"Y. Takamura,H. Nitta,R. Ishido,T. Kaneko,T. Miyazaki,N. Hosoda,K. Fujisaki,S. Nakagawa","Research on planar type spiral inductors with facing traget sputtered CoFeB-SiO2 magnetic layers for Power Electronics Circuits","‘æ15‰ñƒXƒ}[ƒgƒGƒlƒ‹ƒM[‹ZpŒ¤‹†ƒZƒ“ƒ^[ƒVƒ“ƒ|ƒWƒEƒ€`ƒGƒlƒ‹ƒM[‚Ì•ÏŠ·E’™‘ `",,,,,,2023,Oct. "Y. Takamura,H. Nitta,K. Kawahara,T. Kaneko,R. Ishido,T. Miyazaki,N. Hosoda,K. Fujisaki,S. Nakagawa","Fabrication of CoFeB?SiO2 Films With Large Uniaxial Anisotropy by Facing Target Sputtering and its Application to High-Frequency Planar-Type Spiral Inductors",,"IEEE Transactions on Magnetics","IEEE","Vol. 59","Issue 11","pp. 1-4",2023,July "Y. Takamura,H. Nitta,K. Kawahara,T. Kaneko,R. Ishido,T. Miyazaki,N. Hosoda,K. Fujisaki,S. Nakagawa","Fabrication of CoFeB-SiO2 films with large uniaxial anisotropic by facing target sputtering and its application to high frequency planar type spiral inductors","Intermag2023","Intermag 2023 Digest Book",," MOA-05",,,2023,May "m“c”¿“ì,‹àŽq’‰K,‰ÍŒ´˜a”n,Ό˗º—S,‹{?’B–ç,דc®Šö,“¡?Œh‰î,’†ì–ÎŽ÷,‚‘º—z‘¾","‘ÎŒüƒ^[ƒQƒbƒgŽ®ƒXƒpƒbƒ^‚Å컂µ‚½CoFeB-SiO2”––Œ‚ð—p‚¢‚½’·•ûŒ`ƒXƒpƒCƒ‰ƒ‹ƒCƒ“ƒ_ƒNƒ^","—ߘa5”N“d‹CŠw‰ï‘S‘‘å‰ï",,," 2-095",,,2023,Mar.