"Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","Study on Ti/Au Two-Layered Cantilevers with different Aspect Ratio for MEMS Devices","SSDM2015, 2015 International Conference on Solid State Devises and Materials","SSDM2015, 2015 International Conference on Solid State Devises and Materials",,,,"pp. 52-53",2015,Sept.
"Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","Structure Stability of High Aspect Ratio Ti/Au Two-Layered Cantilevers for Applications in MEMS Accelerometers","MNE2015, The 41th International Conference on Micro and Nano Engineering","MNE2015, The 41th International Conference on Micro and Nano Engineering",,,,"pp. Wed-C-p81",2015,Sept.
"Daisuke Yamane,Toshifumi Konishi,Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Hiroshi Toshiyoshi,Kazuya Masu,Masato Sone,Katsuyuki Machida","A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology","25th Advanced Metallization Conference Asian Session (ADMETAplus2015)",,,,,,2015,Sept.
"Daisuke Yamane,Toshifumi Konishi,Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Hiroshi Toshiyoshi,Kazuya Masu,Masato Sone,Katsuyuki Machida","A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology","AMC2015, Advanced Metallization Conference","AMC2015",,,,,2015,Sept.
"寺西美波,Tso-Fu Mark Chang,小西敏文,松島隆明,町田克之,年吉 洋,山根大輔,伊藤浩之,益 一哉,曽根正人","電解金めっきで作製したMEMSデバイスにおける動作構造安定性","応用物理学会集積化MEMS技術研究会 第6回集積化MEMS技術研究ワークショップ",,,,,"p. 7",2015,July
"寺西美波,Chang Tso-Fu Mark,山根大輔,小西敏文,松島隆明,伊藤浩之,年吉 洋,町田克之,益 一哉,曽根正人","電解金めっきで作製した微小カンチレバーの形状安定性評価","平成27年電気学会センサ・マイクロマシン部門総合研究会",,,,,"pp. 15-18",2015,July
"Minami Teranishi,Tso-Fu Mark Chang,Toshifumi Konishi,Masaki Yano,Katsuyuki Machida,Daisuke Yamane,Hiroyuki Ito,Kazuya Masu,Tatsuo Sato,Masato Sone","Stability of Movable Structure Formed by Au Electroplating for MEMS Devices","ICMAT2015 & IUMRS-ICA2015,","ICMAT2015 & IUMRS-ICA2015,",,,,,2015,June