"Yuki Onishi,Ryunosuke Yamashita,Kenji Amaya,Yoshihiko Hirai","Resin Deformation Analysis in UV Imprint Considering UV Shrinkage, Thermal Deformation, and Thermochemical Kinetics","The 38th International Conference of Photopolymer Science and Technology (ICPST-38)",,,,,,2021,June "Yuki Onishi,Ryunosuke Yamashita,Kenji Amaya,Yoshihiko Hirai","Shape Deformation Analysis of UV Imprint Considering UV Curing/Shrinkage and Thermal Deformation Based on Reaction Kinetics","第26回計算工学講演会",,,,,,2021,May "Yuki Onishi,Ryunosuke Yamashita,Kenji Amaya,Yoshihiko Hirai","Numerical analysis of pattern shape deformation in UV imprint considering thermal deformation with UV shrinkage and curing",,"Journal of Vacuum Science & Technology B",,,,,2021,