"Syota Kanno,Taro Omura,Tomoyuki Kurioka,Chun-Yi Chen,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone,Tso-Fu Mark Chang","Effect of Strain Rate in Compression Electrodeposited Gold Micro-Pillar toward Design of MEMS Component",,"Micro and Nano Engineering",,,,"p. 100254",2024,Apr. "Syunkai Watanabe,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Dependence of Structural Design on Effective Youngfs Modulus of Ti/Au Multi-Layered Micro-Cantilevers ?",,"Micro and Nano Engineering",,"Vol. 29",,"p. 100249",2024,Mar. "Ryosuke Miyai,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Clarification of Geometric Effects on Long-Term Structural Stability of Ti/Au Multi- Layered Micro-Cantilevers",,"Micro and Nano Engineering",,,,"p. 100244",2024,Mar. "Syota Kanno,Taro Omura,Tomoyuki Kurioka,Chun Yi Chen,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Tso-Fu Mark Chang,Masato Sone","Investigation of strain rate dependence by micro-compression testing of electrodeposited gold for MEMS accelerometer applications","The 71st JSAP Spring Meeting 2024","Proc. The 71st JSAP Spring MeetinProc.",,,,"p. 23a-12K-3",2024,Mar. "Tatsuhiko Mori,Tomoyuki Kurioka,Chun Yi Chen,Tso-Fu Mark Chang,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Evaluation of the Effects of Heat Treatment Temperature on Warpage Deformation of the Ti/Au Multi-layered Electrodeposited-Au Proof Mass","The 71st JSAP Spring Meeting 2024","Proc. The 71st JSAP Spring MeetinProc.",,,,"p. 23a-12K-2",2024,Mar. "Ryosuke Miyai,Tomoyuki Kurioka,Chun Yi Chen,Tso-Fu Mark Chang,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Evaluation of Relationship between Heat Treatment Temperature and Structural Stability of Micro-cantilevers Possessing Ti/Au Multi-layered Structures","The 71st JSAP Spring Meeting 2024","Proc. The 71st JSAP Spring MeetinProc.",,,,"p. 23a-12K-1",2024,Mar. "Taro Omura,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki ; Ito,Yoshihiro Miyake,Masato Sone","Warpage Study of the Electrodeposited-Au Micro-Components Having the Ti/Au Multi-layered Structures toward MEMS Applications",,"Journal of The Electrochemical Society",,"Vol. 171",,"p. 032501",2024,Feb. "Kisuke Miyado,Devi Srujana Tenneti,Akira Onishi,Katsuyuki Machida,Tomoyuki Kurioka,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Serpentine Spring Design Technique for High Sensitivity MEMS Capacitive Accelerometer Fabricated by Gold Multi-layer Metal Technology",,"Japanese Journal of Applied Physics",,"Vol. 63","No. 4","p. 04SP23",2024,Feb.