"Takumi Akiyama,Chun-Yi Chen,Tomoyuki Kurioka,Tso-Fu Mark Chang,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Impurities Analysis of the Gold Components in MEMS Accelerometer by TDS","48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES)",,,,,,2022,Sept.
"Kisuke Miyado,Akira Onishi,Devi.Srujana Tenneti,Parthojit CHAKRABORTY,Katsuyuki Machida,Shinichi Iida,Toshifumi Konishi,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Study of simplified analytical damping constant model of Au MEMS capacitive accelerometer with perforated proof-mass structure","第83回応用物理学会秋季学術講演会","第83回応用物理学会秋季学術講演会",,"  22a-A406-2",,,2022,Sept.
"Masato Sone,Hitomi Watanabe,Kyotaro Nitta,Hideaki Nakajima,Tomoyuki Kurioka,Chun-Yi Chen,Parthojit Chakraborty,Daisuke Yamane,Hiroyuki Ito,Katsuyuki. Machida,Yoshihiro Miyake,Tso-Fu Mark Chang","A Non-Distructive Resoneance Frequency Method to determine Effective young's Modulus of 3-Dimentional Multilayered Ti/Au Micro-cantilevers Toward Highly Sensitive MEMS Accerelometer","NEW METHODS OF DAMAGE AND FAILURE ANALYSES OF STRUCTURAL PARTS",,,,,,2022,Sept.
"Tomoyuki Kurioka,Koichiro Tachibana,Kyotaro Nitta,Chun-Yi Chen,Tso-Fu Mark Chang,Parthojit Chakraborty,Daisuke Yamane,Hiroyuki Ito,Katsuyuki. Machida,Yoshihiro Miyake,Masato Sone","Evaluation of Streucture Stability of  Au-Based Micro Cantilevers Evidenced by Long-Term Vibration Tests","NEW METHODS OF DAMAGE AND FAILURE ANALYSES OF STRUCTURAL PARTS",,,,,,2022,Sept.
"Ryohei Hori,Kazuya Fujita,Chun Yi Chen,Tomoyuki Kurioka,Tso-Fu Mark Chang,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Effects of Cross-Sectional Geometry in Bending Test of Gold Micro-Cantilever toward Design of Movable MEMS Components","48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES)",,,,,,2022,Sept.
"Taro Omura,Chun-Yi Chen,Tomoyuki Kurioka,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Warpage Characteristics of Gold Proof Mass  in MEMS Capacitive Accelerometer","48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES)",,,,,,2022,Sept.
"Kisuke Miyado,Akira Onishi,Devi.Srujana Tenneti,Parthojit CHAKRABORTY,Katsuyuki Machida,Shinichi Iida,Toshifumi Konishi,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Study of simplified analytical damping constant model of Au perforated proof-mass MEMS capacitive accelerometer","第13回集積化MEMS技術研究ワークショップ",,,,,,2022,Aug.
"Kohei Shibata,Akihiro Uchiyama,Akira Onishi,Katsuyuki Machida,Parthojit Chakraborty,Shin-ichi Iida,Toshifumi Konishi,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Simplified Analytical Damping Constant Model for Design of MEMS Capacitive Accelerometer with Gold Perforated Proof-mass Structure",,"IEEE Sensors Journal",,"Vol. 22","Issue 15",,2022,June
"Akira Onishi,Kohei Shibata,Akihiro Uchiyama,Katsuyuki  Machida,Taiki  Ogata,Noboru  Ishihara,Hirotaka Uchitomi,Tso-Fu Mark  Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki  Ito","Suppressed Drift and Low-Noise Sensor Module  with a Single-Axis Gold Proof-Mass MEMS Accelerometer for Micro Muscle Sound Measurement",,"Japanese Journal of Applied Physics",,"Vol. 61",,"p. SD1028",2022,Mar.
"Takumi Akiyama,Yu-An Chien,Chun Yi Chen,Tso-Fu Mark Chang,Hiroyuki Ito,Katsuyuki Machida,Yoshihiro Miyake,Masato Sone","MEMSデバイスへの応?に向けた?ニッケル合?の微?機械的特性 の評価","2022年応?物理学会春季講演会",,,,,,2022,Mar.
"Ryohei Hori,Kazuya Fujita,Chun Yi Chen,Tso-Fu Mark Chang,Hiroyuki Ito,Katsuyuki Machida,Yoshihiro Miyake,Masato Sone","Au単結晶の微?カンチレバーの機械的特性における断?形状依存性","2022年応?物理学会春季講演会",,,,,,2022,Mar.
"Taro Omura,Chun Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Yoshihiro Miyake,Masato Sone","?めっき材料における機械的特性の電流密度依存性","2022年応?物理学会春季講演会",,,,,,2022,Mar.
"Taro Omura,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Effect of Current Density on Micro-Mechanical Property of Electrodeposited Gold Film Evaluated by Micro-Compression",,"Surface & Coatings Technology","Elsevier","Vol. 436",,"p. 128315",2022,Feb.