"御宿 希祐,大西 哲 Tenneti Devi Srujana 町田克之,TENNETI DEVI,町田 克之,栗岡 智行,Tso-Fu Mark Chang,曽根正人,三宅美博,伊藤浩之","Au錘１軸差動型CMOS-MEMS加速度センサのための錘位置制御電極の検討","第15回集積化MEMSシンポジウム","第15回集積化MEMSシンポジウム論文集","応用物理学会集積化MEMS技術研究会","Vol. 8A2-D-4",,,2023,Oct.
"御宿 希祐Kisuke Miyado,Devi.Srujana Tenneti,Akira Onishi,Katsuyuki Machida,Tomoyuki Kurioka,Parthojit CHAKRABORTY,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Design Technique of Serpentine Spring with Half Edge Span Beam Length for High Sensitivity Gold Proof-mass MEMS Capacitive Accelerometer","2023 International Conference on Solid State Devices and Materials","Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials, Nagoya, 2023, pp325-326 G-2-02",,,,,2023,Sept.
"御宿 希祐,大西 哲,Devi Srujana Tenneti,町田 克之,栗岡智行,CHAKRABORTYP,Tso-Fu Mark Chang,曽根正人,三宅美博,伊藤浩之","Au積層メタル技術によるMEMSデバイスの九十九折ばね定数ばらつき抑制の検討","第84回応用物理学会秋季学術講演会","第84回応用物理学会秋季学術講演会 講演予稿集",,"Vol. 20p-B201-1",,,2023,Sept.
"御宿 希祐,Tenneti Devi Srujana,町田 克之,栗岡 智行,Tso-Fu Mark Chang,曽根 正人,三宅 美博,伊藤 浩之","1 軸差動型CMOS-MEMS加速度センサのFB電圧による錘変位特性の検討","第14回集積化MEMS技術研究ワークショップ",,,"  p04",,,2023,Aug.
"Akira Onishi,Kisuke Miyado,Devi Srujana Tenneti,Katsuyuki Machida,Parthojit Chakraborty,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Gold Single-Axis Differential Capacitive MEMS Accelerometer With Proof-Mass Position Control Electrode Fabricated by Post-CMOS Technology","2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)",,,,,2023,Mar.
"御宿 希祐,大西哲,TENNETIDEVI,町田克之,CHAKRABORTYP,曽根正人,三宅美博,伊藤浩之","Au積層メタル技術によるMEMSデバイスのための九十九折ばね設計手法の検討","第70回応用物理学会春季学術講演会","第70回応用物理学会春季学術講演会",,"  16a-B410-6",,,2023,Mar.