microfluidic Chip and Si Photodetector toward On-chip Biological Sensing","Symposium on Semiconductor Process Integration 10 held during the 232nd Meeting of the Electrochemical-Society (ECS)","SEMICONDUCTOR PROCESS INTEGRATION 10","ELECTROCHEMICAL SOC INC","Vol. 80","No. 4","pp. 157-164",2017,