"Zebing Mao,Kazuhiro Yoshida,Joon-wan Kim","Study on the fabrication of a SU-8 cantilever vertically-allocated in a closed fluidic microchannel",,"Microsystem Technologies",,"Volume 24","No. 5","pp. 2473?2483",2017,Oct. "MAO ZEBING,吉田和弘,金俊完","SU-8自立型微細構造体の製作と接合","山梨講演会2017","山梨講演会2017 講演論文集(CD-ROM)",,,"No. 170-3","pp. 35-36",2017,Oct. "ZEBING MAO,Joon-wan KIM,KAZUHIRO YOSHIDA","Study on Geometrical Parameters of Micro Check Valves made of SU-8","日本機械学会 2017年度年次大会","日本機械学会2017年度年次大会講演論文集(DVD論文集)","一般社団法人 日本機械学会",,"No. 17-1"," J1110202",2017,Sept.