"Mie Tohnishi,Sachiko Matsushita,Akihiro Matsutani","Fabrication of nonreflective black germanium in near-infrared region up to a wavelength of 2.5 ?m by SF6+O2/C4F8-plasma-based deep reactive ion etching","2023 International Symposium on Dry Process (DPS 2023)","Proceedings of International Symposium on Dry Process",,,,,2023,Nov.
"遠西美重,松谷晃宏,松下祥子","Deep-RIE により作製したブラックGe 微細構造側壁のEDX 分析","2023年第84回応用物理学会秋季学術講演会",,,,,"  20p-P07-15",2023,Sept.
"松谷晃宏,遠西美重","デジタルカメラと回折格子によるSi のDeep-RIE プラズマの発光分光測定と EDX による高アスペクト比（HAR）エッチング側壁の分析の比較","2023年第84回応用物理学会秋季学術講演会",,,,,"  20p-P07-16",2023,Sept.
"佐藤 美那,遠西美重,松谷晃宏","Ar+ビーム照射により作製したKOHエッチング用SiマスクのXPS解析","2023年第70回応用物理学会春季学術講演会",,,,,,2023,Mar.
"Mie Tohnishi,Mina Sato,Akihiro Matsutani,Takashi Ubukata,Sachiko Matsushita","Surface Treatment of Polyimide using Solid-source H2O Plasma for Fabrication of Ge Electrode",,"Sensors and Materials",,"Vol. 35","No. 3","pp. 1023-1033",2023,Mar.
"遠西 美重,松谷晃宏,生方 俊,松下祥子","固体ソースH?Oプラズマ処理したポリイミド樹脂の表面のXPS分析","2023年第70回応用物理学会春季学術講演会",,,,,,2023,Mar.
"Ryo Tsukui,Masaru Kino,Kodai Yamamoto,Mina Sato,Mie Tohnishi,Akihiro Matsutani,Mikio Kurita","Laboratory demonstration of the birefrigent point-diffraction interferometer wavefront sensor",,"Optics Continuum",,"Vol. 2",,"pp. 382-396",2023,Jan.