"Yuki Onishi,Ryunosuke Yamashita,Kenji Amaya,Yoshihiko Hirai","Resin Deformation Analysis in UV Imprint Considering UV Shrinkage, Thermal Deformation, and Thermochemical Kinetics","The 38th International Conference of Photopolymer Science and Technology (ICPST-38)",,,,,,2021,June "‘å¼—LŠó,ŽR‰º—´”V‰î,“V’JŒ«Ž¡,•½ˆä‹`•F","”½‰ž‘¬“x˜_‚ÉŠî‚­UVd‰»Žûk‚Æ”M•ÏŒ`‚ðl—¶‚µ‚½UVƒCƒ“ƒvƒŠƒ“ƒg‚ÌŒ`ó•ÏŒ`‰ðÍ","‘æ26‰ñŒvŽZHŠwu‰‰‰ï",,,,,,2021,May "Yuki Onishi,Ryunosuke Yamashita,Kenji Amaya,Yoshihiko Hirai","Numerical analysis of pattern shape deformation in UV imprint considering thermal deformation with UV shrinkage and curing",,"Journal of Vacuum Science & Technology B",,,,,2021,