"Reiko Saito,* Haruko Akutsu,Jun Asakawa,Shiro Takeno,Kei Kiyokawa,Satoru Nagashima,Takeharu Ishikawa,Takahiro Kashiwagi,Akio Takano,Tetsuo Sakamoto,Masaaki Fujii","Matrix and element dependences of useful yield in Si and SiO2 matrices using laser-ionization sputtered neutral mass spectrometry",,"Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena",,"  36","  3","  03F128",2018,May