"K. Akiyama,H. Funakubo","Luminescent Epitaxial β-FeSi2 Film Growth by MOCVD","DPS2022 (43rd International Symposium on Dry Process)",,,,,,2022,Nov. "秋山賢輔,舟窪浩","ドーピングした鉄シリサイド膜のフォトルミネッセンス発光特性","第69回応用物理学会春季学術講演会",,,,,,2022,Mar.