"Shota Otobe,Tatsuya Koga,Ken Atsumi,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Shin-ichi Iida,Hiroyuki. Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Sub-1mG Tri-Axis MEMS Accelerometer with Multiple Segmented Capacitance Detection Electrodes","31st International Microprocesses and Nanotechnology Conference (MNC2018)",,,,,,2018,Nov. "ŒÃ‰ê ’B–ç,ŽRª ‘å•ã,¬¼ •q•¶,²•z Wº,”Ñ“c Tˆê,ˆÉ“¡ _”V,ÎŒ´ ¸,’¬“c Ž”V,‰v ˆêÆ","1Ž²MEMS‰Á‘¬“xƒZƒ“ƒT‚ÌAuŽŒú–Œ‰»‚É‚æ‚é‚«”\‰»‚ÌŒŸ“¢","‘æ35‰ñuƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“‚Ɖž—pƒVƒXƒeƒ€vƒVƒ“ƒ|ƒWƒEƒ€iƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“•”–å‘å‰ïj",,,,,,2018,Oct. "Žsì ’Žu,V“‡ G•¶,ŒÃ‰ê ’B–ç,ŽRª ‘å•ã,¬¼ •q•¶,²•z Wº,”Ñ“c Tˆê,ˆÉ“¡ _”V,ÎŒ´ ¸,’¬“c Ž”V,‰v ˆêÆ","Au’PˆêŽ•½s•½”ÂŒ^3Ž²MEMS‰Á‘¬“xƒZƒ“ƒT‚ÌŒŸ“¢","‘æ35‰ñuƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“‚Ɖž—pƒVƒXƒeƒ€vƒVƒ“ƒ|ƒWƒEƒ€iƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“•”–å‘å‰ïj",,,,,,2018,Oct. "ŒÃ‰ê ’B–ç,‚ˆÀ Šî‘å,ŽRª ‘å•ã,ˆÉ“¡ _”V,¬¼ •q•¶,“¹³ Žu˜Y,ÎŒ´ ¸,’¬“c Ž”V,‰v ˆêÆ","Ï‘wƒƒ^ƒ‹‹Zp‚Å컂µ‚½MEMSŠµ«ƒZƒ“ƒT‚̃‚ƒWƒ…[ƒ‹‰»‚ÌŒŸ“¢(2)","‘æ64‰ñ‰ž—p•¨—Šw‰ït‹GŠwpu‰‰‰ï",,,,,,2018,Mar. "‚ˆÀ Šî‘å,ŒÃ‰ê ’B–ç,’Ò ˆê•½,ˆÉ“¡ _”V,ŽRª ‘å•ã,“¹³ Žu˜Y,¬¼ •q•¶,”Ñ“c Tˆê,ÎŒ´ ¸,’¬“c Ž”V,‰v ˆêÆ","ŒXŽÎ‚ð—p‚¢‚½1mG MEMS‰Á‘¬“xƒZƒ“ƒT‚Ì•ª‰ð”\•]‰¿‚ÌŒŸ“¢","•½¬30”N “d‹CŠw‰ï ‘S‘‘å‰ï",,,,,,2018,Mar.