"Akihiro Matsutani,Mina Sato,KOICHI HASEBE,Ayako Takada","Microfabrication of Si-based Concave Micromirror Array for Microbial Cell Trapping by XeF2 Vapor Etching","MNC 2018, 31st International Microprocesses and Nanotechnology Conference",,,,,"  16P-11-43",2018,Nov.
"�¼’J�W�G,�²“¡”ü“ß,’·’J•”�_ˆê,�‚“cˆ»Žq","XeF2‹C‘ŠƒGƒbƒ`ƒ“ƒO‚É‚æ‚è�»�삵‚½ ”÷�¶•¨�×–E•ßŠl—pSiƒ}ƒCƒNƒ�‰š–Ê‹¾‚Ì�WŒõŽÀŒ±","‘æ79‰ñ‰ž—p•¨—�Šw‰ï�H‹GŠw�p�u‰‰‰ï",,,,,"  19p-PA2-6",2018,Sept.