"T. Gotow,T. Arai,T. Aota,Y. Miyamoto","Evaluation of TMAH treatment for isolation process of N-polar GaN HEMTs","Compound Semiconductor Week",,,,,,2022,June "Vˆδ‹M‘ε,Β“c’q–η,αΑ•Η—E•v,’†“cŒ’,Œγ“‘‚Š°,‹{–{‹±K","N‹Ι«GaN HEMT‚ΜTMAH‚Ι‚ζ‚ι‘fŽq•ͺ—£","‘ζ69‰ρ‰ž—p•¨—Šw‰οt‹GŠwpu‰‰‰ο",,,,,,2022,Mar. "‹{–{‹±K,Œγ“‘‚Š°","GaN HEMT‚Ε‚Μ“ρŽŸŒ³“dŽqƒKƒXƒLƒƒƒŠƒ„”Z“x‚Ζ ƒQ[ƒgƒhƒŒƒCƒ“ŠΤƒŠ[ƒN“d—¬—˜_ŒvŽZ",,"“d‹CŠw‰ο˜_•ΆŽC","“d‹CŠw‰ο","Vol. 142","No. 3","pp. 348-353",2022,Mar.