"Tso-Fu Mark Chang,Chun-Yi Chen,Yota Ishizuka,Minami Teranishi,Takuma Suzuki,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Design of Au-Based Micro-Components with High Structure Stability for Applications in MEMS Inertial Sensors",,"Advances in Microelectronics Reviews","IFSA Publishing","Vol. 2",,"pp. 23-48",2019,Feb.