"Akira Onishi,Kohei Shibata,Akihiro Uchiyama,Katsuyuki  Machida,Taiki  Ogata,Noboru  Ishihara,Hirotaka Uchitomi,Tso-Fu Mark  Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki  Ito","Suppressed Drift and Low-Noise Sensor Module  with a Single-Axis Gold Proof-Mass MEMS Accelerometer for Micro Muscle Sound Measurement",,"Japanese Journal of Applied Physics",,"Vol. 61",,"p. SD1028",2022,Mar.