"Yugo KURIHASHI,Hiroshi SAWANO,Hayato YOSHIOKA,Hidenori SHINNO","A Newly Developed X-Y Planer Nano-Motion Table System with Large Travel Ranges","The 5th International Conference on Leading Edge Manufacturing in 21st Century","Proceedings of the 5th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)","The Japan Society of Mechanical Engineers(JSME)","Vol. 5",,"pp. 187-190",2009,Dec. "Mamoru HAYASHI,Hiroshi SAWANO,Hayato YOSHIOKA,Hidenori SHINNO","Torque Error Compensation in Pneumatic Rotary Actuator System Using an Electromagnetic Force","The 5th International Conference on Leading Edge Manufacturing in 21st Century","Proceedings of the 5th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)","The Japan Society of Mechanical Engineers(JSME)","Vol. 5",,"pp. 183-186",2009,Dec. "V–μGŒ›,‹g‰ͺ—El","Œ΄—EŒ΄‘₯‚ΙŠξ‚Γ‚«Έγk‚π‹†‚ί‚ι",,"“Œ‹žH‹Ζ‘εŠw“―‘‹‰οŽE‘ ‘OƒWƒƒ[ƒiƒ‹","ŽΠ’c–@l ‘ ‘OH‹Ζ‰ο",,"No. 1015","pp. 23-26",2009,Oct. "Hidenori SHINNO,Hayato YOSHIOKA,Mamoru HAYASHI","A High Performance Tilting Platform Driven by Hybrid Actuator",,"CIRP(International Academy for Production Engineering) Annals-Manufacturing Technology","ELSEVIER","Vol. 58","No. 1","pp. 363-366",2009,Aug. "Hayato YOSHIOKA,Mamoru HAYASHI,Hidenori SHINNO","Status Monitoring of Ultraprecision Machining Using Micro Thermo Sensor and AE Sensor",,"International Journal of Automation Technology","Fuji Technology Press Ltd","Vol. 3","No. 4","pp. 422-427",2009,July "M.Takahashi,H.Yoshioka,H.Shinno","Ultraprecision Machining System for Fabricating Nano-Devices","the 9th International Conference of the euspen","Proceedings of the 9th International Conference of the euspen, June 2nd-5th, 2009, San Sebastian, Spain",,"Vol. 1",,"pp. 228-231",2009,June "M.Hayashi,H.Yoshioka,H.Sawano,H.Shinno","High Torque and High Precision Rotary Table System Driven by Hybrid Actuator",,"Proceedings of the 9th International Conference of the euspen, June 2nd-5th, San Sebastian, Spain",,"Vol. 1",,"pp. 402-405",2009,June "V–μGŒ›,‹g‰ͺ—El","“ΑW –’—ˆ‹Zp y’΄Έ–§‰ΑH‹@gANGELhz",,"ΆŽYΰƒ}[ƒPƒeƒBƒ“ƒO","ƒjƒ…[ƒXƒ_ƒCƒWƒFƒXƒgŽΠ","Vol. 46","No. 1","p. A-37",2009,Apr. "‹g‰ͺ—El","’΄Έ–§‰ΑH‹@uANGELv‚Μ“Α’₯‚ƍ‘Œγ‚Μ“WŠJ",,"Œ^‹Zp","“ϊŠ§H‹ΖV•·ŽΠ","Vol. 24","No. 4","pp. 103-106",2009,Apr. "‹g‰ͺ—El","ƒ}ƒCƒNƒ‰·“xƒZƒ“ƒT‚π—p‚’‚½’΄Έ–§Ψν‰ΑH‚Μ“K‰ž§Œδ",,"“ϊ–{‹@ŠBŠw‰οŽ","“ϊ–{‹@ŠBŠw‰ο","Vol. 112","No. 1083","p. 143",2009,Feb.